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JetPlasma
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Mars200
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fa35e26745
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mars200_ATM
master
Mars200
/
FrameworkLocal
/
UIClient
/
ClientViews
/
DataLogs
JET-YDB\JET-YANGDB
fa35e26745
1.recipe报错后,工艺步数会停留在报错的步数
1 month ago
..
DataHistory
af4d131eb2
1.UI->Operation Log UI->Wafer History UI->Process History UI->Data History 增加查询日志
4 months ago
Event
fa35e26745
1.recipe报错后,工艺步数会停留在报错的步数
1 month ago
ProcessHistory
5924c8ee8e
mars200
1 year ago
Statistics
5924c8ee8e
mars200
1 year ago
WaferHistory
ea766340ce
1.增加素珀手臂配置以及增加了吸附和释放
10 months ago