|
@@ -1,29 +1,28 @@
|
|
|
<?xml version="1.0" encoding="utf-8"?>
|
|
|
<root system="Virgo">
|
|
|
<configs name="System" nameView="System">
|
|
|
- <config default="true" name="IsSimulatorMode" nameView="Simulator Mode" description="仿真模式" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
- <config default="true" name="IsOpenIOEdit" nameView="Simulator Mode" description="仿真模式" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
- <config default="false" name="IsATMMode" nameView="ATM Mode" description="大气压传送测试模式" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="false" name="IsCycleMode" nameView="Cycle Mode" description="循环跑片模式" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="3" name="CycleCount" nameView="Cycle Count" description="循环次数" max="999999" min="1" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="5" name="ATMCyclePMDelayTime" nameView="ATM Cycle PM Delay Time" description="ATM循环测试取片延时时间" max="9999" min="1" paramter="" tag="" unit="s" type="Integer" visible="false"/>
|
|
|
- <config default="25" name="MaxTemperatureToleranceTransferWafer" nameView="Max Temperature Tolerance Transfer Wafer" description="传片最大温度差" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
|
|
|
- <config default="1" name="MaxTemperatureToleranceToTarget" nameView="Max Temperature Tolerance To Target" description="工艺最大温度差" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
|
|
|
- <config default="3" name="SmallWafer" nameView="Small Wafer" description="小晶圆尺寸" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
|
|
|
- <config default="4" name="MidWafer" nameView="Mid Wafer" description="中晶圆尺寸" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
|
|
|
- <config default="6" name="BigWafer" nameView="Big Wafer" description="大晶圆尺寸" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
|
|
|
- <config default="LP1,LP2,EfemRobot,EFEM,Aligner1,Buffer,PMA,PMB,Flipper" name="InstalledModules" description="安装的模块" max="" min="" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
- <config default="2" name="MaxInternalWaferCount" nameView="Max Internal wafer count" description="系统可允许进入的wafer数" max="25" min="1" paramter="" tag="" unit="" visible="true" type="Integer" />
|
|
|
- <!--<config default="30" name="DefaultCoolingTime" nameView="Default Cooling Time" description="晶圆默认冷却时间" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />-->
|
|
|
+ <config default="true" name="IsSimulatorMode" nameView="Simulator Mode" description="Simulator Mode" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
+ <config default="true" name="IsOpenIOEdit" nameView="Is open IO edit" description="Is open IO edit" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
+ <config default="false" name="IsATMMode" nameView="ATM Mode" description="ATM Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
|
|
+ <config default="false" name="IsCycleMode" nameView="Cycle Mode" description="Cycle Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
|
|
+ <config default="3" name="CycleCount" nameView="Cycle Count" description="Cycle Count" max="999999" min="1" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="5" name="ATMCyclePMDelayTime" nameView="ATM Cycle PM Delay Time" description="ATM Cycle PM Delay Time" max="9999" min="1" paramter="" tag="" unit="s" type="Integer" visible="false"/>
|
|
|
+ <config default="25" name="MaxTemperatureToleranceTransferWafer" nameView="Max Temperature Tolerance Transfer Wafer" description="Max Temperature Tolerance Transfer Wafer" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
|
|
|
+ <config default="1" name="MaxTemperatureToleranceToTarget" nameView="Max Temperature Tolerance To Target" description="Max Temperature Tolerance To Target" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
|
|
|
+ <config default="3" name="SmallWafer" nameView="Small Wafer" description="Small Wafer" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
|
|
|
+ <config default="4" name="MidWafer" nameView="Mid Wafer" description="Mid Wafer" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
|
|
|
+ <config default="6" name="BigWafer" nameView="Big Wafer" description="Big Wafer" max="100" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
|
|
|
+ <config default="LP1,LP2,EfemRobot,EFEM,Aligner1,Buffer,PMA,PMB,Flipper" name="InstalledModules" description="Installed modules" max="" min="" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
+ <config default="2" name="MaxInternalWaferCount" nameView="Max Internal wafer count" description="Max Internal wafer count" max="25" min="1" paramter="" tag="" unit="" visible="true" type="Integer" />
|
|
|
+ <!--<config default="30" name="DefaultCoolingTime" nameView="Default Cooling Time" description="Default Cooling Time" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />-->
|
|
|
<config default="Default" name="LogFilePath" nameView="LogFilePath" description="Log File Path" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="true" name="RecipeFolderByType" nameView="Recipe File Saved In Folder Process or Clean" description="Recipe file saved in process or clean folders" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="false" name="IsIgnoreCDAPressure2Alarm" nameView="IsIgnoreCDAPressure2Alarm" description="Is Ignore CDAPressure2 Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
