SchedulerPM.cs 17 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Diagnostics;
  4. using System.Linq;
  5. using System.Text;
  6. using System.Threading.Tasks;
  7. using Aitex.Core.Common;
  8. using Aitex.Core.RT.DataCenter;
  9. using Aitex.Core.RT.Device;
  10. using Aitex.Core.RT.Event;
  11. using Aitex.Core.RT.Fsm;
  12. using Aitex.Core.RT.Log;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.Util;
  15. using Aitex.Sorter.Common;
  16. using Aitex.Core.RT.RecipeCenter;
  17. using Venus_RT.Modules;
  18. using Venus_RT.Modules.PMs;
  19. using MECF.Framework.Common.Equipment;
  20. using MECF.Framework.Common.Schedulers;
  21. using MECF.Framework.Common.SubstrateTrackings;
  22. using Venus_RT.Devices;
  23. using Venus_Core;
  24. using MECF.Framework.Common.DataCenter;
  25. using System.IO;
  26. using MECF.Framework.Common.Jobs;
  27. namespace Venus_RT.Scheduler
  28. {
  29. public class SchedulerPM : SchedulerModule
  30. {
  31. public override bool IsAvailable
  32. {
  33. get { return _entity.IsIdle && _entity.IsInclude && (_entity.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode) && CheckTaskDone(); }
  34. }
  35. public override bool IsOnline
  36. {
  37. get { return _entity != null && _entity.IsOnline; }
  38. }
  39. public override bool IsError
  40. {
  41. get { return _entity.IsError; }
  42. }
  43. public override bool IsIdle
  44. {
  45. get { return _entity.IsIdle; }
  46. }
  47. public override bool IsVac
  48. {
  49. get { return _entity.IsVac; }
  50. }
  51. public override bool IsAtm
  52. {
  53. get { return _entity.IsAtm; }
  54. }
  55. public override int TimeToReady
  56. {
  57. get { return (IsOnline && IsInclude)? _entity.TimeToReady : int.MaxValue / 2; }
  58. }
  59. public override bool IsInclude { get { return _entity.IsInclude; } }
  60. public TaskType Task => _task;
  61. private PMEntity _entity = null;
  62. private ModuleName _taskRobot;
  63. private EnumTransferType _taskTransferType;
  64. private Hand _taskBlade;
  65. private int _taskSlot;
  66. private int _entityTaskToken = (int)FSM_MSG.NONE;
  67. private DeviceTimer _timerProcess = new DeviceTimer();
  68. private JetPMBase _pm;
  69. private int _idleCleanOpt = 0;
  70. private int _idleCleanHourSetPoint;
  71. private int _idleCleanWaferSetPoint;
  72. private int _idleCleanWaferCount;
  73. private string _idleCleanRecipe;
  74. private DateTime _lastRunTime = new DateTime();
  75. private float _paramTemp;
  76. public float Temperature
  77. {
  78. get
  79. {
  80. return _entity.ChamberTemperature;
  81. }
  82. }
  83. public JetChamber ChamberType
  84. {
  85. get
  86. {
  87. return _entity.ChamberType;
  88. }
  89. }
  90. public SchedulerPM(ModuleName chamber) : base(chamber.ToString())
  91. {
  92. _entity = Singleton<RouteManager>.Instance.GetPM(chamber);
  93. _pm = DEVICE.GetDevice<JetPMBase>(Module.ToString());
  94. EventWaferArrived += WaferArrived;
  95. LoadIdleCleanOpt();
  96. }
  97. public void InitClean()
  98. {
  99. //DATA.Subscribe($"{Module}.IdlePurgeNextRunTime", () => IdlePurgeNextRunTime);
  100. //DATA.Subscribe($"{Module}.IdleCleanNextRunTime", () => IdleCleanNextRunTime);
  101. }
  102. public override bool IsReadyForPick(ModuleName robot, int slot, Hand blade)
  103. {
  104. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Pick, slot, blade)
  105. && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
  106. }
  107. public override bool IsReadyForPlace(ModuleName robot, int slot, Hand blade)
  108. {
  109. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Place, slot, blade)
