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+using Aitex.Core.RT.Device;
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+using Aitex.Core.RT.Log;
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+using Aitex.Core.RT.Routine;
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+using Aitex.Core.RT.SCCore;
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+using Aitex.Core.Util;
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+using MECF.Framework.Common.Alarm;
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+using MECF.Framework.Common.Equipment;
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+using MECF.Framework.Common.RecipeCenter;
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+using MECF.Framework.Common.Routine;
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+using MECF.Framework.Common.SubstrateTrackings;
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+using PunkHPX8_Core;
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+using PunkHPX8_RT.Devices.AXIS;
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+using PunkHPX8_RT.Devices.VpwCell;
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+using PunkHPX8_RT.Devices.VpwMain;
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+using PunkHPX8_RT.Modules.VpwMain;
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+using System;
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+using System.Collections.Generic;
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+using System.Linq;
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+using System.Text;
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+using System.Threading.Tasks;
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+
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+namespace PunkHPX8_RT.Modules.VpwCell
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+{
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+ public class VpwVacuumPrewetRoutine : RoutineBase, IRoutine
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+ {
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+ private enum PrepareStep
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+ {
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+ OpenVacuumValve,
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+ EnableVacuumPump,
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+ CheckVacuum,
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+ CloseVacuumValve,
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+ OpenVentValve,
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+ CheckLidReleaseVacuum,
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+ ChamberDown,
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+ CloseVentValve,
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+ ChamberUp,
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+ LastOpenVacuumValve,
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+ LastCheckVacuum,
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+ DryerHoldTime,
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+ OpenCellValve,
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+ End
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+ }
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+ #region 内部变量
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+ /// <summary>
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+ /// recipe
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+ /// </summary>
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+ private VpwRecipe _recipe;
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+ /// <summary>
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+ /// 设备
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+ /// </summary>
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+ private VpwCellDevice _vpwCellDevice;
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+ /// <summary>
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+ /// Main设备
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+ /// </summary>
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+ private VpwMainDevice _mainDevice;
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+ /// <summary>
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+ /// Pump DownWarn时间
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+ /// </summary>
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+ private int _pumpDownWarningTime = 60000;
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+ /// <summary>
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+ /// Pump Down超时
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+ /// </summary>
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+ private int _pumpDownTimeOut = 80000;
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+ /// <summary>
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+ /// 开始Pump Down时间
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+ /// </summary>
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+ private DateTime _pumpDownTime=DateTime.MinValue;
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+ /// <summary>
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+ /// 是否需要重试
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+ /// </summary>
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+ private bool _isNeedRetry = false;
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+ /// <summary>
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+ /// Lid Release Pressure
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+ /// </summary>
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+ private int _lidReleasePressure = 730;
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+ /// <summary>
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+ /// Lid Release Pressure
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+ /// </summary>
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+ private int _lidReleasePressureTimeout = 10000;
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+ #endregion
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+ /// <summary>
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+ /// 构造函数
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+ /// </summary>
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+ /// <param name="module"></param>
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+ public VpwVacuumPrewetRoutine(string module) : base(module)
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+ {
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+ }
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+ /// <summary>
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+ /// 中止
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+ /// </summary>
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+ public void Abort()
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+ {
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+ Runner.Stop("Manual abort");
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+ }
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+ /// <summary>
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+ /// 监控
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+ /// </summary>
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+ /// <returns></returns>
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+ public RState Monitor()
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+ {
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+ Runner.Run(PrepareStep.OpenVacuumValve, PumpValveOn, _delay_1ms)
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+ .Run(PrepareStep.EnableVacuumPump, PumpEnable, _delay_1ms)
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+ .Wait(PrepareStep.CheckVacuum, CheckVacuumValue, _pumpDownTimeOut + 1000)
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+ .RunIf(PrepareStep.CloseVacuumValve, _isNeedRetry, PumpValveOff, _delay_1ms)
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+ .RunIf(PrepareStep.OpenVentValve, _isNeedRetry, OpenVentValve, _delay_1ms)
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+ .WaitIf(PrepareStep.CheckLidReleaseVacuum, _isNeedRetry, CheckLidReleaseVacuum, _lidReleasePressureTimeout)
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+ .RunIf(PrepareStep.ChamberDown, _isNeedRetry, ChamberDown, CheckChamberOpened, _delay_10s)
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+ .RunIf(PrepareStep.CloseVentValve, _isNeedRetry, CloseVentValve, _delay_1ms)
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+ .RunIf(PrepareStep.ChamberUp, _isNeedRetry, ChamberUp, CheckChamberClosed, _delay_10s)
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+ .RunIf(PrepareStep.LastOpenVacuumValve, _isNeedRetry, PumpValveOn, _delay_1ms)
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+ .WaitIf(PrepareStep.LastCheckVacuum, _isNeedRetry,LastCheckVacuumValue, _pumpDownTimeOut)
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+ .Delay(PrepareStep.DryerHoldTime,_recipe.DryHoldTime*1000)
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+ .Run(PrepareStep.OpenCellValve,OpenCellValve,_delay_1ms)
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+ .End(PrepareStep.End,NullFun,_delay_1ms);
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+ return Runner.Status;
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+ }
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+ /// <summary>
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+ /// pump valve on
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+ /// </summary>
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+ /// <returns></returns>
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+ private bool PumpValveOn()
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+ {
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+ bool result = _vpwCellDevice.VacuumValveOn();
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+ if (!result)
