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- using System;
- using System.Collections.Generic;
- //using System.
- using Venus_RT.Devices;
- using Aitex.Core.RT.Log;
- using Venus_Core;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.RT.Tolerance;
- using System.Diagnostics;
- //#pragma warning disable 0436
- namespace Venus_RT.Modules.PMs
- {
- class ProcessHelper
- {
- protected JetPMBase Chamber;
- private string Module;
- public RecipeHead m_RecipeHead;
- private static Dictionary<string, Func<ProcessUnitBase, RecipeStep, RState>> startHelper = new Dictionary<string, Func<ProcessUnitBase, RecipeStep, RState>>();
- private static Dictionary<string, Func<ProcessUnitBase, RecipeStep, RState>> checkerHelper = new Dictionary<string, Func<ProcessUnitBase, RecipeStep, RState>>();
- private static Dictionary<string, Action<ProcessUnitBase, RecipeStep>> endHelper = new Dictionary<string, Action<ProcessUnitBase, RecipeStep>>();
- private List<float> rfMatchC1 = new List<float>();
- private List<float> rfMatchC2 = new List<float>();
- private int rfMatchC1C2Index = 0;
- private List<float> biasRfMatchC1 = new List<float>();
- private List<float> biasRfMatchC2 = new List<float>();
- private int biasRfMatchC1C2Index = 0;
- public bool isLoop = false;
- public int loopsteps = 0;
- public int currentStepIndex = 0;
- private bool biasRFSetPointFlag = true;
- private double _scRFPowerAlarmTime;
- private double _scBiasRFPowerAlarmTime;
- private RecipeToleranceChecker _GasFlowToleranceChecker;
- private RecipeToleranceChecker _RFToleranceChecker;
- private RecipeToleranceChecker _BiasRFToleranceChecker;
- private RecipeToleranceChecker _HeliumToleranceChecker;
- private RecipeToleranceChecker _PressureToleranceChecker;
- private bool _isEnableMatchC1C2Offset;
- private int _matchC1C2OffsetValue;
- private bool _isEnableBiasMatchC1C2Offset;
- private int _biasMatchC1C2OffsetValue;
- private bool _isInstalledEPD;
- private Stopwatch _lastEPDStepTimeStopwatch;
- public ProcessHelper(JetPMBase pm)
- {
- Chamber = pm;
- Module = pm.Module.ToString();
- Init();
- _GasFlowToleranceChecker = new RecipeToleranceChecker(Module);
- _RFToleranceChecker = new RecipeToleranceChecker(Module);
- _BiasRFToleranceChecker = new RecipeToleranceChecker(Module);
- _HeliumToleranceChecker = new RecipeToleranceChecker(Module);
- _PressureToleranceChecker = new RecipeToleranceChecker(Module);
- if (Chamber.ChamberType == JetChamber.Kepler2300 || Chamber.ChamberType == JetChamber.VenusSE || Chamber.ChamberType == JetChamber.VenusDE)
- {
- _isInstalledEPD = SC.GetValue<bool>($"{Module}.EPD.IsEnabled");
- }
- if (_isInstalledEPD)
- {
- _lastEPDStepTimeStopwatch = new Stopwatch();
- }
- }
- private void Init()
- {
- startHelper[$"{Module}.PressureByPressureModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByPressureModeUnit_Start(unit, step);
- checkerHelper[$"{Module}.PressureByPressureModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByPressureModeUnit_Check(unit, step);
- endHelper[$"{Module}.PressureByPressureModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByPressureModeUnit_End(unit, step);
- //startHelper [$"{Module}.PressureByValveModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByValveModeUnit_Start(unit, step);
- //checkerHelper [$"{Module}.PressureByValveModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByValveModeUnit_Check(unit, step);
- //endHelper [$"{Module}.PressureByValveModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByValveModeUnit_End(unit, step);
- startHelper[$"{Module}.TCPUnit"] = (ProcessUnitBase unit, RecipeStep step) => TCPUnit_Start(unit, step);
- checkerHelper[$"{Module}.TCPUnit"] = (ProcessUnitBase unit, RecipeStep step) => TCPUnit_Check(unit, step);
- endHelper[$"{Module}.TCPUnit"] = (ProcessUnitBase unit, RecipeStep step) => TCPUnit_End(unit, step);
- startHelper[$"{Module}.BiasUnit"] = (ProcessUnitBase unit, RecipeStep step) => BiasUnit_Start(unit, step);
- checkerHelper[$"{Module}.BiasUnit"] = (ProcessUnitBase unit, RecipeStep step) => BiasUnit_Check(unit, step);
- endHelper[$"{Module}.BiasUnit"] = (ProcessUnitBase unit, RecipeStep step) => BiasUnit_End(unit, step);
- startHelper[$"{Module}.GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => GasControlUnit_Start(unit, step);