  110. && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot);
  111. }
  112. public bool IsTemperatureReady(float temp)
  113. {
  114. return Math.Abs(Temperature - temp) < SC.GetValue<double>("System.MaxTemperatureToleranceTransferWafer");
  115. }
  116. public bool IsPrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  117. {
  118. return _task == TaskType.PrepareTransfer && _taskRobot == robot && _taskSlot == slot &&
  119. _taskTransferType == type;
  120. }
  121. public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  122. {
  123. _task = TaskType.PrepareTransfer;
  124. _taskRobot = robot;
  125. _taskSlot = slot;
  126. _taskTransferType = type;
  127. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot);
  128. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  129. return _entityTaskToken != (int)FSM_MSG.NONE;
  130. }
  131. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade)
  132. {
  133. _task = TaskType.PrepareTransfer;
  134. _taskRobot = robot;
  135. _taskSlot = slot;
  136. _taskBlade = blade;
  137. _taskTransferType = type;
  138. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp);
  139. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  140. return _entityTaskToken != (int)FSM_MSG.NONE;
  141. }
  142. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade, WaferSize size)
  143. {
  144. _task = TaskType.PrepareTransfer;
  145. _taskRobot = robot;
  146. _taskSlot = slot;
  147. _taskBlade = blade;
  148. _taskTransferType = type;
  149. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp, size);
  150. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}, {size}");
  151. return _entityTaskToken != (int)FSM_MSG.NONE;
  152. }
  153. public override bool PostTransfer(ModuleName robot, EnumTransferType type, int slot)
  154. {
  155. StopWaitTransfer(robot);
  156. _task = TaskType.PostTransfer;
  157. _taskRobot = robot;
  158. _taskSlot = slot;
  159. _taskTransferType = type;
  160. _entityTaskToken = _entity.InvokePostTransfer(robot, type, slot);
  161. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  162. return _entityTaskToken != (int)FSM_MSG.NONE;
  163. }
  164. public override bool PostTransfer(ModuleName robot)
  165. {
  166. StopWaitTransfer(robot);
  167. _task = TaskType.PostTransfer;
  168. _taskRobot = robot;
  169. _taskSlot = _inTransferSlot;
  170. _taskTransferType = _inTransferType;
  171. _entityTaskToken = _entity.InvokePostTransfer(robot, _inTransferType, _inTransferSlot);
  172. LogTaskStart(_task, $"{robot} {_inTransferType} slot {_inTransferSlot + 1}");
  173. return _entityTaskToken != (int)FSM_MSG.NONE;
  174. }
  175. public override bool Process(string recipeName, bool isCleanRecipe, RecipeType recipeType, WaferInfo wafer)
  176. {
  177. bool withWafer;
  178. if (recipeType == RecipeType.Clean)
  179. {
  180. withWafer = false;
  181. }
  182. else
  183. {
  184. withWafer = true;
  185. }
  186. _task = TaskType.Process;
  187. LogTaskStart(_task, $"recipe: {recipeName}, clean: {isCleanRecipe}, with wafer: {withWafer}");
  188. if (RouteManager.IsATMMode)
  189. {
  190. int time = SC.GetValue<int>("System.ATMCyclePMDelayTime");
  191. _timerProcess.Start(time * 1000);
  192. LOG.Write(eEvent.EV_SCHEDULER, Module, $"System run in ATM mode, process skipped, delay {time} seconds");
  193. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.InProcess);
  194. return true;
  195. }
  196. else
  197. {
  198. if(isCleanRecipe)
  199. {
  200. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  201. }
