PunkHPX8/PunkHPX8_RT/Modules/VpwCell/VpwVacuumPrewetRoutine.cs

using Aitex.Core.RT.Device;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using MECF.Framework.Common.Alarm;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.RecipeCenter;
using MECF.Framework.Common.Routine;
using MECF.Framework.Common.SubstrateTrackings;
using PunkHPX8_Core;
using PunkHPX8_RT.Devices.AXIS;
using PunkHPX8_RT.Devices.VpwCell;
using PunkHPX8_RT.Devices.VpwMain;
using PunkHPX8_RT.Modules.VpwMain;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;

namespace PunkHPX8_RT.Modules.VpwCell
{
    public class VpwVacuumPrewetRoutine : RoutineBase, IRoutine
    {
        private enum PrepareStep
        {
            OpenVacuumValve,
            EnableVacuumPump,
            CheckVacuum,
            CloseVacuumValve,
            OpenVentValve,
            CheckLidReleaseVacuum,
            ChamberDown,
            CloseVentValve,
            ChamberUp,
            LastOpenVacuumValve,
            LastCheckVacuum,
            DryerHoldTime,
            OpenCellValve,
            End
        }
        #region 内部变量
        /// <summary>
        /// recipe
        /// </summary>
        private VpwRecipe _recipe;
        /// <summary>
        /// 设备
        /// </summary>
        private VpwCellDevice _vpwCellDevice;
        /// <summary>
        /// Main设备
        /// </summary>
        private VpwMainDevice _mainDevice;
        /// <summary>
        /// Pump DownWarn时间
        /// </summary>
        private int _pumpDownWarningTime = 60000;
        /// <summary>
        /// Pump Down超时
        /// </summary>
        private int _pumpDownTimeOut = 80000;
        /// <summary>
        /// 开始Pump Down时间
        /// </summary>
        private DateTime _pumpDownTime=DateTime.MinValue;
        /// <summary>
        /// 是否需要重试
        /// </summary>
        private bool _isNeedRetry = false;
        /// <summary>
        /// Lid Release Pressure
        /// </summary>
        private int _lidReleasePressure = 730;
        /// <summary>
        /// Lid Release Pressure 
        /// </summary>
        private int _lidReleasePressureTimeout = 10000;
        #endregion
        /// <summary>
        /// 构造函数
        /// </summary>
        /// <param name="module"></param>
        public VpwVacuumPrewetRoutine(string module) : base(module)
        {
        }
        /// <summary>
        /// 中止
        /// </summary>
        public void Abort()
        {
            Runner.Stop("Manual abort");
        }
        /// <summary>
        /// 监控
        /// </summary>
        /// <returns></returns>
        public RState Monitor()
        {
            Runner.Run(PrepareStep.OpenVacuumValve, PumpValveOn, _delay_1ms)
                .Run(PrepareStep.EnableVacuumPump, PumpEnable, _delay_1ms)
                .Wait(PrepareStep.CheckVacuum, CheckVacuumValue, _pumpDownTimeOut + 1000)
                .RunIf(PrepareStep.CloseVacuumValve, _isNeedRetry, PumpValveOff, _delay_1ms)
                .RunIf(PrepareStep.OpenVentValve, _isNeedRetry, OpenVentValve, _delay_1ms)
                .WaitIf(PrepareStep.CheckLidReleaseVacuum, _isNeedRetry, CheckLidReleaseVacuum, _lidReleasePressureTimeout)
                .RunIf(PrepareStep.ChamberDown, _isNeedRetry, ChamberDown, CheckChamberOpened, _delay_10s)
                .RunIf(PrepareStep.CloseVentValve, _isNeedRetry, CloseVentValve, _delay_1ms)
                .RunIf(PrepareStep.ChamberUp, _isNeedRetry, ChamberUp, CheckChamberClosed, _delay_10s)
                .RunIf(PrepareStep.LastOpenVacuumValve, _isNeedRetry, PumpValveOn, _delay_1ms)
                .WaitIf(PrepareStep.LastCheckVacuum, _isNeedRetry,LastCheckVacuumValue, _pumpDownTimeOut)
                .Delay(PrepareStep.DryerHoldTime,_recipe.DryHoldTime*1000)
                .Run(PrepareStep.OpenCellValve,OpenCellValve,_delay_1ms)
                .End(PrepareStep.End,NullFun,_delay_1ms);
            return Runner.Status;
        }
        /// <summary>
        /// pump valve on
        /// </summary>
        /// <returns></returns>
        private bool PumpValveOn()
        {
            bool result = _vpwCellDevice.VacuumValveOn();
            if (!result)
            {
                NotifyError(eEvent.ERR_VPW, "pump valve on failed", 0);
            }
            return result;
        }
        /// <summary>
        /// Pump valve off
        /// </summary>
        /// <returns></returns>
        private bool PumpValveOff()
        {
            bool result = _vpwCellDevice.VacuumValveOff();
            if (!result)
            {
                NotifyError(eEvent.ERR_VPW, "pump valve off failed", 0);
            }
            return result;
        }
        /// <summary>
        /// Pump Enable
        /// </summary>
        /// <returns></returns>
        private bool PumpEnable()
        {
            bool result =_mainDevice.VacuumPumpEnable();