- checkerHelper[$"{Module}.GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => GasControlUnit_Check(unit, step);
- endHelper[$"{Module}.GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => GasControlUnit_End(unit, step);
- startHelper[$"{Module}.VenusSEGasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => VenusSEGasControlUnit_Start(unit, step);
- checkerHelper[$"{Module}.VenusSEGasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => VenusSEGasControlUnit_Check(unit, step);
- endHelper[$"{Module}.VenusSEGasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => VenusSEGasControlUnit_End(unit, step);
- startHelper[$"{Module}.ESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => ESCHVUnit_Start(unit, step);
- checkerHelper[$"{Module}.ESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => ESCHVUnit_Check(unit, step);
- endHelper[$"{Module}.ESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => ESCHVUnit_End(unit, step);
- //startHelper[$"{Module}.SEESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => SEESCHVUnit_Start(unit, step);
- //checkerHelper[$"{Module}.SEESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => SEESCHVUnit_Check(unit, step);
- //endHelper[$"{Module}.SEESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => SEESCHVUnit_End(unit, step);
- startHelper[$"{Module}.ProcessKitUnit"] = (ProcessUnitBase unit, RecipeStep step) => ProcessKitUnit_Start(unit, step);
- checkerHelper[$"{Module}.ProcessKitUnit"] = (ProcessUnitBase unit, RecipeStep step) => ProcessKitUnit_Check(unit, step);
- endHelper[$"{Module}.ProcessKitUnit"] = (ProcessUnitBase unit, RecipeStep step) => ProcessKitUnit_End(unit, step);
- startHelper[$"{Module}.Kepler2200GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => Kepler2200GasControlUnit_Start(unit, step);
- checkerHelper[$"{Module}.Kepler2200GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => Kepler2200GasControlUnit_Check(unit, step);
- endHelper[$"{Module}.Kepler2200GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => Kepler2200GasControlUnit_End(unit, step);
- startHelper[$"{Module}.HeaterUnit"] = (ProcessUnitBase unit, RecipeStep step) => HeaterUnit_Start(unit, step);
- checkerHelper[$"{Module}.HeaterUnit"] = (ProcessUnitBase unit, RecipeStep step) => HeaterUnit_Check(unit, step);
- endHelper[$"{Module}.HeaterUnit"] = (ProcessUnitBase unit, RecipeStep step) => HeaterUnit_End(unit, step);
- startHelper[$"{Module}.RFBoxUnit"] = (ProcessUnitBase unit, RecipeStep step) => RFBoxUnit_Start(unit, step);
- checkerHelper[$"{Module}.RFBoxUnit"] = (ProcessUnitBase unit, RecipeStep step) => RFBoxUnit_Check(unit, step);
- endHelper[$"{Module}.RFBoxUnit"] = (ProcessUnitBase unit, RecipeStep step) => RFBoxUnit_End(unit, step);
- }
- private RState PressureByPressureModeUnit_Start(ProcessUnitBase unit, RecipeStep step)
- {
- var ProcessUnit = unit as PressureByPressureModeUnit;
- List<ToleranceObject> toleranceObjects = new List<ToleranceObject>();
- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
- {
- toleranceObjects.Add(new ToleranceObject("Pressure", ProcessUnit.StartValue, ProcessUnit.StartValueWarningRange, ProcessUnit.StartValueAlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- _PressureToleranceChecker.Start(toleranceObjects);
- }
- if (ProcessUnit.PressureUnitMode == PressureUnitMode.Pressure)
- {
- if (Chamber.SetPVPressure(ProcessUnit.StartValue))
- {
- return RState.Running;
- }
- }
- else if (ProcessUnit.PressureUnitMode == PressureUnitMode.Valve)
- {
- if (Chamber.SetPVPostion(ProcessUnit.StartValue))
- {
- return RState.Running;
- }
- }
- return RState.Failed;
- }
- private RState PressureByPressureModeUnit_Check(ProcessUnitBase unit, RecipeStep step)
- {
- var ProcessUnit = unit as PressureByPressureModeUnit;
- if (ProcessUnit.EnableRamp)
- {
- if (ProcessUnit.PressureUnitMode == PressureUnitMode.Pressure)
- {
- if (Chamber.SetPVPressure(ProcessUnit.StartValue + (int)((ProcessUnit.TargetValue - ProcessUnit.StartValue) * step.RampFactor())))
- return RState.Running;
- else
- return RState.Failed;
- }
- else if (ProcessUnit.PressureUnitMode == PressureUnitMode.Valve)
- {
- if (Chamber.SetPVPostion(ProcessUnit.StartValue + (int)((ProcessUnit.TargetValue - ProcessUnit.StartValue) * step.RampFactor())))
- return RState.Running;
