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EFEM
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38b40b702d
1.修复all in all out 不做cooling bug
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4 mesi fa |
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LLs
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f92e6abb17
1.添加Kepler2300 功能代码
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2 mesi fa |
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LPs
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9e9459c927
efem界面按钮功能优化
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10 mesi fa |
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PMs
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031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
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1 mese fa |
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SMIF
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 anno fa |
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Schedulers
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6447434c5b
Venus代码删除
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3 mesi fa |
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TM
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f92e6abb17
1.添加Kepler2300 功能代码
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2 mesi fa |
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AutoCycle.cs
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38b40b702d
1.修复all in all out 不做cooling bug
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4 mesi fa |
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Autotransfer_LP_FA.cs
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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10 mesi fa |
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DVIDName.cs
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44fc6989ef
1、Remove FabConnect dll file;
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1 anno fa |
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EntityErrorRaiseTrigger.cs
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d35b997884
1.优化RevtechMatch状态机
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1 anno fa |
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EntityTaskBase.cs
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5b037046f9
Add TM/LL modules.
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2 anni fa |
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ManualTransfer.cs
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3b1932fced
Add Loadport loaded check while manual transfer wafer.
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9 mesi fa |
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ResourceMonitor.cs
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3838ce8c36
1. Change the logic of Reset RF/Pump/CustomItem count
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8 mesi fa |
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RouteManager.cs
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6ec37ea42c
1.与Venus分开，删除冗余代码
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3 mesi fa |
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SystemDispatcher.cs
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54c8557dd6
调度优化
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2 mesi fa |
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TMCycle.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 anno fa |
lixiang
031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警