            if (!result)
            {
                NotifyError(eEvent.ERR_VPW, "pump enable failed", 0);
            }
            else
            {
                _pumpDownTime = DateTime.Now;
            }
            return result;
        }
        /// <summary>
        /// 检验真空
        /// </summary>
        /// <returns></returns>
        private bool CheckVacuumValue()
        {
            double vacuumValue = _vpwCellDevice.CommonData.VacuumPressure;
            if (vacuumValue >= _recipe.VacuumTarget)
            {
                return true;
            }
            if (DateTime.Now.Subtract(_pumpDownTime).TotalMilliseconds >= _pumpDownWarningTime)
            {
                AlarmListManager.Instance.AddWarn(Module, "vacuum value", $"vacuum value {vacuumValue} is less than {_recipe.VacuumTarget}");
            }
            if (DateTime.Now.Subtract(_pumpDownTime).TotalMilliseconds >= _pumpDownTimeOut)
            {
                _isNeedRetry = true;
            }
            return false;
        }
        /// <summary>
        /// 检验Lid Release真空数值
        /// </summary>
        /// <returns></returns>
        private bool CheckLidReleaseVacuum()
        {
            double vacuumValue = _vpwCellDevice.CommonData.VacuumPressure;
            return vacuumValue >= _lidReleasePressure;
        }
        /// <summary>
        /// open vent valve
        /// </summary>
        /// <returns></returns>
        private bool OpenVentValve()
        {
            bool result = _vpwCellDevice.VentValveOn();
            if (!result)
            {
                NotifyError(eEvent.ERR_VPW, "open vent valve failed", 0);
            }
            return result;
        }
        /// <summary>
        /// close vent valve
        /// </summary>
        /// <returns></returns>
        private bool CloseVentValve()
        {
            bool result = _vpwCellDevice.VentValveOff();
            if (!result)
            {
                NotifyError(eEvent.ERR_VPW, "close vent valve failed", 0);
            }
            return result;
        }
        /// <summary>
        /// Chamber down
        /// </summary>
        /// <returns></returns>
        private bool ChamberDown()
        {
            bool result= _mainDevice.ChamberDown();
            if (!result)
            {
                NotifyError(eEvent.ERR_VPW, "chamber down failed",0);
            }
            return result;
        }
        /// <summary>
        /// 检验Chamber是否打开 
        /// </summary>
        /// <returns></returns>
        private bool CheckChamberOpened()
        {
            return _mainDevice.CommonData.ChamberOpened && !_mainDevice.CommonData.ChamberClosed;
        }
        /// <summary>
        /// Chamber up
        /// </summary>
        /// <returns></returns>
        private bool ChamberUp()
        {
            bool result = _mainDevice.ChamberUp();
            if (!result)
            {
                NotifyError(eEvent.ERR_VPW, "chamber up failed", 0);
            }
            return result;
        }
        /// <summary>
        /// 检验Chamber是否关闭
        /// </summary>
        /// <returns></returns>
        private bool CheckChamberClosed()
        {
            return !_mainDevice.CommonData.ChamberOpened && _mainDevice.CommonData.ChamberClosed;
        }
        /// <summary>
        /// 检验真空
        /// </summary>
        /// <returns></returns>
        private bool LastCheckVacuumValue()
        {
            double vacuumValue = _vpwCellDevice.CommonData.VacuumPressure;
            if (vacuumValue >= _recipe.VacuumTarget)
            {
                return true;
            }
            if (DateTime.Now.Subtract(_pumpDownTime).TotalMilliseconds >= _pumpDownWarningTime)
            {
                AlarmListManager.Instance.AddWarn(Module, "vacuum value", $"vacuum value {vacuumValue} is less than {_recipe.VacuumTarget}");
            }
            return false;
        }
        /// <summary>
        /// 打开相应的cell valve
        /// </summary>
        /// <returns></returns>
        private bool OpenCellValve()
        {
            int count = 0;
            int enableCount = 0;
            if (_recipe.VacuumPrewetDripEnable)
            {
                count += _vpwCellDevice.FlowDripOn()?1:0;
                enableCount++;
            }
            if (_recipe.VacuumPrewetLargeEnable)
            {
                count += _vpwCellDevice.FlowLargeOn() ? 1 : 0;
                enableCount++;
            }
            if (_recipe.VacuumPrewetSmallEnable)
            {
                count += _vpwCellDevice.FlowSmallOn() ? 1 : 0;
                enableCount++;
            }
            bool result = StartRotation();
            if (!result)
            {
                NotifyError(eEvent.ERR_VPW, "start rotation failed", 0);
                return false;
            }

