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Clean.cs
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5924c8ee8e
mars200
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1 anno fa |
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CyclePurgeRoutine.cs
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248c92125c
1.当Efem robot 处于picking、placing状态时出错，调用系统Abort,整个调度停止
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10 mesi fa |
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Fdc.cs
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5924c8ee8e
mars200
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1 anno fa |
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GasFlowRoutine.cs
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c16628dbc4
1.增加交换
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1 anno fa |
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PMATMProcessRoutine.cs
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c16628dbc4
1.增加交换
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1 anno fa |
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PMHomeRoutine.cs
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5924c8ee8e
mars200
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1 anno fa |
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PMLeakCheckRoutine.cs
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c16628dbc4
1.增加交换
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1 anno fa |
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PMMfcVerificationRoutine.cs
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ea766340ce
1.增加素珀手臂配置以及增加了吸附和释放
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10 mesi fa |
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PMPostTransferRoutine.cs
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c16628dbc4
1.增加交换
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1 anno fa |
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PMPrepareTransferRoutine.cs
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fa35e26745
1.recipe报错后，工艺步数会停留在报错的步数
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1 mese fa |
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PMRoutineBase.cs
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248c92125c
1.当Efem robot 处于picking、placing状态时出错，调用系统Abort,整个调度停止
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10 mesi fa |
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PMTransferHandoffRoutine.cs
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c16628dbc4
1.增加交换
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1 anno fa |
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Process_FA.cs
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5924c8ee8e
mars200
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1 anno fa |
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PumpDownRoutine.cs
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c16628dbc4
1.增加交换
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1 anno fa |
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RfPowerRoutine.cs
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8390219dbc
老的mars版本RfPowerRoutine，CheckRFPowerOff() 直接返回true
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5 mesi fa |
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StartPumpRoutine.cs
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c16628dbc4
1.增加交换
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1 anno fa |
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TemperatureControlRoutine.cs
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c16628dbc4
1.增加交换
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1 anno fa |
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VentRountine.cs
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c16628dbc4
1.增加交换
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1 anno fa |
JET-YDB\JET-YANGDB
fa35e26745
1.recipe报错后，工艺步数会停留在报错的步数