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EFEM
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ec2f97e62d
enhance log.
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1 year ago |
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LLs
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c3bef13a6e
Enhance Auto pump/vent algorithm.
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1 year ago |
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LPs
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03063bae6a
Enhance the routine framework.
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1 year ago |
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PMs
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f8c50b602a
修复Tolerance对流气不开阀的bug
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1 year ago |
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SMIF
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 year ago |
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Schedulers
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d714771195
fix atm prepare pressure bugs.
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1 year ago |
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TM
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
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VCE
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c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
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1 year ago |
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AutoCycle.cs
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694c2524ad
enhance the pause function and fix the atm prepare pressure bugs.
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1 year ago |
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Autotransfer_LP_FA.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
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EntityTaskBase.cs
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5b037046f9
Add TM/LL modules.
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2 years ago |
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ManualTransfer.cs
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501997ac38
TM/EFEM robot single arm option.
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1 year ago |
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ResourceMonitor.cs
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0ed42d17d1
fix bugs for WaferOffset
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1 year ago |
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RouteManager.cs
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dbb753dd44
Pause functionality.
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1 year ago |
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SEManualTransfer.cs
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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1 year ago |
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SETMCycle.cs
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 year ago |
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TMCycle.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
sangwq
d714771195
fix atm prepare pressure bugs.