ReturnAllWafer.cs 11 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. using Aitex.Core.Common;
  7. using Aitex.Core.RT.Event;
  8. using Aitex.Core.RT.Routine;
  9. using Aitex.Sorter.Common;
  10. using MECF.Framework.Common.Equipment;
  11. using MECF.Framework.Common.SubstrateTrackings;
  12. using Aitex.Core.RT.SCCore;
  13. namespace VirgoRT.Modules
  14. {
  15. public class ReturnAllWafer : TransferModule
  16. {
  17. private Queue<IRoutine> _moveTaskQueue = new Queue<IRoutine>();
  18. private IRoutine _activeTask;
  19. private bool _cooling;
  20. private int _coolingTime;
  21. private bool _aligning;
  22. private int _alignAngle;
  23. private int _flipOption = 0;
  24. public Result Start(object[] objs)
  25. {
  26. _moveTaskQueue.Clear();
  27. _activeTask = null;
  28. if (objs.Length >= 4)
  29. {
  30. _aligning = (bool)objs[2];
  31. _alignAngle = (int)objs[3];
  32. }
  33. if (objs.Length >= 2)
  34. {
  35. _cooling = (bool)objs[0];
  36. _coolingTime = (int)objs[1];
  37. }
  38. else
  39. {
  40. _cooling = false;
  41. _aligning = false;
  42. }
  43. _flipOption = SC.GetValue<int>("EFEM.FlipReturnWaferOption");
  44. return Result.RUN;
  45. }
  46. public Result Monitor(object[] objs)
  47. {
  48. if (_activeTask == null )
  49. {
  50. return StartNewReturnTask();
  51. }
  52. Result ret = _activeTask.Monitor();
  53. if (ret == Result.FAIL)
  54. return ret;
  55. if (ret == Result.DONE)
  56. {
  57. if (_moveTaskQueue.Count > 0)
  58. {
  59. _activeTask = _moveTaskQueue.Dequeue();
  60. return _activeTask.Start();
  61. }
  62. else
  63. {
  64. _activeTask = null;
  65. }
  66. }
  67. return Result.RUN;
  68. }
  69. public void Clear()
  70. {
  71. _moveTaskQueue.Clear();
  72. _activeTask = null;
  73. }
  74. private Result StartNewReturnTask()
  75. {
  76. ModuleName[] modules = new[]
  77. {ModuleName.EfemRobot, ModuleName.Aligner1, ModuleName.Aligner2, ModuleName.Cooling1, ModuleName.Cooling2, ModuleName.PMA, ModuleName.PMB, ModuleName.Flipper};
  78. ModuleName source = ModuleName.System;
  79. WaferInfo wafer = null;
  80. Hand hand = SelectFreeArm();
  81. int sourceSlot = 0;
  82. foreach (var moduleName in modules)
  83. {
  84. if (ModuleHelper.IsInstalled(moduleName) && WaferManager.Instance.CheckHasWafer(moduleName, 0))
  85. {
  86. source = moduleName;
  87. wafer = WaferManager.Instance.GetWafer(source, 0);
  88. break;
  89. }
  90. }
  91. if (wafer == null)
  92. {
  93. if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 1))
  94. {
  95. source = ModuleName.EfemRobot;
  96. wafer = WaferManager.Instance.GetWafer(source, 1);
  97. hand = Hand.Blade2;
  98. sourceSlot = 1;
  99. }
  100. }
  101. if (wafer == null && ModuleHelper.IsInstalled(ModuleName.Buffer))
  102. {
  103. for (int i = 0; i < SC.GetValue<int>("EFEM.Buffer.SlotNumber"); i++)
  104. {
  105. if (WaferManager.Instance.CheckHasWafer(ModuleName.Buffer, i))
  106. {
  107. source = ModuleName.Buffer;
  108. wafer = WaferManager.Instance.GetWafer(source, i);
  109. sourceSlot = i;
  110. break;
  111. }
  112. }
  113. }
  114. if (source == ModuleName.System || wafer==null || wafer.IsEmpty)
  115. {
  116. EV.PostInfoLog("Scheduler", "All wafers returned.");
  117. return Result.DONE;
  118. }
  119. ModuleName transferModule = source;
  120. int transferSlot = sourceSlot;
  121. if ((_flipOption == 1 && wafer.IsReversed) ||
  122. (_flipOption == 2 && !wafer.IsReversed) ||
  123. (_flipOption == 3) ||
  124. (source == ModuleName.EfemRobot && _flipOption != 0))
  125. {
  126. string flipOrient = _flipOption == 1 ? "FaceUp" : (_flipOption == 2 ? "FaceDown" : "AlwaysReverse");
  127. if (_aligning && WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0))
  128. {
  129. if (WaferManager.Instance.CheckHasWafer(ModuleName.Flipper, 0))
  130. {
  131. EV.PostWarningLog("System", "Cannot auto Flip and Align wafer while return wafers as both modules have wafer");
  132. return Result.FAIL;
  133. }
  134. hand = SelectFreeArm();
  135. if (hand == Hand.Both)
  136. {
  137. EV.PostWarningLog("System", "No free arm while return wafer");
  138. return Result.FAIL;
  139. }
  140. // handle the aligner wafer first while return wafer need both flip and aligning
  141. wafer = WaferManager.Instance.GetWafer(ModuleName.Aligner1, 0);
  142. _moveTaskQueue.Enqueue(new AlignRoutine(ModuleName.Aligner1.ToString()));
  143. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(ModuleName.Aligner1, 0, ModuleName.Flipper, 0, 0, hand)));
