 chenzk
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f6a9ac36e5
1 revise srd switch off
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hai 1 mes |
|
chenzk
|
0d3e5c67b6
add reservoir&platingcell 1/2/3/4
|
hai 1 mes |
|
chenzk
|
0e26d8e4cc
add dm reservoir releated monitor
|
hai 1 mes |
|
chenzk
|
263b4c3df5
add dm reservoir ca direplenin releated
|
hai 1 mes |
|
chenzk
|
5602545842
add dm reservoir initialized routine
|
hai 1 mes |
|
chenzk
|
7244d4257d
add reservoir initialize routine releated
|
hai 1 mes |
|
chenzk
|
0d4a115d4f
1 add reservoir tc releated
|
hai 1 mes |
|
chenzk
|
6f0b9879cc
add reservoir1 io and twincat releated
|
hai 1 mes |
 chenkui
|
ac4ae70a0d
update Reservoir
|
hai 2 meses |
|
chenzk
|
d821fc973a
add robot pick/place cartoon
|
hai 2 meses |
|
chenzk
|
8c6fa5e5e3
1.Add new module station number
|
hai 2 meses |
|
chenzk
|
dcd0d75f4c
1 add robotcycle plating cell Module
|
hai 2 meses |
|
chenzk
|
9ee6d50c0f
1revise robot cycle
|
hai 2 meses |
|
chenzk
|
28abb1ea49
add res/dep recipe
|
hai 2 meses |
|
chenzk
|
0ae3f020eb
add facility all
|
hai 2 meses |
|
chenzk
|
d2a498218c
1revise facility device
|
hai 2 meses |
|
chenzk
|
579a398b22
1 revise vpw vacuum prewet routine retry bug
|
hai 2 meses |
|
chenzk
|
9139d8f851
1. revise vpw total flow Monitor
|
hai 3 meses |
|
chenzk
|
0ed2fa049e
1 add vpw auto drip valve on
|
hai 3 meses |
|
chenzk
|
30b86c960b
add vpw rotation interlock
|
hai 3 meses |
|
chenzk
|
34be630592
add chamber up/down check config
|
hai 3 meses |
|
chenkui
|
f918b35c00
complete vpw recipe
|
hai 3 meses |
|
chenkui
|
9ed5517270
update vpw recipe
|
hai 3 meses |
 guojun
|
b193d3a023
修改CellFlowStartLowLimit上限
|
hai 3 meses |
|
chenkui
|
28e1e8e4ab
add VPW Prepare routine
|
hai 3 meses |
|
chenkui
|
bfd0b53b4a
update VPW Initialize
|
hai 3 meses |
|
chenkui
|
8405df311e
add Booster Pump speed adjust;
|
hai 3 meses |
|
chenkui
|
a627dc6488
Update VPWMainCommonData
|
hai 3 meses |
|
chenkui
|
802ecf62cb
add VPWMain Persistent value speed variable;
|
hai 3 meses |
|
chenkui
|
c2d9da3983
Initialize
|
hai 3 meses |