- else
- return RState.Failed;
- }
- }
- if (ProcessUnit.PressureUnitMode == PressureUnitMode.Pressure && ProcessUnit.ToleranceMode != ToleranceMode.None)
- {
- return _PressureToleranceChecker.Monitor(Chamber.PendulumPressure);
- }
- else if (ProcessUnit.PressureUnitMode == PressureUnitMode.Valve && ProcessUnit.ToleranceMode != ToleranceMode.None)
- {
- return _PressureToleranceChecker.Monitor(Chamber.PendulumPosition);
- }
- return RState.Running;
- }
- private void PressureByPressureModeUnit_End(ProcessUnitBase unit, RecipeStep step)
- {
- var ProcessUnit = unit as PressureByPressureModeUnit;
- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
- {
- _PressureToleranceChecker.End();
- }
- }
- private RState TCPUnit_Start(ProcessUnitBase unit, RecipeStep step)
- {
- _isEnableMatchC1C2Offset = SC.GetValue<bool>($"{Module}.Match.EnableC1C2StepOffset");
- _matchC1C2OffsetValue = SC.GetValue<int>($"{Module}.Match.C1C2StepOffsetValue");
- var ProcessUnit = unit as TCPUnit;
- List<ToleranceObject> toleranceObjects = new List<ToleranceObject>();
- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
- {
- toleranceObjects.Add(new ToleranceObject("RF", ProcessUnit.RFPower, ProcessUnit.RFPowerWarningRange, ProcessUnit.RFPowerAlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- _RFToleranceChecker.Start(toleranceObjects);
- }
- float p1;
- float p2;
- if (ProcessUnit.C1 > 0)
- {
- p1 = ProcessUnit.C1;
- }
- else
- {
- p1 = ProcessUnit.AutoC1;
- }
- if (ProcessUnit.C2 > 0)
- {
- p2 = ProcessUnit.C2;
- }
- else
- {
- p2 = ProcessUnit.AutoC2;
- }
- if (_isEnableMatchC1C2Offset = false || Math.Abs(Chamber.RFMatchC1 - p1) > _matchC1C2OffsetValue || Math.Abs(Chamber.RFMatchC2 - p2) > _matchC1C2OffsetValue)
- {
- Chamber.SetMatchPosition(p1, p2);
- }
- if (ProcessUnit.RFPower > 5)
- {
- Chamber.GeneratorSetpower(ProcessUnit.RFPower);
- Chamber.GeneratorPowerOn(true);
- }
- else
- {
- Chamber.GeneratorSetpower(0);
- Chamber.GeneratorPowerOn(false);
- }
- if (ProcessUnit.MatchWorkMode == MatchWorkMode.Auto)
- {
- Chamber.SetMatchWorkMode(MatchWorkMode.Auto);
- }
- else if (ProcessUnit.MatchWorkMode == MatchWorkMode.Manual)
- {
- Chamber.SetMatchWorkMode(MatchWorkMode.Manual);
- }
- _scRFPowerAlarmTime = SC.GetValue<double>($"{Chamber.Name}.Rf.PowerAlarmTime");
- rfMatchC1.Clear();
- rfMatchC1.Clear();
- rfMatchC1C2Index = 0;
- return RState.Running;
- }
- private RState TCPUnit_Check(ProcessUnitBase unit, RecipeStep step)
- {
- var ProcessUnit = unit as TCPUnit;
- if (ProcessUnit.MaxReflectedPower > 0 && Chamber.ReflectPower > ProcessUnit.MaxReflectedPower && step.ElapsedTime() > _scRFPowerAlarmTime * 1000)
- {
- LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed, RF Reflect Power:{Chamber.ReflectPower} exceeds the Max Limit:{ProcessUnit.MaxReflectedPower}");
- return RState.Failed;
- }
- if (step.ElapsedTime() > m_RecipeHead.RFHoldTime * 1000)
- {
- Chamber.GeneratorSetpower(0);
- Chamber.GeneratorPowerOn(false);
- }
- if (step.ElapsedTime() > rfMatchC1C2Index * 1000)
- {
- rfMatchC1.Add(Chamber.RFMatchC1);
- rfMatchC2.Add(Chamber.RFMatchC2);
- rfMatchC1C2Index += 1;
- }
- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
- {
- return _RFToleranceChecker.Monitor(Chamber.ForwardPower);
- }
- return RState.Running;
- }
- private void TCPUnit_End(ProcessUnitBase unit, RecipeStep step)
- {
- var ProcessUnit = unit as TCPUnit;
- if (rfMatchC1.Count >= 6)
- {
- float allValue = 0;
- for (int i = 4; i < rfMatchC1.Count; i++)
- {
- allValue += rfMatchC1[i];
- }
- var average = allValue / (rfMatchC1.Count - 4);
- ProcessUnit.AutoC1 = (int)average;
- }
- if (rfMatchC2.Count >= 6)
- {
- float allValue = 0;
- for (int i = 4; i < rfMatchC2.Count; i++)
- {
- allValue += rfMatchC2[i];
- }
- var average = allValue / (rfMatchC2.Count - 4);
- ProcessUnit.AutoC2 = (int)average;
- }
- rfMatchC1.Clear();
- rfMatchC2.Clear();
- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
- {
- _RFToleranceChecker.End();
- }
- }
- private RState BiasUnit_Start(ProcessUnitBase unit, RecipeStep step)
- {
- _isEnableBiasMatchC1C2Offset = SC.GetValue<bool>($"{Module}.BiasMatch.EnableC1C2StepOffset");
- _biasMatchC1C2OffsetValue = SC.GetValue<int>($"{Module}.BiasMatch.C1C2StepOffsetValue");
- var ProcessUnit = unit as BiasUnit;
- float p1;
- float p2;