<config default="0" name="ChamberType" nameView="Chamber Mode" description="0=>VirgoMask,1=>VirgoR" max="10" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
|
|
|
- <config default="false" name="Recipetolerance" nameView="Recipetolerance" description="是否启用reciepe tolerance 功能" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
|
|
-
|
|
|
+ <config default="false" name="Recipetolerance" nameView="Recipetolerance" description="Recipe tolerance" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
|
|
|
|
|
<configs name="SetUp" nameView="Set Up" visible="false">
|
|
|
- <config default="true" name="EPDInstalled" nameView="Is EPD installed" description="EPD是否安装" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
|
|
+ <config default="true" name="EPDInstalled" nameView="Is EPD installed" description="Is EPD installed" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
|
|
</configs>
|
|
|
|
|
|
<configs name="EndPoint" nameView="EndPoint" visible="false">
|
|
@@ -64,23 +63,23 @@
|
|
|
|
|
|
<!--EFEM-->
|
|
|
<configs name="EFEM" nameView="EFEM">
|
|
|
- <config default="30" name="HomeTimeout" nameView="Home Timeout" description="EFEM初始化超时" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
|
|
|
+ <config default="30" name="HomeTimeout" nameView="Home Timeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
|
|
|
<config default="60" name="MotionTimeout" nameView="Motion Timeout" description="motion time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
|
|
<config default="20" name="AlignerTimeout" nameView="Aligner Timeout" description="aligner time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
|
|
|
<config default="0" name="AlignAngle" nameView="Aligner Angle" description="" max="360" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
- <config default="127.0.0.1:13000" name="IPAddress" nameView="IP Address" description="EFEM IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="true" name="CheckSideDoorOnEAPMap" nameView="CheckSideDoorOnEAPMap" description="在自动跑货的时候检查侧门是否关闭" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
|
|
- <config default="true" name="CheckCassetteDoorOnEAPMap" nameView="CheckCassetteDoorOnEAPMap" description="在自动跑货的时候检查EFEM正门是否关闭" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
|
|
+ <config default="127.0.0.1:13000" name="IPAddress" nameView="IP Address" description="EFEM IP and Port;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
+ <config default="true" name="CheckSideDoorOnEAPMap" nameView="CheckSideDoorOnEAPMap" description="Check side door on EAP map" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
|
|
+ <config default="true" name="CheckCassetteDoorOnEAPMap" nameView="CheckCassetteDoorOnEAPMap" description="Check cassette door on EAP map" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
|
|
|
|
|
|
|
|
|
- <config default="4" name="EfemType" nameView="EFEM Type" description="EFEM类型,1=Future广川 2=Jet自制 3=Brooks 4=BeamSUNWAY" max="300" min="1" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="4" name="EfemType" nameView="EFEM Type" description="EFEM type,1=Future 2=Jet 3=Brooks 4=BeamSUNWAY" max="300" min="1" paramter="" tag="" unit="" type="Integer" />
|
|
|
|
|
|
- <config default="false" name="AutoUnlockAfterUnload" nameView="auto unlock after unload" description="是否自动解锁" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
|
|
+ <config default="false" name="AutoUnlockAfterUnload" nameView="auto unlock after unload" description="auto unlock after unload" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
|
|
|
|
|
- <config default="false" name="IgnoreWaterFlowError" nameView="Ignore water flow alarm" description="是否忽略冷却水报警" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
|
|
+ <config default="false" name="IgnoreWaterFlowError" nameView="Ignore water flow alarm" description="Ignore water flow alarm" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="false" name ="VerifyWaferExistenceAtferRetract" nameView="Auto Verify Wafer existance after retract robot arm" description="Auto Verify Wafer existance after retract robot arm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
|
|
|
|
|
|
- <config default="40" name="DelayTimeBeforeLiftDown" nameView="Delay Time before lift down" description="冷却前,lift pin停留多久再落下" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
+ <config default="40" name="DelayTimeBeforeLiftDown" nameView="Delay Time before lift down" description="Delay Time before lift down" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
<config default="0" name="FlipReturnWaferOption" nameView="Flip Option while return wafer" description="FlipOption,0=Not Flip, 1=FaceUp, 2=FaceDown, 3=AlwaysReverse" max="3" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="false" name="EnableResetError" nameView="Enable Reset EFEM Error by Click Reset Button" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
|
|
@@ -93,15 +92,15 @@
|
|
|
</configs>
|
|
|
<configs name="LoadPort" nameView="LoadPort" >
|
|
|
<config default="30" name="MotionTimeout" nameView="Motion Timeout" description="Motion Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
