IoHighTemperatureHeater.cs 39 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.IOCore;
  4. using Aitex.Core.RT.Log;
  5. using Aitex.Core.RT.OperationCenter;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using MECF.Framework.Common.CommonData.DeviceData;
  9. using System;
  10. using System.Collections.Generic;
  11. using System.Diagnostics;
  12. using System.Linq;
  13. using System.Text;
  14. using System.Threading.Tasks;
  15. using System.Xml;
  16. using Venus_Core;
  17. namespace Venus_RT.Devices.IODevices
  18. {
  19. public class IoHighTemperatureHeater : BaseDevice, IDevice
  20. {
  21. private readonly DIAccessor _diPowerOnFeedback;
  22. private readonly DOAccessor _doPowerOn;
  23. private readonly AIAccessor _aiTemperatureFeedback;
  24. private readonly AOAccessor _aoTemperatureSetPoint;
  25. private readonly DIAccessor _diGoPosition1Feedback;
  26. private readonly DOAccessor _doGoPosition1On;
  27. private readonly DIAccessor _diGoPosition2Feedback;
  28. private readonly DOAccessor _doGoPosition2On;
  29. private readonly DIAccessor _diGoPosition3Feedback;
  30. private readonly DOAccessor _doGoPosition3On;
  31. private readonly DIAccessor _diGoPosition4Feedback;
  32. private readonly DOAccessor _doGoPosition4On;
  33. private readonly DIAccessor _diGoPosition5Feedback;
  34. private readonly DOAccessor _doGoPosition5On;
  35. private readonly DIAccessor _diGoOriginFeedback;
  36. private readonly DOAccessor _doGoOriginOn;
  37. private readonly AOAccessor _aoLiftServoPosition1;
  38. private readonly AOAccessor _aoLiftServoPosition2;
  39. private readonly AOAccessor _aoLiftServoPosition3;
  40. private readonly AOAccessor _aoLiftServoPosition4;
  41. private readonly AOAccessor _aoLiftServoPosition5;
  42. private readonly AOAccessor _aoOriginSearchHighSpeed;
  43. private readonly AOAccessor _aoOriginSearchLowSpeed;
  44. private readonly AOAccessor _aoAbsMoveSpeed;
  45. private readonly AOAccessor _aoMaximusMoveSpeed;
  46. private readonly AOAccessor _aoSoftDownLimit;
  47. private readonly AOAccessor _aoSoftUpLimit;
  48. private readonly AOAccessor _aoRatio;
  49. private readonly DIAccessor _diDriverAlarm;
  50. private readonly DIAccessor _diPosiModuleAlarm;
  51. private readonly DIAccessor _diORGFailAlarm;
  52. private readonly DOAccessor _doResetLift;
  53. private readonly DOAccessor _doResetHeater;
  54. private readonly AIAccessor _aiHeaterPurgeN2Flow;
  55. private readonly DIAccessor _diMhtrErrorHeatStop;
  56. private readonly DOAccessor _doMhtrErrorReset;
  57. private readonly DIAccessor _diWaferTransferPosiSW;
  58. private readonly AIAccessor _aiHeaterInnerAlarmWord1;
  59. private readonly AIAccessor _aiHeaterInnerAlarmWord2;
  60. private readonly AIAccessor _aiHeaterOuterAlarmWord1;
  61. private readonly AIAccessor _aiHeaterOuterAlarmWord2;
  62. private readonly DeviceTimer _originTimer = new DeviceTimer();
  63. private readonly DeviceTimer _position1Timer = new DeviceTimer();
  64. private readonly DeviceTimer _position2Timer = new DeviceTimer();
  65. private readonly DeviceTimer _position3Timer = new DeviceTimer();
  66. private readonly DeviceTimer _position4Timer = new DeviceTimer();
  67. private readonly DeviceTimer _position5Timer = new DeviceTimer();
  68. private int _goPositionTime = 30 * 1000;
  69. private float HighTemperatureHeaterTemperatureSetPoint;
  70. private string HighTemperatureHeaterPositipnSetPoint;
  71. private float HighTemperatureHeaterRatioSetPoint;
  72. private float _maxTemperatureSetPoint;
  73. private float _minTemperatureSetPoint;
  74. private float _maxRatioSetPoint;
  75. private float _minRatioSetPoint;
  76. private int _clearAlarmCounter;
  77. private Stopwatch _heaterControlStopWatch = new Stopwatch();
