ProcessDefine.cs 45 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. //using System.
  4. using Venus_RT.Devices;
  5. using Aitex.Core.RT.Log;
  6. using Venus_Core;
  7. using Aitex.Core.RT.SCCore;
  8. using Aitex.Core.RT.Tolerance;
  9. using System.Diagnostics;
  10. //#pragma warning disable 0436
  11. namespace Venus_RT.Modules.PMs
  12. {
  13. class ProcessHelper
  14. {
  15. protected JetPMBase Chamber;
  16. private string Module;
  17. public RecipeHead m_RecipeHead;
  18. private static Dictionary<string, Func<ProcessUnitBase, RecipeStep, RState>> startHelper = new Dictionary<string, Func<ProcessUnitBase, RecipeStep, RState>>();
  19. private static Dictionary<string, Func<ProcessUnitBase, RecipeStep, RState>> checkerHelper = new Dictionary<string, Func<ProcessUnitBase, RecipeStep, RState>>();
  20. private static Dictionary<string, Action<ProcessUnitBase, RecipeStep>> endHelper = new Dictionary<string, Action<ProcessUnitBase, RecipeStep>>();
  21. private List<float> rfMatchC1 = new List<float>();
  22. private List<float> rfMatchC2 = new List<float>();
  23. private int rfMatchC1C2Index = 0;
  24. private List<float> biasRfMatchC1 = new List<float>();
  25. private List<float> biasRfMatchC2 = new List<float>();
  26. private int biasRfMatchC1C2Index = 0;
  27. public bool isLoop = false;
  28. public int loopsteps = 0;
  29. public int currentStepIndex = 0;
  30. private bool biasRFSetPointFlag = true;
  31. private double _scRFPowerAlarmTime;
  32. private double _scBiasRFPowerAlarmTime;
  33. private RecipeToleranceChecker _GasFlowToleranceChecker;
  34. private RecipeToleranceChecker _RFToleranceChecker;
  35. private RecipeToleranceChecker _BiasRFToleranceChecker;
  36. private RecipeToleranceChecker _HeliumToleranceChecker;
  37. private RecipeToleranceChecker _PressureToleranceChecker;
  38. private bool _isEnableMatchC1C2Offset;
  39. private int _matchC1C2OffsetValue;
  40. private bool _isEnableBiasMatchC1C2Offset;
  41. private int _biasMatchC1C2OffsetValue;
  42. private bool _isInstalledEPD;
  43. private Stopwatch _lastEPDStepTimeStopwatch;
  44. public ProcessHelper(JetPMBase pm)
  45. {
  46. Chamber = pm;
  47. Module = pm.Module.ToString();
  48. Init();
  49. _GasFlowToleranceChecker = new RecipeToleranceChecker(Module);
  50. _RFToleranceChecker = new RecipeToleranceChecker(Module);
  51. _BiasRFToleranceChecker = new RecipeToleranceChecker(Module);
  52. _HeliumToleranceChecker = new RecipeToleranceChecker(Module);
  53. _PressureToleranceChecker = new RecipeToleranceChecker(Module);
  54. if (Chamber.ChamberType == JetChamber.Kepler2300 || Chamber.ChamberType == JetChamber.VenusSE || Chamber.ChamberType == JetChamber.VenusDE)
  55. {
  56. _isInstalledEPD = SC.GetValue<bool>($"{Module}.EPD.IsEnabled");
  57. }
  58. if (_isInstalledEPD)
  59. {
  60. _lastEPDStepTimeStopwatch = new Stopwatch();
  61. }
  62. }
  63. private void Init()
  64. {
  65. startHelper[$"{Module}.PressureByPressureModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByPressureModeUnit_Start(unit, step);
  66. checkerHelper[$"{Module}.PressureByPressureModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByPressureModeUnit_Check(unit, step);
  67. endHelper[$"{Module}.PressureByPressureModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByPressureModeUnit_End(unit, step);
  68. //startHelper [$"{Module}.PressureByValveModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByValveModeUnit_Start(unit, step);
  69. //checkerHelper [$"{Module}.PressureByValveModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByValveModeUnit_Check(unit, step);
  70. //endHelper [$"{Module}.PressureByValveModeUnit"] = (ProcessUnitBase unit, RecipeStep step) => PressureByValveModeUnit_End(unit, step);
  71. startHelper[$"{Module}.TCPUnit"] = (ProcessUnitBase unit, RecipeStep step) => TCPUnit_Start(unit, step);
  72. checkerHelper[$"{Module}.TCPUnit"] = (ProcessUnitBase unit, RecipeStep step) => TCPUnit_Check(unit, step);
  73. endHelper[$"{Module}.TCPUnit"] = (ProcessUnitBase unit, RecipeStep step) => TCPUnit_End(unit, step);
  74. startHelper[$"{Module}.BiasUnit"] = (ProcessUnitBase unit, RecipeStep step) => BiasUnit_Start(unit, step);
  75. checkerHelper[$"{Module}.BiasUnit"] = (ProcessUnitBase unit, RecipeStep step) => BiasUnit_Check(unit, step);
  76. endHelper[$"{Module}.BiasUnit"] = (ProcessUnitBase unit, RecipeStep step) => BiasUnit_End(unit, step);
  77. startHelper[$"{Module}.GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => GasControlUnit_Start(unit, step);
  78. checkerHelper[$"{Module}.GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => GasControlUnit_Check(unit, step);
  79. endHelper[$"{Module}.GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => GasControlUnit_End(unit, step);
  80. startHelper[$"{Module}.VenusSEGasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => VenusSEGasControlUnit_Start(unit, step);