|
|
|
- <config default="30" name="HomeTimeout" nameView="Home Timeout" description="LoadPort初始化超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
|
|
|
- <config default="25" name="SlotNumber" nameView="Slot number" description="槽位个数" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
|
|
|
- <config default="true" name="SlotFromBottom" nameView="Slot number from bottom" description="编号顺序从下往上,最下面的是1" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
|
|
+ <config default="30" name="HomeTimeout" nameView="Home Timeout" description="LoadPort Home Timeout" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
|
|
|
+ <config default="25" name="SlotNumber" nameView="Slot number" description="Slot number" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
|
|
|
+ <config default="true" name="SlotFromBottom" nameView="Slot number from bottom" description="Slot number from bottom" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
|
|
|
|
|
- <config default="false" name="EnableScanner" nameView="Enable Scanner Reader" description="是否打开扫码枪功能" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="true" name="EnableDockUndock" nameView="Enable Dock and Undock" description="是否需要Dock/Undock动作" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
|
|
|
- <config default="0" name="WaferPlacementParityFlag" nameView="Parity Flag for wafer placement" description="0: 所有槽可放; 1:奇数槽可放; 2: 偶数槽可放。" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="true" name="HasMapFunction" description="是否具有Map功能" max="0" min="0" paramter="" tag="" unit="" visible="true" type="Bool" />
|
|
|
- <config default="true" name="HasLoadFunction" description="是否具有Load/Unload功能" max="0" min="0" paramter="" tag="" unit="" visible="true" type="Bool" />
|
|
|
+ <config default="false" name="EnableScanner" nameView="Enable Scanner Reader" description="Enable scanner reader" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
+ <config default="true" name="EnableDockUndock" nameView="Enable Dock and Undock" description="Enable Dock and Undock" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
|
|
|
+ <config default="0" name="WaferPlacementParityFlag" nameView="Parity Flag for wafer placement" description="0: all slot; 1:Odd slot; 2: Even slot。" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="true" name="HasMapFunction" nameView="HasMapFunction" description="Has map function" max="0" min="0" paramter="" tag="" unit="" visible="true" type="Bool" />
|
|
|
+ <config default="true" name="HasLoadFunction" nameView="HasLoadFunction" description="Has load/unload function" max="0" min="0" paramter="" tag="" unit="" visible="true" type="Bool" />
|
|
|
|
|
|
</configs>
|
|
|
</configs>
|
|
@@ -109,13 +108,13 @@
|
|
|
<!--Router-->
|
|
|
<configs name="Scheduler" nameView="Scheduler" >
|
|
|
<config default="true" name="GroupWaferBySequence" nameView="Group Wafer By Sequence" description="GroupWaferBySequence" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
- <config default="true" name="IsRunInParallelMode" nameView="Is Run In Parallel Mode" description="并行模式1对1,串行模式按顺序" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
+ <config default="true" name="IsRunInParallelMode" nameView="Is Run In Parallel Mode" description="Is run in parallel mode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
</configs>
|
|
|
|
|
|
<!--PMA-->
|
|
|
<configs name="PMA" nameView="PMA" >
|
|
|
<config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="prepare transfer time out" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
|
|
|
- <config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
+ <config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="Open Gas Valve Timeout" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
@@ -132,13 +131,13 @@
|
|
|
<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
|
|
|
<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
|
|
|
<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
|
|
|
- <config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification中的目标压力" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
|
|
|
- <config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification中的目标时间" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
|
|
|
+ <config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification target pressure" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
|
|
|
+ <config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification gas flow time" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
|
|
|
<config default="0" name="PinDownDelayTimePick" nameView="Pick Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
|
|
|
<config default="0" name="PinDownDelayTimePlace" nameView="Place Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
|
|
|
<config default="0" name="LiftPinPositionAfterPlace" nameView="Lift Pin Position After Place wafer, 0, Down, 1, Middle, 2, Up" description="" max="5" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="Strip" name="ChamberLabel" nameView="Chamber Label" description="Chamber名称" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification允许的最大偏差值(%)" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
|
|
|