- if (ProcessUnit.BiasC1 > 0)
- {
- p1 = ProcessUnit.BiasC1;
- }
- else
- {
- p1 = ProcessUnit.AutoBiasC1;
- }
- if (ProcessUnit.BiasC2 > 0)
- {
- p2 = ProcessUnit.BiasC2;
- }
- else
- {
- p2 = ProcessUnit.AutoBiasC2;
- }
- if (_isEnableBiasMatchC1C2Offset == false || Math.Abs(Chamber.BiasRFMatchC1 - p1) > _biasMatchC1C2OffsetValue || Math.Abs(Chamber.BiasRFMatchC2 - p2) > _biasMatchC1C2OffsetValue)
- {
- Chamber.SetBiasMatchPosition(p1, p2);
- }
- if (ProcessUnit.BiasRFPower > 5)
- {
- Chamber.GeneratorBiasPowerOn(true);
- if ((ProcessUnit.EnableRamp == false))
- {
- Chamber.GeneratorBiasSetpower(ProcessUnit.BiasRFPower);
- }
- }
- else
- {
- Chamber.GeneratorBiasPowerOn(false);
- Chamber.GeneratorBiasSetpower(0);
- }
- if (ProcessUnit.BiasMatchWorkMode == MatchWorkMode.Auto)
- {
- Chamber.SetBiasMatchWorkMode(MatchWorkMode.Auto);
- }
- else if (ProcessUnit.BiasMatchWorkMode == MatchWorkMode.Manual)
- {
- Chamber.SetBiasMatchWorkMode(MatchWorkMode.Manual);
- }
- if (ProcessUnit.BiasGeneratorMode == GeneratorMode.Pulsing)
- {
- Chamber.SetBiasPulseMode(true);
- Chamber.SetBiasPulseRateFreq(ProcessUnit.PulseRateFreq);
- Chamber.SetDiasPulseDutyCycle(ProcessUnit.PulseDutyCycle);
- }
- else
- {
- Chamber.SetBiasPulseMode(false);
- }
- _scBiasRFPowerAlarmTime = SC.GetValue<double>($"{Chamber.Name}.BiasRf.PowerAlarmTime");
- biasRfMatchC1.Clear();
- biasRfMatchC1.Clear();
- biasRfMatchC1C2Index = 0;
- biasRFSetPointFlag = true;
- return RState.Running;
- }
- private RState BiasUnit_Check(ProcessUnitBase unit, RecipeStep step)
- {
- //var _scPowerAlarmTime = SC.GetValue<double>($"{Chamber.Name}.BiasRf.PowerAlarmTime");
- var ProcessUnit = unit as BiasUnit;
- if (ProcessUnit.BiasMaxReflectedPower > 0 && Chamber.BiasReflectPower > ProcessUnit.BiasMaxReflectedPower && step.ElapsedTime() > _scBiasRFPowerAlarmTime * 1000)
- {
- LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed, Bias Reflect Power:{Chamber.BiasReflectPower} exceeds the Max Limit:{ProcessUnit.BiasMaxReflectedPower}");
- return RState.Failed;
- }
- if (step.ElapsedTime() > m_RecipeHead.BiasRFHoldTime * 1000)
- {
- Chamber.GeneratorBiasSetpower(0);
- Chamber.GeneratorBiasPowerOn(false);
- }
- if (step.ElapsedTime() > biasRfMatchC1C2Index * 1000)
- {
- biasRfMatchC1.Add(Chamber.BiasRFMatchC1);
- biasRfMatchC2.Add(Chamber.BiasRFMatchC2);
- biasRfMatchC1C2Index += 1;
- }
- if (ProcessUnit.EnableRamp)
- {
- //if (step.ElapsedTime() <= 500*cycleIndex)
- //{
- // return RState.Running;
- //}
- //cycleIndex += 1;
- if (ProcessUnit.TargetMode == TargetMode.Cycle)
- {
- if (biasRFSetPointFlag == true)
- {
- biasRFSetPointFlag = false;
- Chamber.GeneratorBiasSetpower((float)((ProcessUnit.BiasRFPower + (float)((float)(ProcessUnit.TargetBiasRFPower - ProcessUnit.BiasRFPower) / ((float)(loopsteps - 1) / (float)(currentStepIndex))))));
- }
- //float rampFactor = (float)currentStepIndex / (float)(loopsteps-1);
- //double rampFactor = step.RampFactor();
- //Chamber.GeneratorBiasSetpower((float)((ProcessUnit.BiasRFPower+ (ProcessUnit.TargetBiasRFPower - ProcessUnit.BiasRFPower)/(loopsteps)*currentStepIndex) + ((double)(ProcessUnit.TargetBiasRFPower - ProcessUnit.BiasRFPower) / ((double)loopsteps)) * rampFactor));
- }
- else
- {
- //double rampFactor = step.RampFactor();
- //Chamber.GeneratorBiasSetpower((float)(ProcessUnit.BiasRFPower + (ProcessUnit.TargetBiasRFPower - ProcessUnit.BiasRFPower) * rampFactor));
- }
- }
- return RState.Running;
- }
- private void BiasUnit_End(ProcessUnitBase unit, RecipeStep step)
- {
- var ProcessUnit = unit as BiasUnit;
- //Chamber.GeneratorBiasSetpower(0);
- //Chamber.GeneratorBiasPowerOn(false);
- if (biasRfMatchC1.Count >= 6)
- {
- float allValue = 0;
- for (int i = 4; i < biasRfMatchC1.Count; i++)
- {
- allValue += biasRfMatchC1[i];
- }
- var average = allValue / (biasRfMatchC1.Count - 4);
- ProcessUnit.AutoBiasC1 = (int)average;
- }
- if (biasRfMatchC2.Count >= 6)
- {
- float allValue = 0;
- for (int i = 4; i < biasRfMatchC2.Count; i++)
- {
- allValue += biasRfMatchC2[i];
- }
- var average = allValue / (biasRfMatchC2.Count - 4);
- ProcessUnit.AutoBiasC2 = (int)average;
- }
- biasRfMatchC1.Clear();
- biasRfMatchC1.Clear();
- biasRfMatchC1C2Index = 0;
- //cycleIndex = 0;
- biasRFSetPointFlag = true;
- }
- private RState GasControlUnit_Start(ProcessUnitBase unit, RecipeStep step)
- {
- Chamber.OpenValve(ValveType.GasFinal, true);
- var ProcessUnit = unit as GasControlUnit;
- if (ProcessUnit.Gas1 >= 1)
- {
- Chamber.FlowGas(0, ProcessUnit.Gas1);
- }
- else
- {
- Chamber.FlowGas(0, 0);
- }
- if (ProcessUnit.Gas2 >= 1)
- {
- Chamber.FlowGas(1, ProcessUnit.Gas2);
- }
- else
- {
- Chamber.FlowGas(1, 0);
- }
- if (ProcessUnit.Gas3 >= 1)
- {
- Chamber.FlowGas(2, ProcessUnit.Gas3);
- }
- else
- {
- Chamber.FlowGas(2, 0);
- }
- if (ProcessUnit.Gas4 >= 1)
- {
- Chamber.FlowGas(3, ProcessUnit.Gas4);
- }
- else
- {
- Chamber.FlowGas(3, 0);
- }
- if (ProcessUnit.Gas5 >= 1)
- {
- Chamber.FlowGas(4, ProcessUnit.Gas5);
- }
- else
- {
- Chamber.FlowGas(4, 0);
- }
- if (ProcessUnit.Gas6 >= 1)
- {
- Chamber.FlowGas(5, ProcessUnit.Gas6);
- }
- else
- {
- Chamber.FlowGas(5, 0);
- }
- if (ProcessUnit.Gas7 >= 1)
- {
- Chamber.FlowGas(6, ProcessUnit.Gas7);
- }
- else
- {
- Chamber.FlowGas(6, 0);
- }
- if (ProcessUnit.Gas8 >= 1)
- {
- Chamber.FlowGas(7, ProcessUnit.Gas8);
- }
- else
- {
- Chamber.FlowGas(7, 0);
- }
- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
- {
- List<ToleranceObject> toleranceObjects = new List<ToleranceObject>();
- toleranceObjects.Add(new ToleranceObject("Gas1", ProcessUnit.Gas1, ProcessUnit.Gas1WarningRange, ProcessUnit.Gas1AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas2", ProcessUnit.Gas2, ProcessUnit.Gas2WarningRange, ProcessUnit.Gas2AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas3", ProcessUnit.Gas3, ProcessUnit.Gas3WarningRange, ProcessUnit.Gas3AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas4", ProcessUnit.Gas4, ProcessUnit.Gas4WarningRange, ProcessUnit.Gas4AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas5", ProcessUnit.Gas5, ProcessUnit.Gas5WarningRange, ProcessUnit.Gas5AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas6", ProcessUnit.Gas6, ProcessUnit.Gas6WarningRange, ProcessUnit.Gas6AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas7", ProcessUnit.Gas7, ProcessUnit.Gas7WarningRange, ProcessUnit.Gas7AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas8", ProcessUnit.Gas8, ProcessUnit.Gas8WarningRange, ProcessUnit.Gas8AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- _GasFlowToleranceChecker.Start(toleranceObjects);
- }
- return RState.Running;
- }
- private RState GasControlUnit_Check(ProcessUnitBase unit, RecipeStep step)
- {
- var ProcessUnit = unit as GasControlUnit;
- if (ProcessUnit.EnableRamp)
- {
- double rampFactor = step.RampFactor();
- Chamber.FlowGas(0, ProcessUnit.Gas1 + (ProcessUnit.Gas1Target - ProcessUnit.Gas1) * rampFactor);
- Chamber.FlowGas(1, ProcessUnit.Gas2 + (ProcessUnit.Gas2Target - ProcessUnit.Gas2) * rampFactor);
- Chamber.FlowGas(2, ProcessUnit.Gas3 + (ProcessUnit.Gas3Target - ProcessUnit.Gas3) * rampFactor);
- Chamber.FlowGas(3, ProcessUnit.Gas4 + (ProcessUnit.Gas4Target - ProcessUnit.Gas4) * rampFactor);
- Chamber.FlowGas(4, ProcessUnit.Gas5 + (ProcessUnit.Gas5Target - ProcessUnit.Gas5) * rampFactor);
- Chamber.FlowGas(5, ProcessUnit.Gas6 + (ProcessUnit.Gas6Target - ProcessUnit.Gas6) * rampFactor);
- Chamber.FlowGas(6, ProcessUnit.Gas7 + (ProcessUnit.Gas7Target - ProcessUnit.Gas7) * rampFactor);
- Chamber.FlowGas(7, ProcessUnit.Gas8 + (ProcessUnit.Gas8Target - ProcessUnit.Gas8) * rampFactor);
- }
- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
- {
- return _GasFlowToleranceChecker.Monitor(Chamber.MFC1FeedBack, Chamber.MFC2FeedBack, Chamber.MFC3FeedBack, Chamber.MFC4FeedBack, Chamber.MFC5FeedBack, Chamber.MFC6FeedBack, Chamber.MFC7FeedBack, Chamber.MFC8FeedBack);
- }
- return RState.Running;
- }
- private void GasControlUnit_End(ProcessUnitBase unit, RecipeStep step)
- {
- var ProcessUnit = unit as GasControlUnit;
- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
- {
- _GasFlowToleranceChecker.End();
- }
- }
- private RState Kepler2200GasControlUnit_Start(ProcessUnitBase unit, RecipeStep step)
- {
- List<ToleranceObject> toleranceObjects = new List<ToleranceObject>();
- Chamber.OpenValve(ValveType.GasFinal, true);
- var ProcessUnit = unit as Kepler2200GasControlUnit;
- if (ProcessUnit.Gas1 >= 1)
- {
- Chamber.FlowGas(0, ProcessUnit.Gas1);
- }
- else
- {
- Chamber.FlowGas(0, 0);
- }
- if (ProcessUnit.Gas2 >= 1)
- {
- Chamber.FlowGas(1, ProcessUnit.Gas2);