  81. checkerHelper[$"{Module}.VenusSEGasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => VenusSEGasControlUnit_Check(unit, step);
  82. endHelper[$"{Module}.VenusSEGasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => VenusSEGasControlUnit_End(unit, step);
  83. startHelper[$"{Module}.ESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => ESCHVUnit_Start(unit, step);
  84. checkerHelper[$"{Module}.ESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => ESCHVUnit_Check(unit, step);
  85. endHelper[$"{Module}.ESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => ESCHVUnit_End(unit, step);
  86. //startHelper[$"{Module}.SEESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => SEESCHVUnit_Start(unit, step);
  87. //checkerHelper[$"{Module}.SEESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => SEESCHVUnit_Check(unit, step);
  88. //endHelper[$"{Module}.SEESCHVUnit"] = (ProcessUnitBase unit, RecipeStep step) => SEESCHVUnit_End(unit, step);
  89. startHelper[$"{Module}.ProcessKitUnit"] = (ProcessUnitBase unit, RecipeStep step) => ProcessKitUnit_Start(unit, step);
  90. checkerHelper[$"{Module}.ProcessKitUnit"] = (ProcessUnitBase unit, RecipeStep step) => ProcessKitUnit_Check(unit, step);
  91. endHelper[$"{Module}.ProcessKitUnit"] = (ProcessUnitBase unit, RecipeStep step) => ProcessKitUnit_End(unit, step);
  92. startHelper[$"{Module}.Kepler2200GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => Kepler2200GasControlUnit_Start(unit, step);
  93. checkerHelper[$"{Module}.Kepler2200GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => Kepler2200GasControlUnit_Check(unit, step);
  94. endHelper[$"{Module}.Kepler2200GasControlUnit"] = (ProcessUnitBase unit, RecipeStep step) => Kepler2200GasControlUnit_End(unit, step);
  95. startHelper[$"{Module}.HeaterUnit"] = (ProcessUnitBase unit, RecipeStep step) => HeaterUnit_Start(unit, step);
  96. checkerHelper[$"{Module}.HeaterUnit"] = (ProcessUnitBase unit, RecipeStep step) => HeaterUnit_Check(unit, step);
  97. endHelper[$"{Module}.HeaterUnit"] = (ProcessUnitBase unit, RecipeStep step) => HeaterUnit_End(unit, step);
  98. startHelper[$"{Module}.RFBoxUnit"] = (ProcessUnitBase unit, RecipeStep step) => RFBoxUnit_Start(unit, step);
  99. checkerHelper[$"{Module}.RFBoxUnit"] = (ProcessUnitBase unit, RecipeStep step) => RFBoxUnit_Check(unit, step);
  100. endHelper[$"{Module}.RFBoxUnit"] = (ProcessUnitBase unit, RecipeStep step) => RFBoxUnit_End(unit, step);
  101. }
  102. private RState PressureByPressureModeUnit_Start(ProcessUnitBase unit, RecipeStep step)
  103. {
  104. var ProcessUnit = unit as PressureByPressureModeUnit;
  105. List<ToleranceObject> toleranceObjects = new List<ToleranceObject>();
  106. if (ProcessUnit.ToleranceMode != ToleranceMode.None)
  107. {
  108. toleranceObjects.Add(new ToleranceObject("Pressure", ProcessUnit.StartValue, ProcessUnit.StartValueWarningRange, ProcessUnit.StartValueAlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  109. _PressureToleranceChecker.Start(toleranceObjects);
  110. }
  111. if (ProcessUnit.PressureUnitMode == PressureUnitMode.Pressure)
  112. {
  113. if (Chamber.SetPVPressure(ProcessUnit.StartValue))
  114. {
  115. return RState.Running;
  116. }
  117. }
  118. else if (ProcessUnit.PressureUnitMode == PressureUnitMode.Valve)
  119. {
  120. if (Chamber.SetPVPostion(ProcessUnit.StartValue))
  121. {
  122. return RState.Running;
  123. }
  124. }
  125. return RState.Failed;
  126. }
  127. private RState PressureByPressureModeUnit_Check(ProcessUnitBase unit, RecipeStep step)
  128. {
  129. var ProcessUnit = unit as PressureByPressureModeUnit;
  130. if (ProcessUnit.EnableRamp)
  131. {
  132. if (ProcessUnit.PressureUnitMode == PressureUnitMode.Pressure)
  133. {
  134. if (Chamber.SetPVPressure(ProcessUnit.StartValue + (int)((ProcessUnit.TargetValue - ProcessUnit.StartValue) * step.RampFactor())))
  135. return RState.Running;
  136. else
  137. return RState.Failed;
  138. }
  139. else if (ProcessUnit.PressureUnitMode == PressureUnitMode.Valve)
  140. {
  141. if (Chamber.SetPVPostion(ProcessUnit.StartValue + (int)((ProcessUnit.TargetValue - ProcessUnit.StartValue) * step.RampFactor())))
  142. return RState.Running;
  143. else
  144. return RState.Failed;
  145. }
  146. }
  147. if (ProcessUnit.PressureUnitMode == PressureUnitMode.Pressure && ProcessUnit.ToleranceMode != ToleranceMode.None)
  148. {
  149. return _PressureToleranceChecker.Monitor(Chamber.PendulumPressure);
  150. }
  151. else if (ProcessUnit.PressureUnitMode == PressureUnitMode.Valve && ProcessUnit.ToleranceMode != ToleranceMode.None)
  152. {
  153. return _PressureToleranceChecker.Monitor(Chamber.PendulumPosition);
  154. }
  155. return RState.Running;
  156. }
  157. private void PressureByPressureModeUnit_End(ProcessUnitBase unit, RecipeStep step)
  158. {
  159. var ProcessUnit = unit as PressureByPressureModeUnit;
  160. if (ProcessUnit.ToleranceMode != ToleranceMode.None)
  161. {
  162. _PressureToleranceChecker.End();
  163. }
  164. }
