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ISchedulerDBCallback.cs
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5b037046f9
Add TM/LL modules.
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2 years ago |
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SchedulerAligner.cs
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e61f018b66
Manual Return wafer while running cycle.
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1 year ago |
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SchedulerDBCallback.cs
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5b037046f9
Add TM/LL modules.
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2 years ago |
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SchedulerEfemRobot.cs
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96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
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1 year ago |
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SchedulerLoadLock.cs
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5687e44ebc
Enhance routing algorithm.
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1 year ago |
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SchedulerLoadPort.cs
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09e8c5db30
Fix the post clean not running bug.
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1 year ago |
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SchedulerModule.cs
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1d60dcb593
Fix the bugs about Exclude/Include feature.
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1 year ago |
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SchedulerPM.cs
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17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe
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11 months ago |
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SchedulerSETMRobot.cs
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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1 year ago |
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SchedulerTMRobot.cs
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0af5bc1e75
throughput enhancement.
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1 year ago |
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SchedulerVCE.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
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TransferModule.cs
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f8336dc16b
fix the crash issue in SETMScheduler.
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1 year ago |
lixiang
17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe