 chenzk
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f6a9ac36e5
1 revise srd switch off
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1 month ago |
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chenzk
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0d3e5c67b6
add reservoir&platingcell 1/2/3/4
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1 month ago |
|
chenzk
|
0e26d8e4cc
add dm reservoir releated monitor
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1 month ago |
|
chenzk
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263b4c3df5
add dm reservoir ca direplenin releated
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1 month ago |
|
chenzk
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5602545842
add dm reservoir initialized routine
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1 month ago |
|
chenzk
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7244d4257d
add reservoir initialize routine releated
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1 month ago |
|
chenzk
|
0d4a115d4f
1 add reservoir tc releated
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1 month ago |
|
chenzk
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6f0b9879cc
add reservoir1 io and twincat releated
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1 month ago |
 chenkui
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ac4ae70a0d
update Reservoir
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2 months ago |
|
chenzk
|
d821fc973a
add robot pick/place cartoon
|
2 months ago |
|
chenzk
|
8c6fa5e5e3
1.Add new module station number
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2 months ago |
|
chenzk
|
dcd0d75f4c
1 add robotcycle plating cell Module
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2 months ago |
|
chenzk
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9ee6d50c0f
1revise robot cycle
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2 months ago |
|
chenzk
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28abb1ea49
add res/dep recipe
|
2 months ago |
|
chenzk
|
0ae3f020eb
add facility all
|
2 months ago |
|
chenzk
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d2a498218c
1revise facility device
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2 months ago |
|
chenzk
|
579a398b22
1 revise vpw vacuum prewet routine retry bug
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2 months ago |
|
chenzk
|
9139d8f851
1. revise vpw total flow Monitor
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3 months ago |
|
chenzk
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0ed2fa049e
1 add vpw auto drip valve on
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3 months ago |
|
chenzk
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30b86c960b
add vpw rotation interlock
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3 months ago |
|
chenzk
|
34be630592
add chamber up/down check config
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3 months ago |
|
chenkui
|
f918b35c00
complete vpw recipe
|
3 months ago |
|
chenkui
|
9ed5517270
update vpw recipe
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3 months ago |
 guojun
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b193d3a023
修改CellFlowStartLowLimit上限
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3 months ago |
|
chenkui
|
28e1e8e4ab
add VPW Prepare routine
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3 months ago |
|
chenkui
|
bfd0b53b4a
update VPW Initialize
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3 months ago |
|
chenkui
|
8405df311e
add Booster Pump speed adjust;
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3 months ago |
|
chenkui
|
a627dc6488
Update VPWMainCommonData
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3 months ago |
|
chenkui
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802ecf62cb
add VPWMain Persistent value speed variable;
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3 months ago |
|
chenkui
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c2d9da3983
Initialize
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3 months ago |