  165. private RState TCPUnit_Start(ProcessUnitBase unit, RecipeStep step)
  166. {
  167. _isEnableMatchC1C2Offset = SC.GetValue<bool>($"{Module}.Match.EnableC1C2StepOffset");
  168. _matchC1C2OffsetValue = SC.GetValue<int>($"{Module}.Match.C1C2StepOffsetValue");
  169. var ProcessUnit = unit as TCPUnit;
  170. List<ToleranceObject> toleranceObjects = new List<ToleranceObject>();
  171. if (ProcessUnit.ToleranceMode != ToleranceMode.None)
  172. {
  173. toleranceObjects.Add(new ToleranceObject("RF", ProcessUnit.RFPower, ProcessUnit.RFPowerWarningRange, ProcessUnit.RFPowerAlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  174. _RFToleranceChecker.Start(toleranceObjects);
  175. }
  176. float p1;
  177. float p2;
  178. if (ProcessUnit.C1 > 0)
  179. {
  180. p1 = ProcessUnit.C1;
  181. }
  182. else
  183. {
  184. p1 = ProcessUnit.AutoC1;
  185. }
  186. if (ProcessUnit.C2 > 0)
  187. {
  188. p2 = ProcessUnit.C2;
  189. }
  190. else
  191. {
  192. p2 = ProcessUnit.AutoC2;
  193. }
  194. if (_isEnableMatchC1C2Offset = false || Math.Abs(Chamber.RFMatchC1 - p1) > _matchC1C2OffsetValue || Math.Abs(Chamber.RFMatchC2 - p2) > _matchC1C2OffsetValue)
  195. {
  196. Chamber.SetMatchPosition(p1, p2);
  197. }
  198. if (ProcessUnit.RFPower > 5)
  199. {
  200. Chamber.GeneratorSetpower(ProcessUnit.RFPower);
  201. Chamber.GeneratorPowerOn(true);
  202. }
  203. else
  204. {
  205. Chamber.GeneratorSetpower(0);
  206. Chamber.GeneratorPowerOn(false);
  207. }
  208. if (ProcessUnit.MatchWorkMode == MatchWorkMode.Auto)
  209. {
  210. Chamber.SetMatchWorkMode(MatchWorkMode.Auto);
  211. }
  212. else if (ProcessUnit.MatchWorkMode == MatchWorkMode.Manual)
  213. {
  214. Chamber.SetMatchWorkMode(MatchWorkMode.Manual);
  215. }
  216. _scRFPowerAlarmTime = SC.GetValue<double>($"{Chamber.Name}.Rf.PowerAlarmTime");
  217. rfMatchC1.Clear();
  218. rfMatchC1.Clear();
  219. rfMatchC1C2Index = 0;
  220. return RState.Running;
  221. }
  222. private RState TCPUnit_Check(ProcessUnitBase unit, RecipeStep step)
  223. {
  224. var ProcessUnit = unit as TCPUnit;
  225. if (ProcessUnit.MaxReflectedPower > 0 && Chamber.ReflectPower > ProcessUnit.MaxReflectedPower && step.ElapsedTime() > _scRFPowerAlarmTime * 1000)
  226. {
  227. LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed, RF Reflect Power:{Chamber.ReflectPower} exceeds the Max Limit:{ProcessUnit.MaxReflectedPower}");
  228. return RState.Failed;
  229. }
  230. if (step.ElapsedTime() > m_RecipeHead.RFHoldTime * 1000)
  231. {
  232. Chamber.GeneratorSetpower(0);
  233. Chamber.GeneratorPowerOn(false);
  234. }
  235. if (step.ElapsedTime() > rfMatchC1C2Index * 1000)
  236. {
  237. rfMatchC1.Add(Chamber.RFMatchC1);
  238. rfMatchC2.Add(Chamber.RFMatchC2);
  239. rfMatchC1C2Index += 1;
  240. }
  241. if (ProcessUnit.ToleranceMode != ToleranceMode.None)
  242. {
  243. return _RFToleranceChecker.Monitor(Chamber.ForwardPower);
  244. }
  245. return RState.Running;
  246. }
  247. private void TCPUnit_End(ProcessUnitBase unit, RecipeStep step)
  248. {
  249. var ProcessUnit = unit as TCPUnit;
  250. if (rfMatchC1.Count >= 6)
  251. {
  252. float allValue = 0;
  253. for (int i = 4; i < rfMatchC1.Count; i++)
  254. {
  255. allValue += rfMatchC1[i];
  256. }
  257. var average = allValue / (rfMatchC1.Count - 4);
  258. ProcessUnit.AutoC1 = (int)average;
  259. }
  260. if (rfMatchC2.Count >= 6)
  261. {
  262. float allValue = 0;
  263. for (int i = 4; i < rfMatchC2.Count; i++)
  264. {
  265. allValue += rfMatchC2[i];
  266. }
  267. var average = allValue / (rfMatchC2.Count - 4);
  268. ProcessUnit.AutoC2 = (int)average;
  269. }
  270. rfMatchC1.Clear();
  271. rfMatchC2.Clear();
  272. if (ProcessUnit.ToleranceMode != ToleranceMode.None)
  273. {
  274. _RFToleranceChecker.End();
  275. }
  276. }
  277. private RState BiasUnit_Start(ProcessUnitBase unit, RecipeStep step)
  278. {
  279. _isEnableBiasMatchC1C2Offset = SC.GetValue<bool>($"{Module}.BiasMatch.EnableC1C2StepOffset");
  280. _biasMatchC1C2OffsetValue = SC.GetValue<int>($"{Module}.BiasMatch.C1C2StepOffsetValue");
  281. var ProcessUnit = unit as BiasUnit;
  282. float p1;
  283. float p2;
  284. if (ProcessUnit.BiasC1 > 0)
  285. {
  286. p1 = ProcessUnit.BiasC1;
  287. }
  288. else
  289. {
  290. p1 = ProcessUnit.AutoBiasC1;
  291. }
  292. if (ProcessUnit.BiasC2 > 0)
  293. {
  294. p2 = ProcessUnit.BiasC2;
  295. }
  296. else
  297. {
  298. p2 = ProcessUnit.AutoBiasC2;
  299. }
  300. if (_isEnableBiasMatchC1C2Offset == false || Math.Abs(Chamber.BiasRFMatchC1 - p1) > _biasMatchC1C2OffsetValue || Math.Abs(Chamber.BiasRFMatchC2 - p2) > _biasMatchC1C2OffsetValue)
  301. {
  302. Chamber.SetBiasMatchPosition(p1, p2);
  303. }
  304. if (ProcessUnit.BiasRFPower > 5)
  305. {
  306. Chamber.GeneratorBiasPowerOn(true);
  307. if ((ProcessUnit.EnableRamp == false))
  308. {
  309. Chamber.GeneratorBiasSetpower(ProcessUnit.BiasRFPower);
  310. }
  311. }
  312. else
  313. {
