| .. |
|
IoBacksideHe.cs
|
b6309f712c
upload for Venus SE/DE
|
hai 11 meses |
|
IoCylinder.cs
|
a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
|
hai 1 ano |
|
IoGasStick.cs
|
5ce110574e
1，添加cooling功能
|
hai 1 ano |
|
IoHeartbeat.cs
|
7556c43a4c
1.Gas漏气检测结束ui界面不更新bug修复
|
hai 1 ano |
|
IoHeater.cs
|
552d60ca99
1.Stable与Tolerance 功能优化
|
hai 1 ano |
|
IoHighTemperatureHeater.cs
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
hai 11 meses |
|
IoHongHuControl.cs
|
0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
|
hai 1 ano |
|
IoLid.cs
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
|
%!s(int64=2) %!d(string=hai) anos |
|
IoMagnet.cs
|
7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
|
hai 1 ano |
|
IoMfc.cs
|
a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
|
hai 1 ano |
|
IoPressureControl.cs
|
b6309f712c
upload for Venus SE/DE
|
hai 11 meses |
|
IoPressureMeter.cs
|
9163903164
Kepler2200优化
|
hai 1 ano |
|
IoSignalLight.cs
|
af96d139ff
2022年11月24日 提交 RT 部分更改
|
%!s(int64=2) %!d(string=hai) anos |
|
IoSignalTower.cs
|
79ffe0c064
1.分开Kepler与Venus SequenceView界面
|
hai 1 ano |
|
IoSwitch.cs
|
8f80478982
1.添加IoSwitch
|
%!s(int64=2) %!d(string=hai) anos |
|
IoTMPressureCtl.cs
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
|
hai 1 ano |
|
IoTMSEPressureCtl.cs
|
31bbc4482b
update ui && rt && simu for Venus SE
|
hai 1 ano |
lixiang
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息