  78. //private R_TRIG innerWord1_TRIG = new R_TRIG();
  79. //private R_TRIG innerWord2_TRIG = new R_TRIG();
  80. //private R_TRIG outerWord1_TRIG = new R_TRIG();
  81. //private R_TRIG outerWord2_TRIG = new R_TRIG();
  82. private int _innerWord1;
  83. private int _innerWord2;
  84. private int _outerWord1;
  85. private int _outerWord2;
  86. private AITHighTemperatureHeaterData DeviceData
  87. {
  88. get
  89. {
  90. return new AITHighTemperatureHeaterData
  91. {
  92. Module = Module,
  93. DeviceName = Name,
  94. DisplayName = Display,
  95. HighTemperatureHeaterPositionFeedBack = CurrentPosition.ToString(),
  96. HighTemperatureHeaterIsonFeedBack = HighTemperatureHeaterIsOn,
  97. HighTemperatureHeaterTemperatureFeedBack = HighTemperatureHighHeaterTemperature,
  98. HighTemperatureHeaterRatioFeedBack = HighTemperatureHeaterRatio,
  99. HighTemperatureHeaterPositionSetPoint = HighTemperatureHeaterPositipnSetPoint,
  100. HighTemperatureHeaterTemperatureSetPoint = HighTemperatureHeaterTemperatureSetPoint,
  101. HighTemperatureHeaterRatioSetPoint = HighTemperatureHeaterRatioSetPoint,
  102. HighTemperatureHeaterN2Flow = HighTemperatureHeaterN2Flow,
  103. LiftIsAlarm = IsDriverAlarm || IsPosiModuleAlarm || IsORGFailAlarm,
  104. HeaterIsAlarm = _diMhtrErrorHeatStop.Value
  105. };
  106. }
  107. }
  108. public bool IsDriverAlarm => _diDriverAlarm.Value;
  109. public bool IsPosiModuleAlarm => _diPosiModuleAlarm.Value;
  110. public bool IsORGFailAlarm => _diORGFailAlarm.Value;
  111. public HighTemperatureHeaterPosition CurrentPosition
  112. {
  113. get
  114. {
  115. if (_diDriverAlarm.Value || _diPosiModuleAlarm.Value || _diORGFailAlarm.Value)
  116. {
  117. return HighTemperatureHeaterPosition.UnKnow;
  118. }
  119. if (_diGoOriginFeedback.Value == true && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == false)
  120. {
  121. return HighTemperatureHeaterPosition.Origin;
  122. }
  123. if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == true && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == false)
  124. {
  125. return HighTemperatureHeaterPosition.Position1;
  126. }
  127. else if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == true && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == false)
  128. {
  129. return HighTemperatureHeaterPosition.Position2;
  130. }
  131. else if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == true && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == false)
  132. {
  133. return HighTemperatureHeaterPosition.Position3;
  134. }
  135. else if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == true && _diGoPosition5Feedback.Value == false)
  136. {
  137. return HighTemperatureHeaterPosition.Position4;
  138. }
  139. else if (_diGoOriginFeedback.Value == false && _diGoPosition1Feedback.Value == false && _diGoPosition2Feedback.Value == false && _diGoPosition3Feedback.Value == false && _diGoPosition4Feedback.Value == false && _diGoPosition5Feedback.Value == true)
  140. {
  141. return HighTemperatureHeaterPosition.Position5;
  142. }
  143. else
  144. {
  145. return HighTemperatureHeaterPosition.UnKnow;
  146. }
  147. }
  148. }
  149. public bool HighTemperatureHeaterIsOn
  150. {
  151. get
  152. {
  153. if (_diPowerOnFeedback.Value == true && _doPowerOn.Value == true)
  154. {
  155. return true;
  156. }
  157. else
  158. {
  159. return false;
  160. }
  161. }
  162. set
  163. {
  164. SC.SetItemValue($"{Module}.HighTemperatureHeater.IsOn", value);
  165. }
  166. }
  167. public float HighTemperatureHighHeaterTemperature
  168. {
  169. get
  170. {
  171. if (_aiTemperatureFeedback == null) return -1;
  172. return _GetRealFloat(_aiTemperatureFeedback);