  314. Chamber.GeneratorBiasPowerOn(false);
  315. Chamber.GeneratorBiasSetpower(0);
  316. }
  317. if (ProcessUnit.BiasMatchWorkMode == MatchWorkMode.Auto)
  318. {
  319. Chamber.SetBiasMatchWorkMode(MatchWorkMode.Auto);
  320. }
  321. else if (ProcessUnit.BiasMatchWorkMode == MatchWorkMode.Manual)
  322. {
  323. Chamber.SetBiasMatchWorkMode(MatchWorkMode.Manual);
  324. }
  325. if (ProcessUnit.BiasGeneratorMode == GeneratorMode.Pulsing)
  326. {
  327. Chamber.SetBiasPulseMode(true);
  328. Chamber.SetBiasPulseRateFreq(ProcessUnit.PulseRateFreq);
  329. Chamber.SetDiasPulseDutyCycle(ProcessUnit.PulseDutyCycle);
  330. }
  331. else
  332. {
  333. Chamber.SetBiasPulseMode(false);
  334. }
  335. _scBiasRFPowerAlarmTime = SC.GetValue<double>($"{Chamber.Name}.BiasRf.PowerAlarmTime");
  336. biasRfMatchC1.Clear();
  337. biasRfMatchC1.Clear();
  338. biasRfMatchC1C2Index = 0;
  339. biasRFSetPointFlag = true;
  340. return RState.Running;
  341. }
  342. private RState BiasUnit_Check(ProcessUnitBase unit, RecipeStep step)
  343. {
  344. //var _scPowerAlarmTime = SC.GetValue<double>($"{Chamber.Name}.BiasRf.PowerAlarmTime");
  345. var ProcessUnit = unit as BiasUnit;
  346. if (ProcessUnit.BiasMaxReflectedPower > 0 && Chamber.BiasReflectPower > ProcessUnit.BiasMaxReflectedPower && step.ElapsedTime() > _scBiasRFPowerAlarmTime * 1000)
  347. {
  348. LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed, Bias Reflect Power:{Chamber.BiasReflectPower} exceeds the Max Limit:{ProcessUnit.BiasMaxReflectedPower}");
  349. return RState.Failed;
  350. }
  351. if (step.ElapsedTime() > m_RecipeHead.BiasRFHoldTime * 1000)
  352. {
  353. Chamber.GeneratorBiasSetpower(0);
  354. Chamber.GeneratorBiasPowerOn(false);
  355. }
  356. if (step.ElapsedTime() > biasRfMatchC1C2Index * 1000)
  357. {
  358. biasRfMatchC1.Add(Chamber.BiasRFMatchC1);
  359. biasRfMatchC2.Add(Chamber.BiasRFMatchC2);
  360. biasRfMatchC1C2Index += 1;
  361. }
  362. if (ProcessUnit.EnableRamp)
  363. {
  364. //if (step.ElapsedTime() <= 500*cycleIndex)
  365. //{
  366. // return RState.Running;
  367. //}
  368. //cycleIndex += 1;
  369. if (ProcessUnit.TargetMode == TargetMode.Cycle)
  370. {
  371. if (biasRFSetPointFlag == true)
  372. {
  373. biasRFSetPointFlag = false;
  374. Chamber.GeneratorBiasSetpower((float)((ProcessUnit.BiasRFPower + (float)((float)(ProcessUnit.TargetBiasRFPower - ProcessUnit.BiasRFPower) / ((float)(loopsteps - 1) / (float)(currentStepIndex))))));
  375. }
  376. //float rampFactor = (float)currentStepIndex / (float)(loopsteps-1);
  377. //double rampFactor = step.RampFactor();
  378. //Chamber.GeneratorBiasSetpower((float)((ProcessUnit.BiasRFPower+ (ProcessUnit.TargetBiasRFPower - ProcessUnit.BiasRFPower)/(loopsteps)*currentStepIndex) + ((double)(ProcessUnit.TargetBiasRFPower - ProcessUnit.BiasRFPower) / ((double)loopsteps)) * rampFactor));
  379. }
  380. else
  381. {
  382. //double rampFactor = step.RampFactor();
  383. //Chamber.GeneratorBiasSetpower((float)(ProcessUnit.BiasRFPower + (ProcessUnit.TargetBiasRFPower - ProcessUnit.BiasRFPower) * rampFactor));
  384. }
  385. }
  386. return RState.Running;
  387. }
  388. private void BiasUnit_End(ProcessUnitBase unit, RecipeStep step)
  389. {
  390. var ProcessUnit = unit as BiasUnit;
  391. //Chamber.GeneratorBiasSetpower(0);
  392. //Chamber.GeneratorBiasPowerOn(false);
  393. if (biasRfMatchC1.Count >= 6)
  394. {
  395. float allValue = 0;
  396. for (int i = 4; i < biasRfMatchC1.Count; i++)
  397. {
  398. allValue += biasRfMatchC1[i];
  399. }
  400. var average = allValue / (biasRfMatchC1.Count - 4);
  401. ProcessUnit.AutoBiasC1 = (int)average;
  402. }
  403. if (biasRfMatchC2.Count >= 6)
  404. {
  405. float allValue = 0;
  406. for (int i = 4; i < biasRfMatchC2.Count; i++)
  407. {
  408. allValue += biasRfMatchC2[i];
  409. }
  410. var average = allValue / (biasRfMatchC2.Count - 4);
  411. ProcessUnit.AutoBiasC2 = (int)average;
  412. }
  413. biasRfMatchC1.Clear();
  414. biasRfMatchC1.Clear();
  415. biasRfMatchC1C2Index = 0;
  416. //cycleIndex = 0;
  417. biasRFSetPointFlag = true;
  418. }
  419. private RState GasControlUnit_Start(ProcessUnitBase unit, RecipeStep step)
  420. {
  421. Chamber.OpenValve(ValveType.GasFinal, true);
  422. var ProcessUnit = unit as GasControlUnit;
  423. if (ProcessUnit.Gas1 >= 1)
  424. {
  425. Chamber.FlowGas(0, ProcessUnit.Gas1);
  426. }
  427. else
  428. {
  429. Chamber.FlowGas(0, 0);
  430. }
  431. if (ProcessUnit.Gas2 >= 1)
  432. {
  433. Chamber.FlowGas(1, ProcessUnit.Gas2);
  434. }
  435. else
  436. {
  437. Chamber.FlowGas(1, 0);
  438. }
  439. if (ProcessUnit.Gas3 >= 1)
  440. {
  441. Chamber.FlowGas(2, ProcessUnit.Gas3);
  442. }
  443. else
  444. {
  445. Chamber.FlowGas(2, 0);
  446. }
  447. if (ProcessUnit.Gas4 >= 1)
  448. {
  449. Chamber.FlowGas(3, ProcessUnit.Gas4);
  450. }
  451. else
  452. {
  453. Chamber.FlowGas(3, 0);
  454. }
  455. if (ProcessUnit.Gas5 >= 1)
  456. {