+ <config default="Strip" name="ChamberLabel" nameView="Chamber Label" description="Chamber label" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
+ <config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification max deviation(%)" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
|
|
|
<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
@@ -151,18 +150,18 @@
|
|
|
<configs name="MFCVerification" nameView="MFC Verification" >
|
|
|
<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
|
|
|
<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
|
|
|
- <config default="9" name="TargetPressure" nameView="结束条件:腔体压力达到的最大值" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
|
|
|
- <config default="180" name="GasFlowTime" nameView="结束条件:流气多长时间" max="1000" min="0" paramter="" tag="" unit="second" visible="true" type="Double" />
|
|
|
- <config default="30" name="MaxDeviation" nameView="结果检查:最大偏差,超过该值报警" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
|
|
|
- <config default="20" name="PressureStableTolerance" nameView="稳定条件:压力1秒内的最大变化范围" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
|
|
|
- <config default="20" name="FlowStableTolerance" nameView="稳定条件:流量设定值和反馈值允许的最大偏差" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
|
|
|
- <config default="5" name="CheckStableTimeout" nameView="稳定条件:在多长时间内处于稳定状态" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
|
|
|
+ <config default="9" name="TargetPressure" nameView="Target pressure" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
|
|
|
+ <config default="180" name="GasFlowTime" nameView="Gas flow time" max="1000" min="0" paramter="" tag="" unit="second" visible="true" type="Double" />
|
|
|
+ <config default="30" name="MaxDeviation" nameView="Max deviation" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
|
|
|
+ <config default="20" name="PressureStableTolerance" nameView="Pressure stable tolerance" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
|
|
|
+ <config default="20" name="FlowStableTolerance" nameView="Flow stable tolerance" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
|
|
|
+ <config default="5" name="CheckStableTimeout" nameView="Check stable timeout" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
|
|
|
</configs>
|
|
|
|
|
|
<configs name="Chiller" nameView="Chiller" >
|
|
|
<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<!--<config default="false" name="ChillerSameWithPMB" nameView="Chiller Same With PMB" description="enable chiller same with PMB or not" max="1" min="0" tag="" unit="" type="Bool" />-->
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM12" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
@@ -174,7 +173,7 @@
|
|
|
<configs name="GridChiller" nameView="Grid Chiller" >
|
|
|
<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<!--<config default="false" name="ChillerSameWithPMB" nameView="Chiller Same With PMB" description="enable chiller same with PMB or not" max="1" min="0" tag="" unit="" type="Bool" />-->
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM12" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="10" min="-10" paramter="" tag="" unit="degree" type="Double" />
|
|
@@ -184,14 +183,14 @@
|
|
|
<config default="0" name="CoolantOutletTcFeedbackOffset" nameView="Coolant Outlet Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" visible="false"/>
|
|
|
</configs>
|
|
|
<configs name="DryPump" nameView="Dry Pump" >
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM13" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
|
|
|
<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
|
|
</configs>
|
|
|
<configs name="Rf" nameView="Source RF" >
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
@@ -208,18 +207,18 @@
|
|
|
<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
|
|
|
- <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
|
|
|
- <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
- <config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
+ <config default="false" name="EnableCalibration" nameView="Enable calibration" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
|
|
|
+ <config default="100#100;200#200;" name="CalibrationTable" nameView="Calibration table" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
+ <config default="" name="GeneratorSerialNumber" nameView="Generator serial number" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
+ <config default="" name="SensorSerialNumber" nameView="Sensor serial number" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="CCFG600" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" visible="false"/>
|
|
|
<config default="600" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="2200" min="1800" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="600" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
- <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
+ <config default="" name="CalibrationTableDetail" nameView="Calibration table detail" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
</configs>
|
|
|
<configs name="match" nameView="Source Match" >
|
|
|
<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet;3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:AdTec; 2:Comet;3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