  173. }
  174. set
  175. {
  176. if (value <= _maxTemperatureSetPoint && value >= _minTemperatureSetPoint)
  177. {
  178. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $" Set Temperature to {value}");
  179. HighTemperatureHeaterTemperatureSetPoint = value;
  180. SC.SetItemValue($"{Module}.HighTemperatureHeater.Temperature", value);
  181. }
  182. else
  183. {
  184. LOG.Write(eEvent.ERR_HighTemperatureHeater_SetTemperature_OverRange, Module, value.ToString(), _minTemperatureSetPoint.ToString(), _maxTemperatureSetPoint.ToString());
  185. }
  186. }
  187. }
  188. public float HighTemperatureHeaterRatio
  189. {
  190. get
  191. {
  192. if (_aoRatio == null) return -1;
  193. return _GetRealFloat(_aoRatio);
  194. }
  195. set
  196. {
  197. if (value <= _maxRatioSetPoint && value >= _minRatioSetPoint)
  198. {
  199. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $" Set Ratio to {value}");
  200. HighTemperatureHeaterRatioSetPoint = value;
  201. SC.SetItemValue($"{Module}.HighTemperatureHeater.Ratio", value);
  202. }
  203. else
  204. {
  205. LOG.Write(eEvent.ERR_HighTemperatureHeater_SetRatio_OverRange, Module, value.ToString(), _minRatioSetPoint.ToString(), _maxRatioSetPoint.ToString());
  206. }
  207. }
  208. }
  209. public float HighTemperatureHeaterN2Flow
  210. {
  211. get
  212. {
  213. if (_aiHeaterPurgeN2Flow == null) return -1;
  214. return _GetRealFloat(_aiHeaterPurgeN2Flow);
  215. }
  216. }
  217. public IoHighTemperatureHeater(string module, XmlElement node, string ioModule = "")
  218. {
  219. base.Module = module;
  220. base.Name = node.GetAttribute("id");
  221. base.Display = node.GetAttribute("display");
  222. base.DeviceID = node.GetAttribute("schematicId");
  223. _diPowerOnFeedback = ParseDiNode("diPowerOnFeedback", node, ioModule);
  224. _doPowerOn = ParseDoNode("doPowerOn", node, ioModule);
  225. _aiTemperatureFeedback = ParseAiNode("aiTemperatureFeedback", node, ioModule);
  226. _aoTemperatureSetPoint = ParseAoNode("aoTemperatureSetPoint", node, ioModule);
  227. _diGoPosition1Feedback = ParseDiNode("diGoPosition1Feedback", node, ioModule);
  228. _doGoPosition1On = ParseDoNode("doGoPosition1On", node, ioModule);
  229. _diGoPosition2Feedback = ParseDiNode("diGoPosition2Feedback", node, ioModule);
  230. _doGoPosition2On = ParseDoNode("doGoPosition2On", node, ioModule);
  231. _diGoPosition3Feedback = ParseDiNode("diGoPosition3Feedback", node, ioModule);
  232. _doGoPosition3On = ParseDoNode("doGoPosition3On", node, ioModule);
  233. _diGoPosition4Feedback = ParseDiNode("diGoPosition4Feedback", node, ioModule);
  234. _doGoPosition4On = ParseDoNode("doGoPosition4On", node, ioModule);
  235. _diGoPosition5Feedback = ParseDiNode("diGoPosition5Feedback", node, ioModule);
  236. _doGoPosition5On = ParseDoNode("doGoPosition5On", node, ioModule);
  237. _diGoOriginFeedback = ParseDiNode("diGoOriginFeedback", node, ioModule);
  238. _doGoOriginOn = ParseDoNode("doGoOriginOn", node, ioModule);
  239. _aoLiftServoPosition1 = ParseAoNode("aoLiftServoPosition1", node, ioModule);
  240. _aoLiftServoPosition2 = ParseAoNode("aoLiftServoPosition2", node, ioModule);
  241. _aoLiftServoPosition3 = ParseAoNode("aoLiftServoPosition3", node, ioModule);
  242. _aoLiftServoPosition4 = ParseAoNode("aoLiftServoPosition4", node, ioModule);
  243. _aoLiftServoPosition5 = ParseAoNode("aoLiftServoPosition5", node, ioModule);
  244. _aoOriginSearchHighSpeed = ParseAoNode("aoOriginSearchHighSpeed", node, ioModule);
  245. _aoOriginSearchLowSpeed = ParseAoNode("aoOriginSearchLowSpeed", node, ioModule);
  246. _aoAbsMoveSpeed = ParseAoNode("aoAbsMoveSpeed", node, ioModule);
  247. _aoMaximusMoveSpeed = ParseAoNode("aoMaximusMoveSpeed", node, ioModule);