  457. Chamber.FlowGas(4, ProcessUnit.Gas5);
  458. }
  459. else
  460. {
  461. Chamber.FlowGas(4, 0);
  462. }
  463. if (ProcessUnit.Gas6 >= 1)
  464. {
  465. Chamber.FlowGas(5, ProcessUnit.Gas6);
  466. }
  467. else
  468. {
  469. Chamber.FlowGas(5, 0);
  470. }
  471. if (ProcessUnit.Gas7 >= 1)
  472. {
  473. Chamber.FlowGas(6, ProcessUnit.Gas7);
  474. }
  475. else
  476. {
  477. Chamber.FlowGas(6, 0);
  478. }
  479. if (ProcessUnit.Gas8 >= 1)
  480. {
  481. Chamber.FlowGas(7, ProcessUnit.Gas8);
  482. }
  483. else
  484. {
  485. Chamber.FlowGas(7, 0);
  486. }
  487. if (ProcessUnit.ToleranceMode != ToleranceMode.None)
  488. {
  489. List<ToleranceObject> toleranceObjects = new List<ToleranceObject>();
  490. toleranceObjects.Add(new ToleranceObject("Gas1", ProcessUnit.Gas1, ProcessUnit.Gas1WarningRange, ProcessUnit.Gas1AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  491. toleranceObjects.Add(new ToleranceObject("Gas2", ProcessUnit.Gas2, ProcessUnit.Gas2WarningRange, ProcessUnit.Gas2AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  492. toleranceObjects.Add(new ToleranceObject("Gas3", ProcessUnit.Gas3, ProcessUnit.Gas3WarningRange, ProcessUnit.Gas3AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  493. toleranceObjects.Add(new ToleranceObject("Gas4", ProcessUnit.Gas4, ProcessUnit.Gas4WarningRange, ProcessUnit.Gas4AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  494. toleranceObjects.Add(new ToleranceObject("Gas5", ProcessUnit.Gas5, ProcessUnit.Gas5WarningRange, ProcessUnit.Gas5AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  495. toleranceObjects.Add(new ToleranceObject("Gas6", ProcessUnit.Gas6, ProcessUnit.Gas6WarningRange, ProcessUnit.Gas6AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  496. toleranceObjects.Add(new ToleranceObject("Gas7", ProcessUnit.Gas7, ProcessUnit.Gas7WarningRange, ProcessUnit.Gas7AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  497. toleranceObjects.Add(new ToleranceObject("Gas8", ProcessUnit.Gas8, ProcessUnit.Gas8WarningRange, ProcessUnit.Gas8AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  498. _GasFlowToleranceChecker.Start(toleranceObjects);
  499. }
  500. return RState.Running;
  501. }
  502. private RState GasControlUnit_Check(ProcessUnitBase unit, RecipeStep step)
  503. {
  504. var ProcessUnit = unit as GasControlUnit;
  505. if (ProcessUnit.EnableRamp)
  506. {
  507. double rampFactor = step.RampFactor();
  508. Chamber.FlowGas(0, ProcessUnit.Gas1 + (ProcessUnit.Gas1Target - ProcessUnit.Gas1) * rampFactor);
  509. Chamber.FlowGas(1, ProcessUnit.Gas2 + (ProcessUnit.Gas2Target - ProcessUnit.Gas2) * rampFactor);
  510. Chamber.FlowGas(2, ProcessUnit.Gas3 + (ProcessUnit.Gas3Target - ProcessUnit.Gas3) * rampFactor);
  511. Chamber.FlowGas(3, ProcessUnit.Gas4 + (ProcessUnit.Gas4Target - ProcessUnit.Gas4) * rampFactor);
  512. Chamber.FlowGas(4, ProcessUnit.Gas5 + (ProcessUnit.Gas5Target - ProcessUnit.Gas5) * rampFactor);
  513. Chamber.FlowGas(5, ProcessUnit.Gas6 + (ProcessUnit.Gas6Target - ProcessUnit.Gas6) * rampFactor);
  514. Chamber.FlowGas(6, ProcessUnit.Gas7 + (ProcessUnit.Gas7Target - ProcessUnit.Gas7) * rampFactor);
  515. Chamber.FlowGas(7, ProcessUnit.Gas8 + (ProcessUnit.Gas8Target - ProcessUnit.Gas8) * rampFactor);
  516. }
  517. if (ProcessUnit.ToleranceMode != ToleranceMode.None)
  518. {
  519. return _GasFlowToleranceChecker.Monitor(Chamber.MFC1FeedBack, Chamber.MFC2FeedBack, Chamber.MFC3FeedBack, Chamber.MFC4FeedBack, Chamber.MFC5FeedBack, Chamber.MFC6FeedBack, Chamber.MFC7FeedBack, Chamber.MFC8FeedBack);
  520. }
  521. return RState.Running;
  522. }
  523. private void GasControlUnit_End(ProcessUnitBase unit, RecipeStep step)
  524. {
  525. var ProcessUnit = unit as GasControlUnit;
  526. if (ProcessUnit.ToleranceMode != ToleranceMode.None)
  527. {
  528. _GasFlowToleranceChecker.End();
  529. }
  530. }
  531. private RState Kepler2200GasControlUnit_Start(ProcessUnitBase unit, RecipeStep step)
  532. {
  533. List<ToleranceObject> toleranceObjects = new List<ToleranceObject>();
  534. Chamber.OpenValve(ValveType.GasFinal, true);
  535. var ProcessUnit = unit as Kepler2200GasControlUnit;
  536. if (ProcessUnit.Gas1 >= 1)
  537. {
  538. Chamber.FlowGas(0, ProcessUnit.Gas1);
  539. }
  540. else
  541. {
  542. Chamber.FlowGas(0, 0);
  543. }
  544. if (ProcessUnit.Gas2 >= 1)
  545. {
  546. Chamber.FlowGas(1, ProcessUnit.Gas2);
  547. }
  548. else
  549. {
  550. Chamber.FlowGas(1, 0);
  551. }
  552. if (ProcessUnit.Gas3 >= 1)
  553. {
  554. Chamber.FlowGas(2, ProcessUnit.Gas3);
  555. }
  556. else
  557. {
  558. Chamber.FlowGas(2, 0);
  559. }
  560. if (ProcessUnit.Gas4 >= 1)
  561. {
  562. Chamber.FlowGas(3, ProcessUnit.Gas4);
  563. }
  564. else
  565. {
  566. Chamber.FlowGas(3, 0);
  567. }
  568. if (ProcessUnit.Gas5 >= 1)
  569. {
  570. Chamber.FlowGas(4, ProcessUnit.Gas5);
  571. }
  572. else
  573. {
  574. Chamber.FlowGas(4, 0);
  575. }
  576. if (ProcessUnit.Gas6 >= 1)