@@ -231,7 +230,7 @@
|
|
|
|
|
|
<configs name="BiasRf" nameView="Bias RF" >
|
|
|
<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
- <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="2" name="MFG" nameView="MFG" description="Manufacturer, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
@@ -247,18 +246,18 @@
|
|
|
<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
|
|
|
- <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
- <config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
+ <config default="false" name="EnableCalibration" nameView="Enable calibration" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
|
|
|
+ <config default="100#100;200#200;" name="CalibrationTable" nameView="Calibration table" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
+ <config default="" name="GeneratorSerialNumber" nameView="Generator serial number" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
+ <config default="" name="SensorSerialNumber" nameView="Sensor serial number" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="CCFG600" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" visible="false"/>
|
|
|
<config default="600" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="660" min="540" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="600" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
- <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
+ <config default="" name="CalibrationTableDetail" nameView="Calibration table detail" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
</configs>
|
|
|
<configs name="BiasMatch" nameView="Bias Match" >
|
|
|
<config default="false" name="EnableBiasMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
- <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet;3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="2" name="MFG" nameView="MFG" description="Manufacturer, 1:AdTec; 2:Comet;3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
@@ -346,24 +345,24 @@
|
|
|
<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
<config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
<config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
- <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
</configs>
|
|
|
<configs name="WallHeater" nameView="Heater Wall" >
|
|
|
<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
@@ -374,24 +373,24 @@
|
|
|
<config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
<config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
|
|
|
- <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
</configs>
|
|
|
|
|
|
<configs name="ForelineHeater" nameView="Heater Foreline" >
|
|
@@ -403,24 +402,24 @@
|
|
|
<config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
<config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
|
|
|
- <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
</configs>
|
|
|
|
|
|
<configs name="GridHeater" nameView="Heater Grid" >
|
|
@@ -432,24 +431,24 @@
|
|
|
<config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
<config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
|
|
|
- <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
</configs>
|
|
|
<!--Clean-->
|
|
|
|
|
@@ -522,7 +521,7 @@
|
|
|
<!--PMB-->
|
|
|
<configs name="PMB" nameView="PMB" >
|
|
|
<config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="prepare transfer time out" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
|
|
|
- <config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
+ <config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="Open gas valve timeout" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
@@ -539,13 +538,13 @@
|
|
|
<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
|
|
|
<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
|
|
|
<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
|
|
|
- <config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification中的目标压力" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
|
|
|
- <config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification中的目标时间" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
|
|
|
+ <config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification target pressure" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
|
|
|
+ <config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification gas flow time" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
|
|
|
<config default="0" name="PinDownDelayTimePick" nameView="Pick Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
|
|
|
<config default="0" name="PinDownDelayTimePlace" nameView="Place Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
|
|
|
<config default="0" name="LiftPinPositionAfterPlace" nameView="Lift Pin Position After Place wafer, 0, Down, 1, Middle, 2, Up" description="" max="5" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="Strip" name="ChamberLabel" nameView="Chamber Label" description="Chamber名称" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification允许的最大偏差值(%)" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
|
|
|
+ <config default="Strip" name="ChamberLabel" nameView="Chamber Label" description="Chamber label" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
