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EFEM
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5b037046f9
Add TM/LL modules.
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2 years ago |
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EPD
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bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
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2 years ago |
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IODevices
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2d424f4cab
优化漏气检测算法，给TM界面添加 1.删除/添加wafer 2.PM/LL自动隐藏功能
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2 years ago |
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TM
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44ec74603f
TM Transfer
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2 years ago |
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AIRSYSChiller.cs
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bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
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2 years ago |
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AdTecRF.cs
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a48b743e88
1.完成PartialPressure功能
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2 years ago |
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AdixenTurboPump.cs
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d22b60372f
Debug devices on tools
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2 years ago |
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CometRF.cs
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62f1a16025
1.添加PartialPressure界面
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2 years ago |
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DataDefine.cs
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bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
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2 years ago |
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DeviceManager.cs
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e1226fdd9e
update for disable difference pressure checking under atm mode according electrical team request.
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2 years ago |
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ESC5HighVoltage.cs
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3e5adf7db8
update rf match adtech.
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2 years ago |
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EdwardsPump.cs
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7a6556869f
1.整理主界面UI
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2 years ago |
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FinsPlc.cs
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2b930e56b9
Log output for exception.
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2 years ago |
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JetPM.cs
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a64bed3d6c
1.Run recipe 功能现场修改
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2 years ago |
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PendulumValve.cs
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c060fde154
1.Recipe Edit 添加配置功能
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2 years ago |
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PlasmaController.cs
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75710d35d8
RF Match.
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2 years ago |
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SMCChiller.cs
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a64bed3d6c
1.Run recipe 功能现场修改
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2 years ago |
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SkyPump.cs
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280432bb82
1.TM传片动画制作，UI界面优化
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2 years ago |
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VirgoSignalTower.cs
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a48b743e88
1.完成PartialPressure功能
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2 years ago |
lixiang
a64bed3d6c
1.Run recipe 功能现场修改