  248. _aoSoftDownLimit = ParseAoNode("aoSoftDownLimit", node, ioModule);
  249. _aoSoftUpLimit = ParseAoNode("aoSoftUpLimit", node, ioModule);
  250. _aoRatio = ParseAoNode("aoRatio", node, ioModule);
  251. _aiHeaterInnerAlarmWord1 = ParseAiNode("aiHeaterInnerAlarmWord1", node, ioModule);
  252. _aiHeaterInnerAlarmWord2 = ParseAiNode("aiHeaterInnerAlarmWord2", node, ioModule);
  253. _aiHeaterOuterAlarmWord1 = ParseAiNode("aiHeaterOuterAlarmWord1", node, ioModule);
  254. _aiHeaterOuterAlarmWord2 = ParseAiNode("aiHeaterOuterAlarmWord2", node, ioModule);
  255. _maxTemperatureSetPoint = Convert.ToSingle(SC.GetConfigItem($"{module}.HighTemperatureHeater.Temperature").Max);
  256. _minTemperatureSetPoint = Convert.ToSingle(SC.GetConfigItem($"{module}.HighTemperatureHeater.Temperature").Min);
  257. _maxRatioSetPoint = Convert.ToSingle(SC.GetConfigItem($"{module}.HighTemperatureHeater.Ratio").Max);
  258. _minRatioSetPoint = Convert.ToSingle(SC.GetConfigItem($"{module}.HighTemperatureHeater.Ratio").Min);
  259. _diDriverAlarm = ParseDiNode("diDriverAlarm", node, ioModule);
  260. _diPosiModuleAlarm = ParseDiNode("diPosiModuleAlarm", node, ioModule);
  261. _diORGFailAlarm = ParseDiNode("diORGFailAlarm", node, ioModule);
  262. _doResetLift = ParseDoNode("doResetLift", node, ioModule);
  263. _doResetHeater = ParseDoNode("doResetHeater", node, ioModule);
  264. _aiHeaterPurgeN2Flow = ParseAiNode("aiHeaterPurgeN2Flow", node, ioModule);
  265. _diMhtrErrorHeatStop = ParseDiNode("diMhtrErrorHeatStop", node, ioModule);
  266. _doMhtrErrorReset = ParseDoNode("doMhtrErrorReset", node, ioModule);
  267. _diWaferTransferPosiSW = ParseDiNode("diWaferTransferPosiSW", node, ioModule);
  268. }
  269. public bool GotoPosition(HighTemperatureHeaterPosition highTemperatureHeaterPosition)
  270. {
  271. if (!LiftHardwareIsOK())
  272. {
  273. LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Alarm,can not go to {highTemperatureHeaterPosition}");
  274. return false;
  275. }
  276. if (highTemperatureHeaterPosition != HighTemperatureHeaterPosition.Origin && !LiftSoftwareIsOK())
  277. {
  278. LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Alarm,can not go to {highTemperatureHeaterPosition}");
  279. return false;
  280. }
  281. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} start to {highTemperatureHeaterPosition.ToString()}");
  282. HighTemperatureHeaterPositipnSetPoint = highTemperatureHeaterPosition.ToString();
  283. switch (highTemperatureHeaterPosition)
  284. {
  285. case HighTemperatureHeaterPosition.Origin:
  286. _doGoPosition1On.Value = false;
  287. _doGoPosition2On.Value = false;
  288. _doGoPosition3On.Value = false;
  289. _doGoPosition4On.Value = false;
  290. _doGoPosition5On.Value = false;
  291. _doGoOriginOn.Value = true;
  292. _originTimer.Start(_goPositionTime);
  293. break;
  294. case HighTemperatureHeaterPosition.Position1:
  295. _doGoPosition2On.Value = false;
  296. _doGoPosition3On.Value = false;
  297. _doGoPosition4On.Value = false;
  298. _doGoPosition5On.Value = false;
  299. _doGoOriginOn.Value = false;
  300. _doGoPosition1On.Value = true;
  301. _position1Timer.Start(_goPositionTime);
  302. break;
  303. case HighTemperatureHeaterPosition.Position2:
  304. _doGoPosition1On.Value = false;
  305. _doGoPosition3On.Value = false;
  306. _doGoPosition4On.Value = false;
  307. _doGoPosition5On.Value = false;
  308. _doGoOriginOn.Value = false;
  309. _doGoPosition2On.Value = true;
  310. _position2Timer.Start(_goPositionTime);
  311. break;
  312. case HighTemperatureHeaterPosition.Position3:
  313. _doGoPosition1On.Value = false;
  314. _doGoPosition2On.Value = false;
  315. _doGoPosition4On.Value = false;
  316. _doGoPosition5On.Value = false;
  317. _doGoOriginOn.Value = false;
  318. _doGoPosition3On.Value = true;
  319. _position3Timer.Start(_goPositionTime);
  320. break;
  321. case HighTemperatureHeaterPosition.Position4:
  322. _doGoPosition1On.Value = false;
  323. _doGoPosition2On.Value = false;
  324. _doGoPosition3On.Value = false;
  325. _doGoPosition5On.Value = false;
  326. _doGoOriginOn.Value = false;
  327. _doGoPosition4On.Value = true;
  328. _position4Timer.Start(_goPositionTime);
  329. break;
  330. case HighTemperatureHeaterPosition.Position5:
  331. _doGoPosition1On.Value = false;
  332. _doGoPosition2On.Value = false;
  333. _doGoPosition3On.Value = false;
  334. _doGoPosition4On.Value = false;
  335. _doGoOriginOn.Value = false;
  336. _doGoPosition5On.Value = true;
  337. _position5Timer.Start(_goPositionTime);
  338. break;
  339. }
  340. return true;
  341. }
  342. public bool Initialize()
  343. {
  344. OP.Subscribe($"{Module}.{Name}.GotoPosition", (cmd, args) =>
  345. {
  346. var currentPosition = (HighTemperatureHeaterPosition)Enum.Parse(typeof(HighTemperatureHeaterPosition), args[0].ToString());
  347. GotoPosition(currentPosition);
  348. return true;
  349. });
  350. OP.Subscribe($"{Module}.{Name}.SwitchHighTemperatureHeater", (cmd, args) =>
  351. {
  352. HighTemperatureHeaterIsOn = Convert.ToBoolean(args[0].ToString());
  353. return true;
  354. });
  355. OP.Subscribe($"{Module}.{Name}.SetHighTemperatureHeaterTemperature", (cmd, args) =>
  356. {
  357. HighTemperatureHighHeaterTemperature = Convert.ToSingle(args[0]);
  358. return true;
  359. });
  360. OP.Subscribe($"{Module}.{Name}.SetHighTemperatureHeaterRatio", (cmd, args) =>
  361. {
  362. HighTemperatureHeaterRatio = Convert.ToSingle(args[0]);
  363. return true;
  364. });
  365. OP.Subscribe($"{Module}.{Name}.ResetHighTemperatureHeaterLift", (cmd, args) =>
  366. {
  367. ResetLift();
  368. return true;
  369. });
  370. OP.Subscribe($"{Module}.{Name}.ResetHighTemperatureHeater", (cmd, args) =>
  371. {
  372. ResetHeater();
  373. return true;
  374. });
  375. DATA.Subscribe($"{Module}.{Name}.DeviceData", () => DeviceData, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  376. DATA.Subscribe($"{Module}.{Name}.Temperature", () => DeviceData.HighTemperatureHeaterTemperatureFeedBack);
  377. DATA.Subscribe($"{Module}.{Name}.Position", () => (int)CurrentPosition - 1);
  378. DATA.Subscribe($"{Module}.{Name}.IsOn", () => DeviceData.HighTemperatureHeaterIsonFeedBack);
  379. DATA.Subscribe($"{Module}.{Name}.TemperatureSetPoint", () => DeviceData.HighTemperatureHeaterTemperatureSetPoint);
  380. DATA.Subscribe($"{Module}.{Name}.Power_Output", () => GetAiValue($"{Module}.AI_CHB_M-HT_Reference_Power_Output"));
  381. DATA.Subscribe($"{Module}.{Name}.MaxPower", () => GetAiValue($"{Module}.AI_CHB_M-HT_Max_Power"));
  382. DATA.Subscribe($"{Module}.{Name}.MinPower", () => GetAiValue($"{Module}.AI_CHB_M-HT_Min_Power"));
  383. DATA.Subscribe($"{Module}.{Name}.Speed", () => GetAiValue($"{Module}.AI_CHB_M-HT_Current_Speed"));
  384. DATA.Subscribe($"{Module}.{Name}.Posi_Mm", () => GetAiValue($"{Module}.AI_Lift_Servo_Current_Posi_Mm"));
  385. DATA.Subscribe($"{Module}.{Name}.TM_Temp", () => GetAiValue($"{Module}.AI_CHB_M-HT_Control_TM_Temp"));
  386. DATA.Subscribe($"{Module}.{Name}.InnerCurrent", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Current_FB"));
  387. DATA.Subscribe($"{Module}.{Name}.InnerVoltage", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Voltage_FB"));
  388. DATA.Subscribe($"{Module}.{Name}.InnerPower", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Power_FB"));
  389. DATA.Subscribe($"{Module}.{Name}.InnerResistance", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Resistance_FB"));