+ <config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification max deviation(%)" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
|
|
|
<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
|
<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
@@ -557,18 +556,18 @@
|
|
|
<configs name="MFCVerification" nameView="MFC Verification" >
|
|
|
<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
|
|
|
<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
|
|
|
- <config default="9" name="TargetPressure" nameView="结束条件:腔体压力达到的最大值" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
|
|
|
- <config default="180" name="GasFlowTime" nameView="结束条件:流气多长时间" max="1000" min="0" paramter="" tag="" unit="second" visible="true" type="Double" />
|
|
|
- <config default="30" name="MaxDeviation" nameView="结果检查:最大偏差,超过该值报警" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
|
|
|
- <config default="20" name="PressureStableTolerance" nameView="稳定条件:压力1秒内的最大变化范围" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
|
|
|
- <config default="20" name="FlowStableTolerance" nameView="稳定条件:流量设定值和反馈值允许的最大偏差" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
|
|
|
- <config default="5" name="CheckStableTimeout" nameView="稳定条件:在多长时间内处于稳定状态" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
|
|
|
+ <config default="9" name="TargetPressure" nameView="Target pressure" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
|
|
|
+ <config default="180" name="GasFlowTime" nameView="Gas flow time" max="1000" min="0" paramter="" tag="" unit="second" visible="true" type="Double" />
|
|
|
+ <config default="30" name="MaxDeviation" nameView="Max deviation" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
|
|
|
+ <config default="20" name="PressureStableTolerance" nameView="Pressure stable tolerance" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
|
|
|
+ <config default="20" name="FlowStableTolerance" nameView="Flow stable tolerance" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
|
|
|
+ <config default="5" name="CheckStableTimeout" nameView="Check stable timeout" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
|
|
|
</configs>
|
|
|
|
|
|
<configs name="Chiller" nameView="Chiller" >
|
|
|
<config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM22" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
|
|
@@ -581,7 +580,7 @@
|
|
|
<configs name="GridChiller" nameView="Grid Chiller" >
|
|
|
<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
<!--<config default="false" name="ChillerSameWithPMB" nameView="Chiller Same With PMB" description="enable chiller same with PMB or not" max="1" min="0" tag="" unit="" type="Bool" />-->
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM12" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="10" min="-10" paramter="" tag="" unit="degree" type="Double" />
|
|
@@ -592,14 +591,14 @@
|
|
|
</configs>
|
|
|
|
|
|
<configs name="DryPump" nameView="Dry Pump" >
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM23" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
|
|
|
<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
|
|
</configs>
|
|
|
<configs name="Rf" nameView="Source RF" >
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM24" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
@@ -616,18 +615,18 @@
|
|
|
<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
|
|
|
- <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
|
|
|
- <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
- <config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
+ <config default="false" name="EnableCalibration" nameView="Enable calibration" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
|
|
|
+ <config default="100#100;200#200;" name="CalibrationTable" nameView="Calibration table" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
+ <config default="" name="GeneratorSerialNumber" nameView="Generator serial number" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
+ <config default="" name="SensorSerialNumber" nameView="Sensor serial number" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="CCFG600" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" visible="false"/>
|
|
|
<config default="600" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="2200" min="1800" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="600" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
- <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
+ <config default="" name="CalibrationTableDetail" nameView="Calibration table detail" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
</configs>
|
|
|
<configs name="match" nameView="Source Match" >
|
|
|
<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
- <config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet;3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="1" name="MFG" nameView="MFG" description="Manufacturer, 1:AdTec; 2:Comet;3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM25" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
@@ -638,7 +637,7 @@
|
|
|
</configs>
|
|
|
<configs name="BiasRf" nameView="Bias RF" >
|
|
|
<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