- }
- else
- {
- Chamber.FlowGas(1, 0);
- }
- if (ProcessUnit.Gas3 >= 1)
- {
- Chamber.FlowGas(2, ProcessUnit.Gas3);
- }
- else
- {
- Chamber.FlowGas(2, 0);
- }
- if (ProcessUnit.Gas4 >= 1)
- {
- Chamber.FlowGas(3, ProcessUnit.Gas4);
- }
- else
- {
- Chamber.FlowGas(3, 0);
- }
- if (ProcessUnit.Gas5 >= 1)
- {
- Chamber.FlowGas(4, ProcessUnit.Gas5);
- }
- else
- {
- Chamber.FlowGas(4, 0);
- }
- if (ProcessUnit.Gas6 >= 1)
- {
- Chamber.FlowGas(5, ProcessUnit.Gas6);
- }
- else
- {
- Chamber.FlowGas(5, 0);
- }
- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
- {
- toleranceObjects.Add(new ToleranceObject("Gas1", ProcessUnit.Gas1, ProcessUnit.Gas1WarningRange, ProcessUnit.Gas1AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas2", ProcessUnit.Gas2, ProcessUnit.Gas2WarningRange, ProcessUnit.Gas2AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas3", ProcessUnit.Gas3, ProcessUnit.Gas3WarningRange, ProcessUnit.Gas3AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas4", ProcessUnit.Gas4, ProcessUnit.Gas4WarningRange, ProcessUnit.Gas4AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas5", ProcessUnit.Gas5, ProcessUnit.Gas5WarningRange, ProcessUnit.Gas5AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas6", ProcessUnit.Gas6, ProcessUnit.Gas6WarningRange, ProcessUnit.Gas6AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- _GasFlowToleranceChecker.Start(toleranceObjects);
- }
- return RState.Running;
- }
- private RState Kepler2200GasControlUnit_Check(ProcessUnitBase unit, RecipeStep step)
- {
- var ProcessUnit = unit as Kepler2200GasControlUnit;
- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
- {
- return _GasFlowToleranceChecker.Monitor(Chamber.MFC1FeedBack, Chamber.MFC2FeedBack, Chamber.MFC3FeedBack, Chamber.MFC4FeedBack, Chamber.MFC5FeedBack, Chamber.MFC6FeedBack);
- }
- return RState.Running;
- }
- private void Kepler2200GasControlUnit_End(ProcessUnitBase unit, RecipeStep step)
- {
- var ProcessUnit = unit as Kepler2200GasControlUnit;
- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
- {
- _GasFlowToleranceChecker.End();
- }
- }
- private RState VenusSEGasControlUnit_Start(ProcessUnitBase unit, RecipeStep step)
- {
- Chamber.OpenValve(ValveType.GasFinal, true);
- var ProcessUnit = unit as VenusSEGasControlUnit;
- Chamber.FlowGas(0, ProcessUnit.Gas1);
- if (ProcessUnit.Gas1 >= 1)
- {
- Chamber.OpenValve(ValveType.PV11, true);
- }
- Chamber.FlowGas(1, ProcessUnit.Gas2);
- if (ProcessUnit.Gas2 >= 1)
- {
- Chamber.OpenValve(ValveType.PV21, true);
- }
- Chamber.FlowGas(2, ProcessUnit.Gas3);
- if (ProcessUnit.Gas3 >= 1)
- {
- Chamber.OpenValve(ValveType.PV31, true);
- }
- Chamber.FlowGas(3, ProcessUnit.Gas4);
- if (ProcessUnit.Gas4 >= 1)
- {
- Chamber.OpenValve(ValveType.PV41, true);
- }
- Chamber.FlowGas(4, ProcessUnit.Gas5);
- if (ProcessUnit.Gas5 >= 1)
- {
- Chamber.OpenValve(ValveType.PV51, true);
- }
- Chamber.FlowGas(5, ProcessUnit.Gas6);
- if (ProcessUnit.Gas6 >= 1)
- {
- Chamber.OpenValve(ValveType.PV61, true);
- }
- Chamber.FlowGas(6, ProcessUnit.Gas7);
- if (ProcessUnit.Gas7 >= 1)
- {
- Chamber.OpenValve(ValveType.PV71, true);
- }
- Chamber.FlowGas(7, ProcessUnit.Gas8);
- if (ProcessUnit.Gas8 >= 1)
- {
- Chamber.OpenValve(ValveType.PV81, true);
- }
- Chamber.FlowGas(8, ProcessUnit.Gas9);
- if (ProcessUnit.Gas9 >= 1)
- {
- Chamber.OpenValve(ValveType.PV91, true);
- }
- Chamber.FlowGas(9, ProcessUnit.Gas10);
- if (ProcessUnit.Gas10 >= 1)
- {
- Chamber.OpenValve(ValveType.PVA1, true);
- }
- Chamber.FlowGas(10, ProcessUnit.Gas11);
- if (ProcessUnit.Gas11 >= 1)
- {
- Chamber.OpenValve(ValveType.PVB1, true);
- }
- Chamber.FlowGas(11, ProcessUnit.Gas12);
- if (ProcessUnit.Gas12 >= 1)
- {
- Chamber.OpenValve(ValveType.PVC1, true);
- }
- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
- {
- List<ToleranceObject> toleranceObjects = new List<ToleranceObject>();