  390. DATA.Subscribe($"{Module}.{Name}.OuterCurrent", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Current_FB"));
  391. DATA.Subscribe($"{Module}.{Name}.OuterVoltage", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Voltage_FB"));
  392. DATA.Subscribe($"{Module}.{Name}.OuterPower", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Power_FB"));
  393. DATA.Subscribe($"{Module}.{Name}.OuterResistance", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Resistance_FB"));
  394. DATA.Subscribe($"{Module}.{Name}.PurgeN2Flow", () => GetAiValue($"{Module}.AI_Heater_Purge_N2_Flow"));
  395. DATA.Subscribe($"{Module}.{Name}.ShaftTCTemp", () => GetAiValue($"{Module}.AI_HTR_Shaft_TC_Temp"));
  396. DATA.Subscribe($"{Module}.{Name}.SourceTCTemp", () => GetAiValue($"{Module}.AI_Source_TC_Temp"));
  397. DATA.Subscribe($"{Module}.{Name}.HeaterDriverAlarm", () => _diMhtrErrorHeatStop.Value);
  398. //DATA.Subscribe($"{Module}.{Name}.InnerAlarmWord1", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Alarm_Word1"));
  399. //DATA.Subscribe($"{Module}.{Name}.InnerAlarmWord2", () => GetAiValue($"{Module}.AI_CHB_M-HT_Inner_Alarm_Word2"));
  400. //DATA.Subscribe($"{Module}.{Name}.OuterAlarmWord1", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Alarm_Word1"));
  401. //DATA.Subscribe($"{Module}.{Name}.OuterAlarmWord2", () => GetAiValue($"{Module}.AI_CHB_M-HT_Outer_Alarm_Word2"));
  402. DATA.Subscribe($"{Module}.{Name}.Ratio", () => HighTemperatureHeaterRatio);
  403. _SetRealFloat(_aoLiftServoPosition1, 20);
  404. _SetRealFloat(_aoLiftServoPosition2, -30);
  405. _SetRealFloat(_aoLiftServoPosition3, -40);
  406. _SetRealFloat(_aoLiftServoPosition4, 20);
  407. _SetRealFloat(_aoLiftServoPosition5, 50);
  408. _SetRealFloat(_aoOriginSearchHighSpeed, 10);
  409. _SetRealFloat(_aoOriginSearchLowSpeed, 5);
  410. _SetRealFloat(_aoAbsMoveSpeed, 10);
  411. _SetRealFloat(_aoMaximusMoveSpeed, 20);
  412. _SetRealFloat(_aoSoftDownLimit, 100);
  413. _SetRealFloat(_aoSoftUpLimit, 300);
  414. _heaterControlStopWatch.Start();
  415. return true;
  416. }
  417. public void Stop()
  418. {
  419. }
  420. public void Terminate()
  421. {
  422. }
  423. public void Monitor()
  424. {
  425. if (_originTimer.IsTimeout())
  426. {
  427. _originTimer.Stop();
  428. if (_diGoOriginFeedback.Value == false)
  429. {
  430. LOG.Write(eEvent.ERR_HighTemperatureHeater_GoOriginTimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到原点");
  431. }
  432. }
  433. else if (_originTimer.IsIdle() == false)
  434. {
  435. if (_diGoOriginFeedback.Value == true)
  436. {
  437. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Origin");
  438. _doGoOriginOn.Value = false;
  439. _originTimer.Stop();
  440. }
  441. }
  442. if (_position1Timer.IsTimeout())
  443. {
  444. _position1Timer.Stop();
  445. if (_diGoPosition1Feedback.Value == false)
  446. {
  447. LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition1TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position1");
  448. }
  449. if (_diWaferTransferPosiSW.Value == false)
  450. {
  451. LOG.Write(eEvent.ERR_HighTemperatureHeater_TransferPosition, Module, $"{Name} {_goPositionTime / 1000} s 内未到传片位");
  452. }
  453. }
  454. else if (_position1Timer.IsIdle() == false)
  455. {
  456. if (_diGoPosition1Feedback.Value == true && _diWaferTransferPosiSW.Value == true)
  457. {
  458. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position1");
  459. _doGoPosition1On.Value = false;
  460. _position1Timer.Stop();
  461. }
  462. }
  463. if (_position2Timer.IsTimeout())
  464. {
  465. _position2Timer.Stop();
  466. if (_diGoPosition2Feedback.Value == false)
  467. {
  468. LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition2TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position2");
