using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; namespace VirgoCommon { public enum RtState { Init, Initializing, Idle, Manual, Transfer, AutoIdle, AutoRunning, AutoRunningPaused, ReturningCassette, Cycle, PrepareCycle, PostCycle, SetSpeed, Error, Reset, Processing, PostProcess, PauseProcess, //Maintenance, //WaferMapping, //Cycling, ReturnWafer, } public enum PMState { Init, Idle, Homing, GasFlowing, RfPowering, Heating, LaunchingPump, Pumping, Venting, Purging, MoveLift, Purge, Transfer, Error, PrepareTransfer, PostTransfer, TransferHandoff, //Process, LeakCheck, LiftpinMoving, LiftpinWaiting, GuidePinMoving, PreClean, LoadProcessRecipe, PreProcess, Processing, PostProcess, OpeningLid, ClosingLid, MFCVerification, AllMFCVerification, OpeningSlitDoor, ClosingSlitDoor, } }