zhouhr dd99f38e54 change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE hai 1 ano
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EventDefine.cs a5245356d0 source files %!s(int64=3) %!d(string=hai) anos
Fdc.cs d33079596b 1.优化新版跑片动画 hai 1 ano
GasBoxLeakCheckRoutine.cs d95b8c7876 cancel Open PVN22 in SE,DE && add VenusVentRoutine && fix the bug in GasBoxLeakCheck && Change Logic in pumpdown&Vent in SE,DE hai 1 ano
GasFlowRoutine.cs c332b95d39 venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function hai 1 ano
LLPickRoutine.cs ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug hai 1 ano
LLPlaceRoutine.cs ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug hai 1 ano
LoadLockLeakCheckRoutine.cs ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug hai 1 ano
LoadLockPumpRoutine.cs ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug hai 1 ano
LoadLockPurgeRoutine.cs ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug hai 1 ano
LoadLockVentRoutine.cs ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug hai 1 ano
PMEntity.cs 4b1a37ee73 fix bugs hai 1 ano
PMGasVerificationRoutine.cs e2836bfbda 1.Chamber DE process enhance hai 1 ano
PMGaslinePurgeRoutine.cs 03063bae6a Enhance the routine framework. %!s(int64=2) %!d(string=hai) anos
PMHeatRoutine.cs c8af7de363 将kepler与Venus UI配置分开,添加Heat Routine hai 1 ano
PMHomeRoutine.cs 3fb3984bd3 1.添加 Heater 伺服到位信号,手臂进腔前check hai 1 ano
PMLeakCheckRoutine.cs 9de8ce9b11 Venus SE UI &&Venus DE pump,purge,start turbo routine update hai 1 ano
PMPartialPressureRoutine.cs 945ce3c74c 1.Venus SE DE Add PressureControl hai 1 ano
PMProcessRoutine.cs 3fb3984bd3 1.添加 Heater 伺服到位信号,手臂进腔前check hai 1 ano
PMProcess_FA.cs 774c804aa9 fixed pm event occurs carrierid is null hai 1 ano
PMPurgeRoutine.cs 9de8ce9b11 Venus SE UI &&Venus DE pump,purge,start turbo routine update hai 1 ano
PMRoutineBase.cs 945ce3c74c 1.Venus SE DE Add PressureControl hai 1 ano
PMVATPerformanceRoutine.cs 945ce3c74c 1.Venus SE DE Add PressureControl hai 1 ano
Process.cs 3cad102221 更新 RT %!s(int64=3) %!d(string=hai) anos
ProcessDefine.cs 3fb3984bd3 1.添加 Heater 伺服到位信号,手臂进腔前check hai 1 ano
PumpDownRoutine.cs a4f8a29122 1.Kepler2200 Gas 改造,六路变八路 hai 1 ano
RFPowerSwitchRoutine.cs 03063bae6a Enhance the routine framework. %!s(int64=2) %!d(string=hai) anos
StartDryPumpRoutine.cs 03063bae6a Enhance the routine framework. %!s(int64=2) %!d(string=hai) anos
StartTurboPumpRoutine.cs 9de8ce9b11 Venus SE UI &&Venus DE pump,purge,start turbo routine update hai 1 ano
VentRoutine.cs a4f8a29122 1.Kepler2200 Gas 改造,六路变八路 hai 1 ano
VenusRecipeFileContext.cs 7d93bf0076 Job Clean function, not finished. %!s(int64=2) %!d(string=hai) anos
VenusSequenceFileContext.cs dd99f38e54 change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE hai 1 ano
VenusVentRoutine.cs 0a2d5ac547 Venus DE TM simulator add hai 1 ano
VirgoRecipeFileContext.cs 896c7407de 优化log功能 %!s(int64=3) %!d(string=hai) anos
VirgoSequenceFileContext.cs 896c7407de 优化log功能 %!s(int64=3) %!d(string=hai) anos