  469. }
  470. }
  471. else if (_position2Timer.IsIdle() == false)
  472. {
  473. if (_diGoPosition2Feedback.Value == true)
  474. {
  475. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position2");
  476. _doGoPosition2On.Value = false;
  477. _position2Timer.Stop();
  478. }
  479. }
  480. if (_position3Timer.IsTimeout())
  481. {
  482. _position3Timer.Stop();
  483. if (_diGoPosition3Feedback.Value == false)
  484. {
  485. LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition3TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position3");
  486. }
  487. }
  488. else if (_position3Timer.IsIdle() == false)
  489. {
  490. if (_diGoPosition3Feedback.Value == true)
  491. {
  492. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position3");
  493. _doGoPosition3On.Value = false;
  494. _position3Timer.Stop();
  495. }
  496. }
  497. if (_position4Timer.IsTimeout())
  498. {
  499. _position4Timer.Stop();
  500. if (_diGoPosition4Feedback.Value == false)
  501. {
  502. LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition4TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position4");
  503. }
  504. }
  505. else if (_position4Timer.IsIdle() == false)
  506. {
  507. if (_diGoPosition4Feedback.Value == true)
  508. {
  509. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position4");
  510. _doGoPosition4On.Value = false;
  511. _position4Timer.Stop();
  512. }
  513. }
  514. if (_position5Timer.IsTimeout())
  515. {
  516. _position5Timer.Stop();
  517. if (_diGoPosition5Feedback.Value == false)
  518. {
  519. LOG.Write(eEvent.ERR_HighTemperatureHeater_GoPosition5TimeOut, Module, $"{Name} {_goPositionTime / 1000} s 内未到Position5");
  520. }
  521. }
  522. else if (_position5Timer.IsIdle() == false)
  523. {
  524. if (_diGoPosition5Feedback.Value == true)
  525. {
  526. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} to Position5");
  527. _doGoPosition5On.Value = false;
  528. _position5Timer.Stop();
  529. }
  530. }
  531. var position1Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition1");
  532. var position2Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition2") + (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPositionOffset");
  533. var position3Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition3") + (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPositionOffset");
  534. var position4Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition4") + (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPositionOffset");
  535. var position5Value = (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPosition5") + (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.LiftServoPositionOffset");
  536. _SetRealFloat(_aoLiftServoPosition1, position1Value);
  537. _SetRealFloat(_aoLiftServoPosition2, position2Value);
  538. _SetRealFloat(_aoLiftServoPosition3, position3Value);
  539. _SetRealFloat(_aoLiftServoPosition4, position4Value);
  540. _SetRealFloat(_aoLiftServoPosition5, position5Value);
  541. _SetRealFloat(_aoOriginSearchHighSpeed, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.OriginSearchHighSpeed"));
  542. _SetRealFloat(_aoOriginSearchLowSpeed, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.OriginSearchLowSpeed"));
  543. _SetRealFloat(_aoAbsMoveSpeed, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.AbsMoveSpeed"));
  544. _SetRealFloat(_aoMaximusMoveSpeed, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.MaximusMoveSpeed"));
  545. _SetRealFloat(_aoSoftDownLimit, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.SoftDownLimit"));
  546. _SetRealFloat(_aoSoftUpLimit, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.SoftUpLimit"));