  577. {
  578. Chamber.FlowGas(5, ProcessUnit.Gas6);
  579. }
  580. else
  581. {
  582. Chamber.FlowGas(5, 0);
  583. }
  584. if (ProcessUnit.ToleranceMode != ToleranceMode.None)
  585. {
  586. toleranceObjects.Add(new ToleranceObject("Gas1", ProcessUnit.Gas1, ProcessUnit.Gas1WarningRange, ProcessUnit.Gas1AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  587. toleranceObjects.Add(new ToleranceObject("Gas2", ProcessUnit.Gas2, ProcessUnit.Gas2WarningRange, ProcessUnit.Gas2AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  588. toleranceObjects.Add(new ToleranceObject("Gas3", ProcessUnit.Gas3, ProcessUnit.Gas3WarningRange, ProcessUnit.Gas3AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  589. toleranceObjects.Add(new ToleranceObject("Gas4", ProcessUnit.Gas4, ProcessUnit.Gas4WarningRange, ProcessUnit.Gas4AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  590. toleranceObjects.Add(new ToleranceObject("Gas5", ProcessUnit.Gas5, ProcessUnit.Gas5WarningRange, ProcessUnit.Gas5AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  591. toleranceObjects.Add(new ToleranceObject("Gas6", ProcessUnit.Gas6, ProcessUnit.Gas6WarningRange, ProcessUnit.Gas6AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  592. _GasFlowToleranceChecker.Start(toleranceObjects);
  593. }
  594. return RState.Running;
  595. }
  596. private RState Kepler2200GasControlUnit_Check(ProcessUnitBase unit, RecipeStep step)
  597. {
  598. var ProcessUnit = unit as Kepler2200GasControlUnit;
  599. if (ProcessUnit.ToleranceMode != ToleranceMode.None)
  600. {
  601. return _GasFlowToleranceChecker.Monitor(Chamber.MFC1FeedBack, Chamber.MFC2FeedBack, Chamber.MFC3FeedBack, Chamber.MFC4FeedBack, Chamber.MFC5FeedBack, Chamber.MFC6FeedBack);
  602. }
  603. return RState.Running;
  604. }
  605. private void Kepler2200GasControlUnit_End(ProcessUnitBase unit, RecipeStep step)
  606. {
  607. var ProcessUnit = unit as Kepler2200GasControlUnit;
  608. if (ProcessUnit.ToleranceMode != ToleranceMode.None)
  609. {
  610. _GasFlowToleranceChecker.End();
  611. }
  612. }
  613. private RState VenusSEGasControlUnit_Start(ProcessUnitBase unit, RecipeStep step)
  614. {
  615. Chamber.OpenValve(ValveType.GasFinal, true);
  616. var ProcessUnit = unit as VenusSEGasControlUnit;
  617. Chamber.FlowGas(0, ProcessUnit.Gas1);
  618. if (ProcessUnit.Gas1 >= 1)
  619. {
  620. Chamber.OpenValve(ValveType.PV11, true);
  621. }
  622. Chamber.FlowGas(1, ProcessUnit.Gas2);
  623. if (ProcessUnit.Gas2 >= 1)
  624. {
  625. Chamber.OpenValve(ValveType.PV21, true);
  626. }
  627. Chamber.FlowGas(2, ProcessUnit.Gas3);
  628. if (ProcessUnit.Gas3 >= 1)
  629. {
  630. Chamber.OpenValve(ValveType.PV31, true);
  631. }
  632. Chamber.FlowGas(3, ProcessUnit.Gas4);
  633. if (ProcessUnit.Gas4 >= 1)
  634. {
  635. Chamber.OpenValve(ValveType.PV41, true);
  636. }
  637. Chamber.FlowGas(4, ProcessUnit.Gas5);
  638. if (ProcessUnit.Gas5 >= 1)
  639. {
  640. Chamber.OpenValve(ValveType.PV51, true);
  641. }
  642. Chamber.FlowGas(5, ProcessUnit.Gas6);
  643. if (ProcessUnit.Gas6 >= 1)
  644. {
  645. Chamber.OpenValve(ValveType.PV61, true);
  646. }
  647. Chamber.FlowGas(6, ProcessUnit.Gas7);
  648. if (ProcessUnit.Gas7 >= 1)
  649. {
  650. Chamber.OpenValve(ValveType.PV71, true);
  651. }
  652. Chamber.FlowGas(7, ProcessUnit.Gas8);
  653. if (ProcessUnit.Gas8 >= 1)
  654. {
  655. Chamber.OpenValve(ValveType.PV81, true);
  656. }
  657. Chamber.FlowGas(8, ProcessUnit.Gas9);
  658. if (ProcessUnit.Gas9 >= 1)
  659. {
  660. Chamber.OpenValve(ValveType.PV91, true);
  661. }
  662. Chamber.FlowGas(9, ProcessUnit.Gas10);
  663. if (ProcessUnit.Gas10 >= 1)
  664. {
  665. Chamber.OpenValve(ValveType.PVA1, true);
  666. }
  667. Chamber.FlowGas(10, ProcessUnit.Gas11);
  668. if (ProcessUnit.Gas11 >= 1)
  669. {
  670. Chamber.OpenValve(ValveType.PVB1, true);
  671. }
  672. Chamber.FlowGas(11, ProcessUnit.Gas12);
  673. if (ProcessUnit.Gas12 >= 1)
  674. {
  675. Chamber.OpenValve(ValveType.PVC1, true);
  676. }
  677. if (ProcessUnit.ToleranceMode != ToleranceMode.None)
  678. {
  679. List<ToleranceObject> toleranceObjects = new List<ToleranceObject>();
  680. toleranceObjects.Add(new ToleranceObject("Gas1", ProcessUnit.Gas1, ProcessUnit.Gas1WarningRange, ProcessUnit.Gas1AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  681. toleranceObjects.Add(new ToleranceObject("Gas2", ProcessUnit.Gas2, ProcessUnit.Gas2WarningRange, ProcessUnit.Gas2AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  682. toleranceObjects.Add(new ToleranceObject("Gas3", ProcessUnit.Gas3, ProcessUnit.Gas3WarningRange, ProcessUnit.Gas3AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  683. toleranceObjects.Add(new ToleranceObject("Gas4", ProcessUnit.Gas4, ProcessUnit.Gas4WarningRange, ProcessUnit.Gas4AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  684. toleranceObjects.Add(new ToleranceObject("Gas5", ProcessUnit.Gas5, ProcessUnit.Gas5WarningRange, ProcessUnit.Gas5AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  