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- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace VirgoCommon
- {
- public enum RtState
- {
- Init,
- Initializing,
- Idle,
- Manual,
- Transfer,
- AutoIdle,
- AutoRunning,
- AutoRunningPaused,
- ReturningCassette,
- Cycle,
- PrepareCycle,
- PostCycle,
- SetSpeed,
- Error,
- Reset,
- Processing,
- PostProcess,
- PauseProcess,
- //Maintenance,
- //WaferMapping,
- //Cycling,
- ReturnWafer,
- }
- public enum PMState
- {
- Init,
- Idle,
- Homing,
- GasFlowing,
- RfPowering,
- Heating,
- LaunchingPump,
- Pumping,
- Venting,
- Purging,
- MoveLift,
- Purge,
- Transfer,
- Error,
- PrepareTransfer,
- PostTransfer,
- TransferHandoff,
- //Process,
- LeakCheck,
- LiftpinMoving,
- LiftpinWaiting,
- GuidePinMoving,
- PreClean,
- LoadProcessRecipe,
- PreProcess,
- Processing,
- PostProcess,
- OpeningLid,
- ClosingLid,
- MFCVerification,
- AllMFCVerification,
- OpeningSlitDoor,
- ClosingSlitDoor,
- }
- }
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