            result= count == enableCount;
            if (!result)
            {
                NotifyError(eEvent.ERR_VPW, "open cell valve failed", 0);
            }
            return result;
        }
        /// <summary>
        /// 同时旋转
        /// </summary>
        /// <returns></returns>
        private bool StartRotation()
        {
            int targetPosition = 0;
            int maxSpeed = 0;
            int second = 0;
            foreach(var item in _recipe.VacuumRinseStep)
            {
                second += item.DurationSeconds;
                int speed = item.RotationSpeed;
                if (maxSpeed < speed)
                {
                    maxSpeed = speed;
                }
            }

            foreach(var item in _recipe.VentRinseStep)
            {
                second += item.DurationSeconds;
                int speed = item.RotationSpeed;
                if (maxSpeed < speed)
                {
                    maxSpeed = speed;
                }
            }

            foreach(var item in _recipe.ExtendCleanRinseStep)
            {
                second += item.DurationSeconds;
                int speed = item.RotationSpeed;
                if (maxSpeed < speed)
                {
                    maxSpeed = speed;
                }
            }
            targetPosition = maxSpeed * (second + 60 * 1000);//按最大速度*（时间+多出一分钟）
            _vpwCellDevice.SetRotationSpeed(_recipe.VacuumRinseStep[0].RotationSpeed / 6);
            return _vpwCellDevice.RotationProfilePosition(targetPosition);
        }
        /// <summary>
        /// 启动
        /// </summary>
        /// <param name="objs"></param>
        /// <returns></returns>
        public RState Start(params object[] objs)
        {
            _recipe=(VpwRecipe)objs[0];
            _vpwCellDevice = DEVICE.GetDevice<VpwCellDevice>(Module);
            _mainDevice = DEVICE.GetDevice<VpwMainDevice>(ModuleName.VPWMain1.ToString());
            _pumpDownWarningTime = SC.GetValue<int>($"{Module}.PumpDownWarningTime")*1000;
            _pumpDownTimeOut = SC.GetValue<int>($"{Module}.PumpDownTimeout")*1000;
            _lidReleasePressure = SC.GetValue<int>($"{Module}.LidReleasePressure");
            _lidReleasePressureTimeout = SC.GetValue<int>($"{Module}.LidReleasePressureTimeout");
            _isNeedRetry = false;
            return Runner.Start(Module, $"{Module} prepare");
        }
        /// <summary>
        /// 重试
        /// </summary>
        /// <param name="step"></param>
        public RState Retry(int step)
        {
            if (_recipe == null)
            {
                NotifyError(eEvent.ERR_RINSE, "recipe is null", -1);
                return RState.Failed;
            }
            List<Enum> preStepIds = new List<Enum>();
            return Runner.Retry(PrepareStep.OpenVacuumValve, preStepIds, Module, "Vacuum Prewet Retry");
        }
    }
}