JetPlasma/ZZ-EFEM

niuyx 2af6e0c929 1. Revise waferInfo transfer when robot occurs error;		2 月之前
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DeviceDefine.xml	7a65407cbb 1. Add UIConfig Vrigo008 and related UIOperationView(Max config: 2LP,2PM,1Flipper,1Buffer,1Aligner)	3 月之前
DeviceModel.xml	2af6e0c929 1. Revise waferInfo transfer when robot occurs error;	2 月之前
IoProviderConfig.xml	16a714dc77 Modify ZZEfem UI; Add Buffer1, Aligner1 Module;	4 月之前
RobotTeachStation.xml	16a714dc77 Modify ZZEfem UI; Add Buffer1, Aligner1 Module;	4 月之前
_ioDefineCard1.xml	2af6e0c929 1. Revise waferInfo transfer when robot occurs error;	2 月之前