  202. else
  203. {
  204. _entityTaskToken = _entity.InvokeProcess(recipeName, wafer.WaferOrigin, RecipeType.Process);
  205. }
  206. return _entityTaskToken != (int)FSM_MSG.NONE;
  207. }
  208. }
  209. public override bool Preheating(float temperature)
  210. {
  211. _task = TaskType.Heating;
  212. _paramTemp = temperature;
  213. _entityTaskToken = _entity.InvokePreHeat(temperature);
  214. LogTaskStart(_task, $"preheat to {temperature}");
  215. return _entityTaskToken != (int)FSM_MSG.NONE;
  216. }
  217. public bool CheckTaskDone()
  218. {
  219. bool ret = false;
  220. switch (_task)
  221. {
  222. case TaskType.None:
  223. ret = true;
  224. break;
  225. case TaskType.PrepareTransfer:
  226. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsPrepareTransferReady(_taskRobot, _taskTransferType == EnumTransferType.Swap ? EnumTransferType.Pick : _taskTransferType, _taskSlot, _taskBlade);
  227. break;
  228. case TaskType.PostTransfer:
  229. ret = _entity.CheckAcked(_entityTaskToken);
  230. break;
  231. case TaskType.Heating:
  232. ret = _entity.CheckAcked(_entityTaskToken) && IsTemperatureReady(_paramTemp);
  233. break;
  234. case TaskType.Process:
  235. case TaskType.IdlePurgeProcess:
  236. case TaskType.IdleCleanProcess:
  237. case TaskType.PreJobProcess:
  238. case TaskType.CompleteJobProcess:
  239. if (RouteManager.IsATMMode)
  240. {
  241. ret = _timerProcess.IsTimeout() && _entity.IsIdle;
  242. if (ret)
  243. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
  244. }
  245. else
  246. {
  247. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsIdle;
  248. }
  249. break;
  250. }
  251. if (ret && _task != TaskType.None)
  252. {
  253. LogTaskDone(_task, "");
  254. _task = TaskType.None;
  255. }
  256. return ret;
  257. }
  258. public bool Monitor()
  259. {
  260. return true;
  261. }
  262. public void SetPMAuto()
  263. {
  264. _entity.SetAuto();
  265. }
  266. public bool IdlePurgeProcess(string recipeName)
  267. {
  268. _task = TaskType.IdlePurgeProcess;
  269. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  270. LogTaskStart(_task, $"recipe: {recipeName}, clean: {false}, with wafer: {false}");
  271. return _entityTaskToken != (int)FSM_MSG.NONE;
  272. }
  273. public bool IdleCleanProcess(string recipeName)
  274. {
  275. _task = TaskType.IdleCleanProcess;
  276. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  277. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  278. return _entityTaskToken != (int)FSM_MSG.NONE;
  279. }
  280. public void PreJobClean()
  281. {
  282. }
  283. public bool PreJobProcess(string recipeName)
  284. {
  285. _task = TaskType.PreJobProcess;
  286. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  287. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  288. return _entityTaskToken != (int)FSM_MSG.NONE;
  289. }
  290. public bool CompleteJobProcess(string recipeName)
  291. {
  292. _task = TaskType.CompleteJobProcess;
  293. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  294. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  295. return _entityTaskToken != (int)FSM_MSG.NONE;
  296. }
  297. private void WaferArrived(object sender, EventArgs e)
  298. {
  299. if(WaferManager.Instance.CheckHasWafer(Module, 0))
  300. {
  301. WaferInfo wafer = WaferManager.Instance.GetWafer(Module, 0);
  302. string recipeName = wafer.ProcessJob.Sequence.GetRecipe(Module);
  303. if (recipeName.Length > 0)
  304. {
  305. Process(recipeName, false, RecipeType.Process, wafer);
  306. }
  307. else
  308. {