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+ {
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+ NotifyError(eEvent.ERR_VPW, "pump valve on failed", 0);
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+ }
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+ return result;
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+ }
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+ /// <summary>
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+ /// Pump valve off
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+ /// </summary>
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+ /// <returns></returns>
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+ private bool PumpValveOff()
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+ {
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+ bool result = _vpwCellDevice.VacuumValveOff();
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+ if (!result)
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+ {
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+ NotifyError(eEvent.ERR_VPW, "pump valve off failed", 0);
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+ }
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+ return result;
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+ }
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+ /// <summary>
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+ /// Pump Enable
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+ /// </summary>
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+ /// <returns></returns>
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+ private bool PumpEnable()
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+ {
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+ bool result =_mainDevice.VacuumPumpEnable();
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+ if (!result)
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+ {
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+ NotifyError(eEvent.ERR_VPW, "pump enable failed", 0);
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+ }
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+ else
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+ {
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+ _pumpDownTime = DateTime.Now;
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+ }
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+ return result;
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+ }
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+ /// <summary>
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+ /// 检验真空
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+ /// </summary>
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+ /// <returns></returns>
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+ private bool CheckVacuumValue()
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+ {
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+ double vacuumValue = _vpwCellDevice.CommonData.VacuumPressure;
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+ if (vacuumValue >= _recipe.VacuumTarget)
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+ {
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+ return true;
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+ }
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+ if (DateTime.Now.Subtract(_pumpDownTime).TotalMilliseconds >= _pumpDownWarningTime)
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+ {
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+ AlarmListManager.Instance.AddWarn(Module, "vacuum value", $"vacuum value {vacuumValue} is less than {_recipe.VacuumTarget}");
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+ }
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+ if (DateTime.Now.Subtract(_pumpDownTime).TotalMilliseconds >= _pumpDownTimeOut)
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+ {
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+ _isNeedRetry = true;
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+ }
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+ return false;
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+ }
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+ /// <summary>
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+ /// 检验Lid Release真空数值
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+ /// </summary>
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+ /// <returns></returns>
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+ private bool CheckLidReleaseVacuum()
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+ {
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+ double vacuumValue = _vpwCellDevice.CommonData.VacuumPressure;
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+ return vacuumValue >= _lidReleasePressure;
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+ }
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+ /// <summary>
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+ /// open vent valve
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+ /// </summary>
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+ /// <returns></returns>
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+ private bool OpenVentValve()
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+ {
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+ bool result = _vpwCellDevice.VentValveOn();
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+ if (!result)
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+ {
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+ NotifyError(eEvent.ERR_VPW, "open vent valve failed", 0);
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+ }
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+ return result;
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+ }
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+ /// <summary>
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+ /// close vent valve
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+ /// </summary>
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+ /// <returns></returns>
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+ private bool CloseVentValve()
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+ {
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+ bool result = _vpwCellDevice.VentValveOff();
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+ if (!result)
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+ {
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+ NotifyError(eEvent.ERR_VPW, "close vent valve failed", 0);
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+ }
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+ return result;
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+ }
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+ /// <summary>
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+ /// Chamber down
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+ /// </summary>
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+ /// <returns></returns>
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+ private bool ChamberDown()
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+ {
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+ bool result= _mainDevice.ChamberDown();
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+ if (!result)
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+ {
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+ NotifyError(eEvent.ERR_VPW, "chamber down failed",0);
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+ }
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+ return result;
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+ }
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+ /// <summary>
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+ /// 检验Chamber是否打开
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+ /// </summary>
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+ /// <returns></returns>
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+ private bool CheckChamberOpened()
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+ {
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+ return _mainDevice.CommonData.ChamberOpened && !_mainDevice.CommonData.ChamberClosed;
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+ }
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+ /// <summary>
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+ /// Chamber up
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+ /// </summary>
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+ /// <returns></returns>
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+ private bool ChamberUp()
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+ {
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+ bool result = _mainDevice.ChamberUp();
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+ if (!result)
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+ {
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+ NotifyError(eEvent.ERR_VPW, "chamber up failed", 0);
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+ }
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+ return result;
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+ }
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+ /// <summary>
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+ /// 检验Chamber是否关闭
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+ /// </summary>
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+ /// <returns></returns>
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+ private bool CheckChamberClosed()
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+ {
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+ return !_mainDevice.CommonData.ChamberOpened && _mainDevice.CommonData.ChamberClosed;
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+ }
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+ /// <summary>