- toleranceObjects.Add(new ToleranceObject("Gas1", ProcessUnit.Gas1, ProcessUnit.Gas1WarningRange, ProcessUnit.Gas1AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas2", ProcessUnit.Gas2, ProcessUnit.Gas2WarningRange, ProcessUnit.Gas2AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas3", ProcessUnit.Gas3, ProcessUnit.Gas3WarningRange, ProcessUnit.Gas3AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas4", ProcessUnit.Gas4, ProcessUnit.Gas4WarningRange, ProcessUnit.Gas4AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas5", ProcessUnit.Gas5, ProcessUnit.Gas5WarningRange, ProcessUnit.Gas5AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas6", ProcessUnit.Gas6, ProcessUnit.Gas6WarningRange, ProcessUnit.Gas6AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas7", ProcessUnit.Gas7, ProcessUnit.Gas7WarningRange, ProcessUnit.Gas7AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas8", ProcessUnit.Gas8, ProcessUnit.Gas8WarningRange, ProcessUnit.Gas8AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas9", ProcessUnit.Gas9, ProcessUnit.Gas9WarningRange, ProcessUnit.Gas9AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas10", ProcessUnit.Gas10, ProcessUnit.Gas10WarningRange, ProcessUnit.Gas10AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas11", ProcessUnit.Gas11, ProcessUnit.Gas11WarningRange, ProcessUnit.Gas11AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- toleranceObjects.Add(new ToleranceObject("Gas12", ProcessUnit.Gas12, ProcessUnit.Gas12WarningRange, ProcessUnit.Gas12AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- _GasFlowToleranceChecker.Start(toleranceObjects);
- }
- return RState.Running;
- }
- private RState VenusSEGasControlUnit_Check(ProcessUnitBase unit, RecipeStep step)
- {
- var ProcessUnit = unit as VenusSEGasControlUnit;
- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
- {
- return _GasFlowToleranceChecker.Monitor(Chamber.MFC1FeedBack, Chamber.MFC2FeedBack, Chamber.MFC3FeedBack, Chamber.MFC4FeedBack, Chamber.MFC5FeedBack, Chamber.MFC6FeedBack, Chamber.MFC7FeedBack, Chamber.MFC8FeedBack, Chamber.MFC9FeedBack, Chamber.MFC10FeedBack, Chamber.MFC11FeedBack, Chamber.MFC12FeedBack);
- }
- return RState.Running;
- }
- private void VenusSEGasControlUnit_End(ProcessUnitBase unit, RecipeStep step)
- {
- Chamber.FlowGas(0, 0);
- Chamber.FlowGas(1, 0);
- Chamber.FlowGas(2, 0);
- Chamber.FlowGas(3, 0);
- Chamber.FlowGas(4, 0);
- Chamber.FlowGas(5, 0);
- Chamber.FlowGas(6, 0);
- Chamber.FlowGas(7, 0);
- Chamber.FlowGas(8, 0);
- Chamber.FlowGas(9, 0);
- Chamber.FlowGas(10, 0);
- Chamber.FlowGas(11, 0);
- Chamber.FlowGas(12, 0);
- var ProcessUnit = unit as VenusSEGasControlUnit;
- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
- {
- _GasFlowToleranceChecker.End();
- }
- }
- private RState ESCHVUnit_Start(ProcessUnitBase unit, RecipeStep step)
- {
- var ProcessUnit = unit as ESCHVUnit;
- if (ProcessUnit.ESCClampValtage > 0)
- {
- Chamber.SetESCClampVoltage(ProcessUnit.ESCClampValtage);
- }
- else
- {
- Chamber.SetESCClampVoltage(0);
- }
- Chamber.SetBacksideHePressure(ProcessUnit.BacksideHelium);
- List<ToleranceObject> toleranceObjects = new List<ToleranceObject>();
- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
- {
- toleranceObjects.Add(new ToleranceObject("BacksideHelium", ProcessUnit.BacksideHelium, ProcessUnit.HeliumWarningRange, ProcessUnit.HeliumAlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
- _HeliumToleranceChecker.Start(toleranceObjects);
- }
- return RState.Running;
- }
- private RState ESCHVUnit_Check(ProcessUnitBase unit, RecipeStep step)
- {
- var ProcessUnit = unit as ESCHVUnit;
- //if (Chamber.BackSideHeOutOfRange && step.ElapsedTime() > ProcessUnit.CheckDelay)
- //{
- // LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed, Backside Helium out of range.");
- // return RState.Failed;
- //}
- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
- {
- return _HeliumToleranceChecker.Monitor(Chamber.HeliumFeedBack);
- }
- return RState.Running;
- }
- private void ESCHVUnit_End(ProcessUnitBase unit, RecipeStep step)
- {
- //Chamber.SetESCClampVoltage(0);
- //Chamber.SetBacksideHeThreshold(0, 0);
- var ProcessUnit = unit as ESCHVUnit;
- if (ProcessUnit.ToleranceMode != ToleranceMode.None)
- {
- _HeliumToleranceChecker.End();
- }
- }
- private RState ProcessKitUnit_Start(ProcessUnitBase unit, RecipeStep step)
- {
- var ProcessUnit = unit as ProcessKitUnit;
- if (Chamber.SetLiftPin(ProcessUnit.LiftPinPostion, out string reason))
- {
- return RState.Running;
- }
- else
- {
- LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed. Target Position:{ProcessUnit.LiftPinPostion}");
- return RState.Failed;
- }
- }
- private RState ProcessKitUnit_Check(ProcessUnitBase unit, RecipeStep step)
