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IoBacksideHe.cs
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b6309f712c
upload for Venus SE/DE
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8 mesi fa |
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IoCylinder.cs
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a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
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8 mesi fa |
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IoGasStick.cs
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f92e6abb17
1.添加Kepler2300 功能代码
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5 mesi fa |
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IoHeartbeat.cs
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7556c43a4c
1.Gas漏气检测结束ui界面不更新bug修复
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9 mesi fa |
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IoHeater.cs
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552d60ca99
1.Stable与Tolerance 功能优化
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1 anno fa |
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IoHighTemperatureHeater.cs
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2cdc13a01b
1.Venus与Kepler 代码分开
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6 mesi fa |
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IoHongHuControl.cs
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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1 anno fa |
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IoLid.cs
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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2 anni fa |
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IoMagnet.cs
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7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
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1 anno fa |
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IoMfc.cs
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f92e6abb17
1.添加Kepler2300 功能代码
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5 mesi fa |
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IoPressureControl.cs
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f92e6abb17
1.添加Kepler2300 功能代码
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5 mesi fa |
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IoPressureMeter.cs
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f92e6abb17
1.添加Kepler2300 功能代码
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5 mesi fa |
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IoSignalLight.cs
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af96d139ff
2022年11月24日 提交 RT 部分更改
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2 anni fa |
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IoSignalTower.cs
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79ffe0c064
1.分开Kepler与Venus SequenceView界面
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10 mesi fa |
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IoSwitch.cs
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8f80478982
1.添加IoSwitch
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2 anni fa |
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IoTMPressureCtl.cs
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1931fc55d3
1.根据长鑫要求Process Hietory界面添加eap提供的wafeid与lottype信息
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7 mesi fa |
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IoTMSEPressureCtl.cs
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31bbc4482b
update ui && rt && simu for Venus SE
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1 anno fa |
lixiang
f92e6abb17
1.添加Kepler2300 功能代码