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EventDefine.cs
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a5245356d0
source files
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2 år sedan |
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Fdc.cs
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d35b997884
1.优化RevtechMatch状态机
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1 år sedan |
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GasBoxLeakCheckRoutine.cs
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 år sedan |
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GasFlowRoutine.cs
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 år sedan |
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LLPickRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 år sedan |
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LLPlaceRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 år sedan |
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LoadLockLeakCheckRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 år sedan |
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LoadLockPumpRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 år sedan |
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LoadLockPurgeRoutine.cs
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 år sedan |
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LoadLockVentRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 år sedan |
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PMControlPressureRoutine.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 år sedan |
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PMEntity.cs
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d35b997884
1.优化RevtechMatch状态机
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1 år sedan |
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PMGasVerificationRoutine.cs
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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1 år sedan |
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PMGaslinePurgeRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 år sedan |
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PMHeatRoutine.cs
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c8af7de363
将kepler与Venus UI配置分开，添加Heat Routine
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1 år sedan |
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PMHomeRoutine.cs
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 år sedan |
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PMLeakCheckRoutine.cs
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9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
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1 år sedan |
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PMPartialPressureRoutine.cs
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 år sedan |
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PMProcessRoutine.cs
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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1 år sedan |
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PMProcess_FA.cs
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774c804aa9
fixed pm event occurs carrierid is null
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1 år sedan |
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PMPurgeRoutine.cs
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9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
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1 år sedan |
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PMRoutineBase.cs
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 år sedan |
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PMVATPerformanceRoutine.cs
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 år sedan |
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Process.cs
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3cad102221
更新 RT
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2 år sedan |
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ProcessDefine.cs
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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1 år sedan |
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PumpDownRoutine.cs
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 år sedan |
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RFPowerSwitchRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 år sedan |
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StartDryPumpRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 år sedan |
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StartTurboPumpRoutine.cs
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9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
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1 år sedan |
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VentRoutine.cs
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 år sedan |
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VenusRecipeFileContext.cs
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7d93bf0076
Job Clean function, not finished.
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1 år sedan |
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VenusSequenceFileContext.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 år sedan |
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VirgoRecipeFileContext.cs
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896c7407de
优化log功能
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2 år sedan |
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VirgoSequenceFileContext.cs
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896c7407de
优化log功能
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2 år sedan |