685. toleranceObjects.Add(new ToleranceObject("Gas6", ProcessUnit.Gas6, ProcessUnit.Gas6WarningRange, ProcessUnit.Gas6AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  686. toleranceObjects.Add(new ToleranceObject("Gas7", ProcessUnit.Gas7, ProcessUnit.Gas7WarningRange, ProcessUnit.Gas7AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  687. toleranceObjects.Add(new ToleranceObject("Gas8", ProcessUnit.Gas8, ProcessUnit.Gas8WarningRange, ProcessUnit.Gas8AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  688. toleranceObjects.Add(new ToleranceObject("Gas9", ProcessUnit.Gas9, ProcessUnit.Gas9WarningRange, ProcessUnit.Gas9AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  689. toleranceObjects.Add(new ToleranceObject("Gas10", ProcessUnit.Gas10, ProcessUnit.Gas10WarningRange, ProcessUnit.Gas10AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  690. toleranceObjects.Add(new ToleranceObject("Gas11", ProcessUnit.Gas11, ProcessUnit.Gas11WarningRange, ProcessUnit.Gas11AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  691. toleranceObjects.Add(new ToleranceObject("Gas12", ProcessUnit.Gas12, ProcessUnit.Gas12WarningRange, ProcessUnit.Gas12AlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  692. _GasFlowToleranceChecker.Start(toleranceObjects);
  693. }
  694. return RState.Running;
  695. }
  696. private RState VenusSEGasControlUnit_Check(ProcessUnitBase unit, RecipeStep step)
  697. {
  698. var ProcessUnit = unit as VenusSEGasControlUnit;
  699. if (ProcessUnit.ToleranceMode != ToleranceMode.None)
  700. {
  701. return _GasFlowToleranceChecker.Monitor(Chamber.MFC1FeedBack, Chamber.MFC2FeedBack, Chamber.MFC3FeedBack, Chamber.MFC4FeedBack, Chamber.MFC5FeedBack, Chamber.MFC6FeedBack, Chamber.MFC7FeedBack, Chamber.MFC8FeedBack, Chamber.MFC9FeedBack, Chamber.MFC10FeedBack, Chamber.MFC11FeedBack, Chamber.MFC12FeedBack);
  702. }
  703. return RState.Running;
  704. }
  705. private void VenusSEGasControlUnit_End(ProcessUnitBase unit, RecipeStep step)
  706. {
  707. Chamber.FlowGas(0, 0);
  708. Chamber.FlowGas(1, 0);
  709. Chamber.FlowGas(2, 0);
  710. Chamber.FlowGas(3, 0);
  711. Chamber.FlowGas(4, 0);
  712. Chamber.FlowGas(5, 0);
  713. Chamber.FlowGas(6, 0);
  714. Chamber.FlowGas(7, 0);
  715. Chamber.FlowGas(8, 0);
  716. Chamber.FlowGas(9, 0);
  717. Chamber.FlowGas(10, 0);
  718. Chamber.FlowGas(11, 0);
  719. Chamber.FlowGas(12, 0);
  720. var ProcessUnit = unit as VenusSEGasControlUnit;
  721. if (ProcessUnit.ToleranceMode != ToleranceMode.None)
  722. {
  723. _GasFlowToleranceChecker.End();
  724. }
  725. }
  726. private RState ESCHVUnit_Start(ProcessUnitBase unit, RecipeStep step)
  727. {
  728. var ProcessUnit = unit as ESCHVUnit;
  729. if (ProcessUnit.ESCClampValtage > 0)
  730. {
  731. Chamber.SetESCClampVoltage(ProcessUnit.ESCClampValtage);
  732. }
  733. else
  734. {
  735. Chamber.SetESCClampVoltage(0);
  736. }
  737. Chamber.SetBacksideHePressure(ProcessUnit.BacksideHelium);
  738. List<ToleranceObject> toleranceObjects = new List<ToleranceObject>();
  739. if (ProcessUnit.ToleranceMode != ToleranceMode.None)
  740. {
  741. toleranceObjects.Add(new ToleranceObject("BacksideHelium", ProcessUnit.BacksideHelium, ProcessUnit.HeliumWarningRange, ProcessUnit.HeliumAlarmRange, ProcessUnit.ToleranceDelayTime, ProcessUnit.ToleranceMode));
  742. _HeliumToleranceChecker.Start(toleranceObjects);
  743. }
  744. return RState.Running;
  745. }
  746. private RState ESCHVUnit_Check(ProcessUnitBase unit, RecipeStep step)
  747. {
  748. var ProcessUnit = unit as ESCHVUnit;
  749. //if (Chamber.BackSideHeOutOfRange && step.ElapsedTime() > ProcessUnit.CheckDelay)
  750. //{
  751. // LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed, Backside Helium out of range.");
  752. // return RState.Failed;
  753. //}
  754. if (ProcessUnit.ToleranceMode != ToleranceMode.None)
  755. {
  756. return _HeliumToleranceChecker.Monitor(Chamber.HeliumFeedBack);
  757. }
  758. return RState.Running;
  759. }
  760. private void ESCHVUnit_End(ProcessUnitBase unit, RecipeStep step)
  761. {
  762. //Chamber.SetESCClampVoltage(0);
  763. //Chamber.SetBacksideHeThreshold(0, 0);
  764. var ProcessUnit = unit as ESCHVUnit;
  765. if (ProcessUnit.ToleranceMode != ToleranceMode.None)
  766. {
  767. _HeliumToleranceChecker.End();
  768. }
  769. }
  770. private RState ProcessKitUnit_Start(ProcessUnitBase unit, RecipeStep step)
  771. {
  772. var ProcessUnit = unit as ProcessKitUnit;
  773. if (Chamber.SetLiftPin(ProcessUnit.LiftPinPostion, out string reason))
  774. {
  775. return RState.Running;
  776. }
  777. else
  778. {
  779. LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed. Target Position:{ProcessUnit.LiftPinPostion}");
  780. return RState.Failed;
  781. }
  782. }
  783. private RState ProcessKitUnit_Check(ProcessUnitBase unit, RecipeStep step)
  784. {
  785. var ProcessUnit = unit as ProcessKitUnit;