- <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="2" name="MFG" nameView="MFG" description="Manufacturer, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
@@ -654,18 +653,18 @@
|
|
|
<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
- <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
|
|
|
- <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
- <config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
- <config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
+ <config default="false" name="EnableCalibration" nameView="Enable calibration" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
|
|
|
+ <config default="100#100;200#200;" name="CalibrationTable" nameView="Calibration table" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
+ <config default="" name="GeneratorSerialNumber" nameView="Generator serial number" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
+ <config default="" name="SensorSerialNumber" nameView="Sensor serial number" max="" min="0" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="CCFG600" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" visible="false"/>
|
|
|
<config default="600" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="660" min="540" paramter="" tag="" unit="" type="Double" />
|
|
|
<config default="600" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
|
|
|
- <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
+ <config default="" name="CalibrationTableDetail" nameView="Calibration table detail" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
|
|
|
</configs>
|
|
|
<configs name="BiasMatch" nameView="Bias Match" >
|
|
|
<config default="false" name="EnableBiasMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
|
|
|
- <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet;3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
+ <config default="2" name="MFG" nameView="MFG" description="Manufacturer, 1:AdTec; 2:Comet;3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
|
<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
|
<config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
|
|
@@ -754,24 +753,24 @@
|
|
|
<config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
<config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
|
|
|
- <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
</configs>
|
|
|
<configs name="WallHeater" nameView="Heater Wall" >
|
|
|
<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
|
|
@@ -782,24 +781,24 @@
|
|
|
<config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
<config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
|
|
|
- <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
</configs>
|
|
|
|
|
|
<configs name="ForelineHeater" nameView="Heater Foreline" >
|
|
@@ -811,24 +810,24 @@
|
|
|
<config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
<config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
|
|
|
- <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
</configs>
|
|
|
|
|
|
<configs name="GridHeater" nameView="Heater Grid" >
|
|
@@ -840,24 +839,24 @@
|
|
|
<config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
<config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
|
|
|
|
|
|
- <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
- <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
- <config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="Temp Offset Point 1" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_1" nameView="Offset Value 1" description="Offset Value 1" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="Temp Offset Point 2" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_2" nameView="Offset Value 2" description="Offset Value 2" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="Temp Offset Point 3" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_3" nameView="Offset Value 3" description="Offset Value 3" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="Temp Offset Point 4" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_4" nameView="Offset Value 4" description="Offset Value 4" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="Temp Offset Point 5" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_5" nameView="Offset Value 5" description="Offset Value 5" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="Temp Offset Point 6" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_6" nameView="Offset Value 6" description="Offset Value 6" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="Temp Offset Point 7" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_7" nameView="Offset Value 7" description="Offset Value 7" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="Temp Offset Point 8" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_8" nameView="Offset Value 8" description="Offset Value 8" unit="degree" type="Double" max="300" min="0" />
|
|
|
+ <config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="Temp Offset Point 9" unit="degree" type="Integer" max="300" min="0" />
|
|
|
+ <config name="OffsetValue_9" nameView="Offset Value 9" description="Offset Value 9" unit="degree" type="Double" max="300" min="0" />
|
|
|
</configs>
|
|
|
|
|
|
|