JetPlasma/Mars200 @ fa35e26745d4f0d352961a6a295942ef4c940e68

JET-YDB\JET-YANGDB fa35e26745 1.recipe报错后，工艺步数会停留在报错的步数		1 ay önce
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DataHistory	af4d131eb2 1.UI->Operation Log UI->Wafer History UI->Process History UI->Data History 增加查询日志	4 ay önce
Event	fa35e26745 1.recipe报错后，工艺步数会停留在报错的步数	1 ay önce
ProcessHistory	5924c8ee8e mars200	1 yıl önce
Statistics	5924c8ee8e mars200	1 yıl önce
WaferHistory	ea766340ce 1.增加素珀手臂配置以及增加了吸附和释放	10 ay önce