  786. return RState.Running;
  787. }
  788. private void ProcessKitUnit_End(ProcessUnitBase unit, RecipeStep step)
  789. {
  790. }
  791. private RState RFBoxUnit_Start(ProcessUnitBase unit, RecipeStep step)
  792. {
  793. var ProcessUnit = unit as RFBoxUnit;
  794. if (Chamber.SetRFBoxC1Position(ProcessUnit.C1))
  795. {
  796. return RState.Running;
  797. }
  798. else
  799. {
  800. LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} failed duo to RFBox Write C1 failed ");
  801. return RState.Failed;
  802. }
  803. }
  804. private RState RFBoxUnit_Check(ProcessUnitBase unit, RecipeStep step)
  805. {
  806. return RState.Running;
  807. }
  808. private void RFBoxUnit_End(ProcessUnitBase unit, RecipeStep step)
  809. {
  810. }
  811. private RState HeaterUnit_Start(ProcessUnitBase unit, RecipeStep step)
  812. {
  813. var ProcessUnit = unit as HeaterUnit;
  814. var position = (HighTemperatureHeaterPosition)Enum.Parse(typeof(HighTemperatureHeaterPosition), ProcessUnit.SuspectPosition.ToString());
  815. Chamber.HighTemperatureHeaterGotoPosition(position);
  816. if (ProcessUnit.HeaterTemp > 0)
  817. {
  818. Chamber.SetHighTemperatureHeaterTemperature(ProcessUnit.HeaterTemp);
  819. }
  820. Chamber.SetHighTemperatureHeaterRatio(ProcessUnit.HeaterRatio);
  821. return RState.Running;
  822. }
  823. private RState HeaterUnit_Check(ProcessUnitBase unit, RecipeStep step)
  824. {
  825. return RState.Running;
  826. }
  827. private void HeaterUnit_End(ProcessUnitBase unit, RecipeStep step)
  828. {
  829. }
  830. public bool LoadMethods(ProcessUnitBase unit)
  831. {
  832. var className = $"{Module}.{unit.GetType().Name}";
  833. if (startHelper.ContainsKey(className) && checkerHelper.ContainsKey(className) && endHelper.ContainsKey(className))
  834. {
  835. unit.starter = startHelper[className];
  836. unit.checker = checkerHelper[className];
  837. unit.end = endHelper[className];
  838. return true;
  839. }
  840. return false;
  841. }
  842. //public void loopStep(bool isloop,int loopCount,int loopIndex)
  843. //{
  844. // isLoop = isloop;
  845. // loopsteps=loopCount;
  846. // currentStepIndex = loopIndex;
  847. //}
  848. private RState stepStarter(RecipeStep step)
  849. {
  850. step.StartStepTimer();
  851. //switch (step.Type)
  852. //{
  853. // case StepType.EndPoint:
  854. // Chamber.EPDStepStart(step.EPDConfig, step.StepNo);
  855. // break;
  856. //}
  857. if (_isInstalledEPD)
  858. {
  859. Chamber.EPDStepStart(step.EPDConfig, step.StepNo);
  860. if (step.Type == StepType.EndPoint)
  861. {
  862. _lastEPDStepTimeStopwatch.Restart();
  863. }
  864. }
  865. return RState.Running;
  866. }
  867. private RState stepChecker(RecipeStep step)
  868. {
  869. switch (step.Type)
  870. {
  871. case StepType.Time:
  872. return step.ElapsedTime() >= step.Time * 1000 ? RState.End : RState.Running;
  873. case StepType.OverEtch:
  874. var time = _lastEPDStepTimeStopwatch.ElapsedMilliseconds;
  875. return step.ElapsedTime() >= (time * step.OverEtchPercent / 100) ? RState.End : RState.Running;
  876. case StepType.EndPoint:
  877. if (step.ElapsedTime() > step.MaxEndPointTime * 1000)
  878. {
  879. LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} timeout, did not capture endpoint signal in {step.MaxEndPointTime} seconds");
  880. return RState.Failed;
  881. }
  882. else
  883. {
  884. if (Chamber.EPDCaptured)
  885. {
  886. if (step.ElapsedTime() < step.MinEndPointTime * 1000)
  887. {
  888. LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} timeout, capture endpoint signal less than {step.MinEndPointTime} seconds");
  889. return RState.Failed;
  890. }
  891. else
  892. {
  893. return RState.End;
  894. }
  895. }
  896. else
  897. {
  898. return RState.Running;
  899. }
  900. //return Chamber.EPDCaptured ? RState.End : RState.Running;
  901. }
  902. case StepType.Stable:
  903. if (step.ElapsedTime() >= step.Time * 1000)
  904. {
  905. LOG.Write(eEvent.ERR_PROCESS, Chamber.Module, $"Step:{step.StepNo} timeout, did not Stable in {step.Time} seconds");
  906. return RState.Failed;
  907. }
  908. else
  909. {
  910. if (_GasFlowToleranceChecker.IsStable && _PressureToleranceChecker.IsStable && _HeliumToleranceChecker.IsStable)
  911. {
  912. return RState.End;
  913. }
  914. }
  915. return RState.Running;
  916. }
  917. return RState.Running;
  918. }
  919. private RState stepEnder(RecipeStep step)
  920. {
  921. //if (step.Type == StepType.EndPoint)
  922. //{
  923. // Chamber.EPDStepStop();
  924. //}
  925. if (_isInstalledEPD)
  926. {
  927. Chamber.EPDStepStop();
  928. if (step.Type == StepType.EndPoint)
  929. {
  930. _lastEPDStepTimeStopwatch.Stop();
  931. }
  932. }
  933. return RState.End;
  934. }
  935. public bool LoadStepFuns(RecipeStep step)
  936. {
  937. step.starter = stepStarter;
  938. step.checker = stepChecker;
  939. step.ender = stepEnder;
  940. return true;
  941. }
  942. }
  943. }