Mars200/JetVirgoPM/PMs/Routines/PumpDownRoutine.cs

using System;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using JetVirgoPM.Devices;
using MECF.Framework.Common.Routine;

namespace JetVirgoPM.PMs.Routines
{
    class PumpDownRoutine : PMRoutineBase, IStepRoutine
    {
        private enum PumpSequence
        {
            kCheckLidSignal,
            kCheckSlitDoor,
            kCheckDryPumpStatus,
            kCloseValves,
            kOpenPumpingValve,
            kDelay,
            kCheckVAC,
            kCheckForelinePressure,
            kCheckThrottleValveStatus,
            kCheckATM,
            kOpenSoftPumpValve,
            kCloseSoftPumpValve,
            kFastPumpValve,
            kCloseFastPumpValve,
            kCheckChamberPressure,
            kCheckVACSignal,
            kEnd
        }

        private int _basePressure;
        private int _pumpValveDelay;
        private double _pumpTimeLimit;
        private readonly uint FORELINE_TARGET = 500;

        public PumpDownRoutine(JetDualPM chamber) : base(chamber)
        {
            Name = "PumpDown";
            bUINotify = true;
        }

        public void Terminate()
        {
        }

        public RState Start(params object[] objs)
        {
            // 预检查，必须关盖子
            if (CheckLid() == RState.Running &&
                CheckSlitDoor1() == RState.Running && CheckSlitDoor2() == RState.Running)
            //&& CheckDryPump() == RState.Running)
            {
                Reset();

                //关闭所有阀门
                _chamber.CloseValves();

                //_PressureTrip1 = SC.GetValue<int>($"{Module}.Pump.PressureTrip1") * 1000;
                _basePressure = (objs.Length == 1) ? Convert.ToInt32(objs[0]) : SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
                _pumpTimeLimit = SC.GetValue<double>($"{Module}.Pump.PumpTimeLimit");
                _pumpValveDelay = SC.GetValue<int>($"{Module}.Pump.PumpValveDelay");

                return Runner.Start(_chamber.Module.ToString(), Name);
            }

            return RState.Failed;
        }

        public RState Monitor()
        {
            Runner.Run(PumpSequence.kCheckForelinePressure,    HOFs.Apply(Foreline, FORELINE_TARGET),             HOFs.Apply(CheckForeline, FORELINE_TARGET),         15*1000)
                  .Run(PumpSequence.kOpenSoftPumpValve,        HOFs.Apply(OpenValve, ValveType.SOFT_PUMP, true),  HOFs.Apply(CheckValve, ValveType.SOFT_PUMP, true),  _delay_1s)
                  .Run(PumpSequence.kCheckThrottleValveStatus, FullOpenTV,                                        CheckFullOpenTV,                                    _delay_20s)
                  .Delay(PumpSequence.kDelay, _pumpValveDelay * 1000)
                  .Run(PumpSequence.kFastPumpValve,            HOFs.Apply(OpenValve, ValveType.FAST_PUMP, true),  HOFs.Apply(CheckValve, ValveType.FAST_PUMP, true),  _delay_1s)
                  .Run(PumpSequence.kCloseFastPumpValve,       HOFs.Apply(OpenValve, ValveType.SOFT_PUMP, false), HOFs.Apply(CheckValve, ValveType.SOFT_PUMP, false), _delay_1s)
                  .Run(PumpSequence.kCheckATM,                 HOFs.Apply(ATM2, false),                           HOFs.Apply(CheckATM2, false),                       _delay_30s)
                  .Run(PumpSequence.kCheckVACSignal,           NullFun,                                           CheckVAC,                                           90*1000)
                  .Run(PumpSequence.kCheckVAC,                 HOFs.Apply(WaitPressure, _basePressure, false),    HOFs.Apply(CheckPressure, _basePressure, false), (int)_pumpTimeLimit * 1000)
                  .End(PumpSequence.kEnd,                      EndFunc,                                           _delay_0s);
            return Runner.Status;
        }

        public override void Abort()
        {
            _chamber.CloseValves();
        }
    }
}