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+ /// 检验真空
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+ /// </summary>
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+ /// <returns></returns>
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+ private bool LastCheckVacuumValue()
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+ {
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+ double vacuumValue = _vpwCellDevice.CommonData.VacuumPressure;
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+ if (vacuumValue >= _recipe.VacuumTarget)
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+ {
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+ return true;
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+ }
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+ if (DateTime.Now.Subtract(_pumpDownTime).TotalMilliseconds >= _pumpDownWarningTime)
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+ {
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+ AlarmListManager.Instance.AddWarn(Module, "vacuum value", $"vacuum value {vacuumValue} is less than {_recipe.VacuumTarget}");
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+ }
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+ return false;
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+ }
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+ /// <summary>
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+ /// 打开相应的cell valve
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+ /// </summary>
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+ /// <returns></returns>
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+ private bool OpenCellValve()
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+ {
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+ int count = 0;
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+ int enableCount = 0;
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+ if (_recipe.VacuumPrewetDripEnable)
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+ {
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+ count += _vpwCellDevice.FlowDripOn()?1:0;
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+ enableCount++;
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+ }
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+ if (_recipe.VacuumPrewetLargeEnable)
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+ {
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+ count += _vpwCellDevice.FlowLargeOn() ? 1 : 0;
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+ enableCount++;
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+ }
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+ if (_recipe.VacuumPrewetSmallEnable)
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+ {
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+ count += _vpwCellDevice.FlowSmallOn() ? 1 : 0;
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+ enableCount++;
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+ }
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+ bool result = StartRotation();
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+ if (!result)
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+ {
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+ NotifyError(eEvent.ERR_VPW, "start rotation failed", 0);
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+ return false;
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+ }
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+
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+ result= count == enableCount;
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+ if (!result)
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+ {
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+ NotifyError(eEvent.ERR_VPW, "open cell valve failed", 0);
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+ }
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+ return result;
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+ }
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+ /// <summary>
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+ /// 同时旋转
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+ /// </summary>
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+ /// <returns></returns>
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+ private bool StartRotation()
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+ {
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+ int targetPosition = 0;
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+ int maxSpeed = 0;
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+ int second = 0;
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+ foreach(var item in _recipe.VacuumRinseStep)
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+ {
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+ second += item.DurationSeconds;
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+ int speed = item.RotationSpeed;
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+ if (maxSpeed < speed)
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+ {
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+ maxSpeed = speed;
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+ }
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+ }
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+
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+ foreach(var item in _recipe.VentRinseStep)
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+ {
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+ second += item.DurationSeconds;
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+ int speed = item.RotationSpeed;
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+ if (maxSpeed < speed)
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+ {
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+ maxSpeed = speed;
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+ }
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+ }
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+
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+ foreach(var item in _recipe.ExtendCleanRinseStep)
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+ {
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+ second += item.DurationSeconds;
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+ int speed = item.RotationSpeed;
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+ if (maxSpeed < speed)
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+ {
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+ maxSpeed = speed;
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+ }
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+ }
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+ targetPosition = maxSpeed * (second + 60 * 1000);//按最大速度*（时间+多出一分钟）
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+ _vpwCellDevice.SetRotationSpeed(_recipe.VacuumRinseStep[0].RotationSpeed / 6);
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+ return _vpwCellDevice.RotationProfilePosition(targetPosition);
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+ }
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+ /// <summary>
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+ /// 启动
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+ /// </summary>
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+ /// <param name="objs"></param>
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+ /// <returns></returns>
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+ public RState Start(params object[] objs)
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+ {
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+ _recipe=(VpwRecipe)objs[0];
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+ _vpwCellDevice = DEVICE.GetDevice<VpwCellDevice>(Module);
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+ _mainDevice = DEVICE.GetDevice<VpwMainDevice>(ModuleName.VPWMain1.ToString());
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+ _pumpDownWarningTime = SC.GetValue<int>($"{Module}.PumpDownWarningTime")*1000;
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+ _pumpDownTimeOut = SC.GetValue<int>($"{Module}.PumpDownTimeout")*1000;
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+ _lidReleasePressure = SC.GetValue<int>($"{Module}.LidReleasePressure");
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+ _lidReleasePressureTimeout = SC.GetValue<int>($"{Module}.LidReleasePressureTimeout");
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+ _isNeedRetry = false;
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+ return Runner.Start(Module, $"{Module} prepare");
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+ }
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+ /// <summary>
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+ /// 重试
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+ /// </summary>
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+ /// <param name="step"></param>
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+ public RState Retry(int step)
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+ {
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+ if (_recipe == null)
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+ {
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+ NotifyError(eEvent.ERR_RINSE, "recipe is null", -1);
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+ return RState.Failed;
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+ }
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+ List<Enum> preStepIds = new List<Enum>();
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+ return Runner.Retry(PrepareStep.OpenVacuumValve, preStepIds, Module, "Vacuum Prewet Retry");
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+ }
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+ }
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+}
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