- {
- var ProcessUnit = unit as ProcessKitUnit;
- return RState.Running;
- }
- private void ProcessKitUnit_End(ProcessUnitBase unit, RecipeStep step)
- {
- }
- private RState RFBoxUnit_Start(ProcessUnitBase unit, RecipeStep step)
- {
- var ProcessUnit = unit as RFBoxUnit;
- if (Chamber.SetRFBoxC1Position(ProcessUnit.C1))
- {
- return RState.Running;
- }
- else
- {
- LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed duo to RFBox Write C1 failed ");
- return RState.Failed;
- }
- }
- private RState RFBoxUnit_Check(ProcessUnitBase unit, RecipeStep step)
- {
- return RState.Running;
- }
- private void RFBoxUnit_End(ProcessUnitBase unit, RecipeStep step)
- {
- }
- private RState HeaterUnit_Start(ProcessUnitBase unit, RecipeStep step)
- {
- var ProcessUnit = unit as HeaterUnit;
- var position = (HighTemperatureHeaterPosition)Enum.Parse(typeof(HighTemperatureHeaterPosition), ProcessUnit.SuspectPosition.ToString());
- Chamber.HighTemperatureHeaterGotoPosition(position);
- if (ProcessUnit.HeaterTemp > 0)
- {
- Chamber.SetHighTemperatureHeaterTemperature(ProcessUnit.HeaterTemp);
- }
- Chamber.SetHighTemperatureHeaterRatio(ProcessUnit.HeaterRatio);
- return RState.Running;
- }
- private RState HeaterUnit_Check(ProcessUnitBase unit, RecipeStep step)
- {
- return RState.Running;
- }
- private void HeaterUnit_End(ProcessUnitBase unit, RecipeStep step)
- {
- }
- public bool LoadMethods(ProcessUnitBase unit)
- {
- var className = $"{Module}.{unit.GetType().Name}";
- if (startHelper.ContainsKey(className) && checkerHelper.ContainsKey(className) && endHelper.ContainsKey(className))
- {
- unit.starter = startHelper[className];
- unit.checker = checkerHelper[className];
- unit.end = endHelper[className];
- return true;
- }
- return false;
- }
- //public void loopStep(bool isloop,int loopCount,int loopIndex)
- //{
- // isLoop = isloop;
- // loopsteps=loopCount;
- // currentStepIndex = loopIndex;
- //}
- private RState stepStarter(RecipeStep step)
- {
- step.StartStepTimer();
- //switch (step.Type)
- //{
- // case StepType.EndPoint:
- // Chamber.EPDStepStart(step.EPDConfig, step.StepNo);
- // break;
- //}
- if (_isInstalledEPD)
- {
- Chamber.EPDStepStart(step.EPDConfig, step.StepNo);
- if (step.Type == StepType.EndPoint)
- {
- _lastEPDStepTimeStopwatch.Restart();
- }
- }
- return RState.Running;
- }
- private RState stepChecker(RecipeStep step)
- {
- switch (step.Type)
- {
- case StepType.Time:
- return step.ElapsedTime() >= step.Time * 1000 ? RState.End : RState.Running;
- case StepType.OverEtch:
- var time = _lastEPDStepTimeStopwatch.ElapsedMilliseconds;
- return step.ElapsedTime() >= (time * step.OverEtchPercent / 100) ? RState.End : RState.Running;
- case StepType.EndPoint:
- if (step.ElapsedTime() > step.MaxEndPointTime * 1000)
- {
- LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} timeout, did not capture endpoint signal in {step.MaxEndPointTime} seconds");
- return RState.Failed;
- }
- else
- {
- if (Chamber.EPDCaptured)
- {
- if (step.ElapsedTime() < step.MinEndPointTime * 1000)
- {
- LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} timeout, capture endpoint signal less than {step.MinEndPointTime} seconds");
- return RState.Failed;
- }
- else
- {
- return RState.End;
- }
- }
- else
- {
- return RState.Running;
- }
- //return Chamber.EPDCaptured ? RState.End : RState.Running;
- }
- case StepType.Stable:
- if (step.ElapsedTime() >= step.Time * 1000)
- {
- LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} timeout, did not Stable in {step.Time} seconds");
- return RState.Failed;
- }
- else
- {
- if (_GasFlowToleranceChecker.IsStable && _PressureToleranceChecker.IsStable && _HeliumToleranceChecker.IsStable)
- {
- return RState.End;
- }
- }
- return RState.Running;
- }
- return RState.Running;
- }
- private RState stepEnder(RecipeStep step)
- {
- //if (step.Type == StepType.EndPoint)
- //{
- // Chamber.EPDStepStop();
- //}
- if (_isInstalledEPD)
- {
- Chamber.EPDStepStop();
- if (step.Type == StepType.EndPoint)
- {
- _lastEPDStepTimeStopwatch.Stop();
- }
- }
- return RState.End;
- }
- public bool LoadStepFuns(RecipeStep step)
- {
- step.starter = stepStarter;
- step.checker = stepChecker;
- step.ender = stepEnder;
- return true;
- }
- }
- }
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