  144. _moveTaskQueue.Enqueue(new FlipRoutine(ModuleName.Flipper.ToString(), flipOrient));
  145. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(ModuleName.Flipper, 0, (ModuleName)wafer.OriginStation, wafer.OriginSlot, 0, hand)));
  146. _activeTask = _moveTaskQueue.Dequeue();
  147. return _activeTask.Start();
  148. }
  149. if (WaferManager.Instance.CheckNoWafer(ModuleName.Flipper, 0))
  150. {
  151. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(source, sourceSlot, ModuleName.Flipper, 0, 0, hand)));
  152. }
  153. else
  154. {
  155. hand = SelectFreeArm();
  156. if (hand == Hand.Both)
  157. {
  158. EV.PostWarningLog("System", "No free arm while return wafer");
  159. return Result.FAIL;
  160. }
  161. wafer = WaferManager.Instance.GetWafer(ModuleName.Flipper, 0);
  162. }
  163. _moveTaskQueue.Enqueue(new FlipRoutine(ModuleName.Flipper.ToString(), flipOrient));
  164. transferModule = ModuleName.Flipper;
  165. transferSlot = 0;
  166. }
  167. else if (ModuleHelper.IsFlipper(source))
  168. {
  169. _moveTaskQueue.Enqueue(new FlipRoutine(source.ToString(), _flipOption == 2 ? "FaceDown" : "FaceUp"));
  170. }
  171. if (_cooling && !ModuleHelper.IsCooling(transferModule) && !ModuleHelper.IsAligner(transferModule))
  172. {
  173. ModuleName cooling = ModuleName.System;
  174. if (ModuleHelper.IsInstalled(ModuleName.Cooling1) && WaferManager.Instance.CheckNoWafer(ModuleName.Cooling1, 0))
  175. cooling = ModuleName.Cooling1;
  176. else if (ModuleHelper.IsInstalled(ModuleName.Cooling2) && WaferManager.Instance.CheckNoWafer(ModuleName.Cooling2, 0))
  177. cooling = ModuleName.Cooling2;
  178. else
  179. {
  180. EV.PostWarningLog("System", "No valid cooling station for auto cooling");
  181. return Result.FAIL;
  182. }
  183. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(transferModule, transferSlot, cooling, 0, _coolingTime, hand)));
  184. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(cooling, 0, (ModuleName)wafer.OriginStation, wafer.OriginSlot, 0, hand)));
  185. }
  186. else if (_aligning)
  187. {
  188. ModuleName aligner = transferModule;
  189. bool needMoveToAligner = true;
  190. if (!ModuleHelper.IsAligner(transferModule))
  191. {
  192. if (ModuleHelper.IsInstalled(ModuleName.Aligner1) && WaferManager.Instance.CheckNoWafer(ModuleName.Aligner1, 0))
  193. aligner = ModuleName.Aligner1;
  194. else if (ModuleHelper.IsInstalled(ModuleName.Aligner2) && WaferManager.Instance.CheckNoWafer(ModuleName.Aligner2, 0))
  195. aligner = ModuleName.Aligner2;
  196. else if (transferModule == ModuleName.EfemRobot && WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1 - transferSlot))
  197. {
  198. if (ModuleHelper.IsInstalled(ModuleName.Aligner1) && WaferManager.Instance.CheckHasWafer(ModuleName.Aligner1, 0))
  199. aligner = ModuleName.Aligner1;
  200. else if (ModuleHelper.IsInstalled(ModuleName.Aligner2) && WaferManager.Instance.CheckHasWafer(ModuleName.Aligner2, 0))
  201. aligner = ModuleName.Aligner2;
  202. else
  203. {
  204. EV.PostWarningLog("System", "No aligner station installed");
  205. return Result.FAIL;
  206. }
  207. // return aligner wafer first
  208. hand = (Hand)(1 - transferSlot);
  209. needMoveToAligner = false;
  210. wafer = WaferManager.Instance.GetWafer(aligner, 0);
  211. }
  212. else
  213. {
  214. EV.PostWarningLog("System", "No valid aligner station for auto aligning");
  215. return Result.FAIL;
  216. }
  217. if(needMoveToAligner)
  218. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(transferModule, transferSlot, aligner, 0, _coolingTime, hand)));
  219. }
  220. _moveTaskQueue.Enqueue(new AlignRoutine(aligner.ToString()));
  221. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(aligner, 0, (ModuleName)wafer.OriginStation, wafer.OriginSlot, 0, hand)));
  222. }
  223. else
  224. {
  225. _moveTaskQueue.Enqueue(new EfemRobotMover(new MoveItemEx(transferModule, transferSlot, (ModuleName)wafer.OriginStation, wafer.OriginSlot, 0, hand)));
  226. }
  227. _activeTask = _moveTaskQueue.Dequeue();
  228. return _activeTask.Start() ;
  229. }
  230. private Hand SelectFreeArm()
  231. {
  232. if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0) && SC.GetValue<bool>("EFEM.EfemRobot.LowerBladeEnable"))
  233. return Hand.Blade1;
  234. else if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1) && SC.GetValue<bool>("EFEM.EfemRobot.UpperBladeEnable"))
  235. return Hand.Blade2;
  236. else
  237. return Hand.Both;
  238. }
  239. }
  240. }