  309. LOG.Write(eEvent.WARN_SCHEDULER, Module, "Cannot run process as get recipe failed.");
  310. }
  311. }
  312. else
  313. {
  314. LOG.Write(eEvent.WARN_SCHEDULER, Module, "Cannot run process as PM is empty");
  315. }
  316. }
  317. public override void ResetTask()
  318. {
  319. _entity.ResetRecipeTime();
  320. base.ResetTask();
  321. }
  322. #region clean task
  323. private void LoadIdleCleanOpt()
  324. {
  325. // Load Idle Clean Config
  326. _idleCleanOpt = SC.GetValue<int>($"{Module}.IdleClean.Option");
  327. _idleCleanHourSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanTime");
  328. _idleCleanWaferSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanWaferCount");
  329. _idleCleanWaferCount = SC.GetValue<int>($"{Module}.IdleClean.WaferCountSinceLastClean");
  330. _idleCleanRecipe = SC.GetStringValue($"{Module}.IdleClean.IdleCleanRecipe");
  331. string lastRun = SC.GetStringValue($"{Module}.IdleClean.LastRunTime");
  332. if (lastRun.Length > 10)
  333. {
  334. try
  335. {
  336. _lastRunTime = DateTime.Parse(lastRun);
  337. }
  338. catch
  339. {
  340. lastRun = string.Empty;
  341. }
  342. }
  343. if (lastRun.Length <= 10)
  344. {
  345. _lastRunTime = DateTime.Now;
  346. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  347. }
  348. // validate the idle clean recipe name
  349. string path = Path.Combine("Recipes", Module.ToString(), "Clean", $"{_idleCleanRecipe}.rcp");
  350. if (File.Exists(path))
  351. {
  352. string recipeContent = RecipeFileManager.Instance.LoadRecipeByPath(path);
  353. Recipe recipe = Recipe.Load(recipeContent);
  354. if (recipe == null)
  355. {
  356. _idleCleanRecipe = string.Empty;
  357. }
  358. }
  359. }
  360. public void WaferProcessDone()
  361. {
  362. _lastRunTime = DateTime.Now;
  363. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  364. _idleCleanWaferCount++;
  365. SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
  366. }
  367. private void ResetIdleCleanCounter()
  368. {
  369. _lastRunTime = DateTime.Now;
  370. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  371. _idleCleanWaferCount = 0;
  372. SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
  373. }
  374. public bool RunIdleCleanTask()
  375. {
  376. if(_idleCleanOpt == 1)
  377. {
  378. TimeSpan span = DateTime.Now - _lastRunTime;
  379. if(span.TotalHours >= _idleCleanHourSetPoint)
  380. {
  381. Process(_idleCleanRecipe, true, RecipeType.Clean, null);
  382. ResetIdleCleanCounter();
  383. return true;
  384. }
  385. }
  386. else if(_idleCleanOpt == 2)
  387. {
  388. if(_idleCleanWaferCount >= _idleCleanWaferSetPoint)
  389. {
  390. Process(_idleCleanRecipe, true, RecipeType.Clean, null);
  391. ResetIdleCleanCounter();
  392. return true;
  393. }
  394. }
  395. return false;
  396. }
  397. public bool RunJobCleanTask(string jobCleanRecipe)
  398. {
  399. // validate the job clean recipe name
  400. //string recipeContent = RecipeFileManager.Instance.LoadRecipe(Module.ToString(), jobCleanRecipe, false);
  401. string path = Path.Combine( "Recipes", Module.ToString(),"Clean" , $"{jobCleanRecipe}.rcp");
  402. string recipeContent = RecipeFileManager.Instance.LoadRecipeByPath(path);
  403. if (recipeContent.Length == 0)
  404. {
  405. return false;
  406. }
  407. Recipe recipe = Recipe.Load(recipeContent);
  408. if (recipe == null)
  409. {
  410. LOG.Write(eEvent.WARN_ROUTER, Module, $"Loading clean recipe: {path} failed");
  411. return false;
  412. }
  413. return Process(jobCleanRecipe, true, RecipeType.Clean, null);
  414. }
  415. #endregion
  416. }
  417. }