RtState.cs 1.3 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081
  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. namespace VirgoCommon
  7. {
  8. public enum RtState
  9. {
  10. Init,
  11. Initializing,
  12. Idle,
  13. Manual,
  14. Transfer,
  15. AutoIdle,
  16. AutoRunning,
  17. AutoRunningPaused,
  18. ReturningCassette,
  19. Cycle,
  20. PrepareCycle,
  21. PostCycle,
  22. SetSpeed,
  23. Error,
  24. Reset,
  25. Processing,
  26. PostProcess,
  27. PauseProcess,
  28. //Maintenance,
  29. //WaferMapping,
  30. //Cycling,
  31. ReturnWafer,
  32. }
  33. public enum PMState
  34. {
  35. Init,
  36. Idle,
  37. Homing,
  38. GasFlowing,
  39. RfPowering,
  40. Heating,
  41. LaunchingPump,
  42. Pumping,
  43. Venting,
  44. Purging,
  45. MoveLift,
  46. Purge,
  47. Transfer,
  48. Error,
  49. PrepareTransfer,
  50. PostTransfer,
  51. TransferHandoff,
  52. //Process,
  53. LeakCheck,
  54. LiftpinMoving,
  55. LiftpinWaiting,
  56. GuidePinMoving,
  57. PreClean,
  58. LoadProcessRecipe,
  59. PreProcess,
  60. Processing,
  61. PostProcess,
  62. OpeningLid,
  63. ClosingLid,
  64. MFCVerification,
  65. AllMFCVerification,
  66. OpeningSlitDoor,
  67. ClosingSlitDoor,
  68. }
  69. }