  547. _SetRealFloat(_aoTemperatureSetPoint, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.Temperature"));
  548. _SetRealFloat(_aoRatio, (float)SC.GetValue<double>($"{Module}.HighTemperatureHeater.Ratio"));
  549. _doPowerOn.Value = SC.GetValue<bool>($"{Module}.HighTemperatureHeater.IsOn");
  550. if (_heaterControlStopWatch.ElapsedMilliseconds > 10 * 1000)
  551. {
  552. _heaterControlStopWatch.Restart();
  553. var innerWord1 = (int)_GetRealFloat(_aiHeaterInnerAlarmWord1);
  554. if (innerWord1 > 0 && innerWord1 != _innerWord1)
  555. {
  556. var innerWord1Value = ConvertToBitArray(innerWord1);
  557. AlarmWord1(innerWord1Value, "Inner Word1");
  558. }
  559. _innerWord1 = innerWord1;
  560. //_innerWord1 = innerWord1;
  561. //innerWord1_TRIG.CLK = innerWord1 > 0;
  562. //if (innerWord1_TRIG.Q)
  563. //{
  564. //}
  565. var innerWord2 = (int)_GetRealFloat(_aiHeaterInnerAlarmWord2);
  566. //innerWord2_TRIG.CLK = innerWord2 > 0;
  567. if (innerWord2 > 0 && innerWord2 != _innerWord2)
  568. {
  569. var innerWord2Value = ConvertToBitArray(innerWord2);
  570. AlarmWord2(innerWord2Value, "Inner Word2");
  571. }
  572. _innerWord2 = innerWord2;
  573. var outerWord1 = (int)_GetRealFloat(_aiHeaterOuterAlarmWord1);
  574. //outerWord1_TRIG.CLK = outerWord1 > 0;
  575. if (outerWord1 > 0 && outerWord1 != _outerWord1)
  576. {
  577. var outerWord1Value = ConvertToBitArray(outerWord1);
  578. AlarmWord1(outerWord1Value, "Outer Word1");
  579. }
  580. _outerWord1 = outerWord1;
  581. var outerWord2 = (int)_GetRealFloat(_aiHeaterOuterAlarmWord2);
  582. //outerWord2_TRIG.CLK = outerWord2> 0;
  583. if (outerWord2 > 0 && outerWord2 != _outerWord2)
  584. {
  585. var outerWord2Value = ConvertToBitArray(outerWord2);
  586. AlarmWord2(outerWord2Value, "Outer Word2");
  587. }
  588. _outerWord2 = outerWord2;
  589. }
  590. }
  591. public bool[] ConvertToBitArray(int number)
  592. {
  593. var bitArray = new bool[sizeof(int) * 8]; // 创建一个bool数组,大小为int类型的位数
  594. for (int i = 0; i < bitArray.Length; i++)
  595. {
  596. bitArray[i] = (number & (1 << i)) != 0; // 将number的第i位与1做位与运算,如果结果不为0,则该位为true
  597. }
  598. return bitArray;
  599. }
  600. private void AlarmWord1(bool[] word1, string name)
  601. {
  602. if (word1[0] == true)
  603. {
  604. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Missing Mains");
  605. }
  606. if (word1[1] == true)
  607. {
  608. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Thyristor short circuit");
  609. }
  610. if (word1[3] == true)
  611. {
  612. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Network Dips");
  613. }
  614. if (word1[4] == true)
  615. {
  616. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Frequency Fault");
  617. }
  618. if (word1[5] == true)
  619. {
  620. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} T.L.F");
  621. }
  622. if (word1[6] == true)
  623. {
  624. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Chop Off");
  625. }
  626. if (word1[7] == true)
  627. {
  628. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} P.L.F");
  629. }
  630. if (word1[8] == true)
  631. {
  632. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} P.L.U");
  633. }
  634. if (word1[9] == true)
  635. {
  636. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Over Voltage");
  637. }
  638. if (word1[10] == true)
  639. {
  640. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Under Voltage");
  641. }
  642. if (word1[12] == true)
  643. {
  644. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Over Current");
  645. }
  646. if (word1[14] == true)
  647. {
  648. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Analn Over Current");
  649. }
  650. if (word1[15] == true)
  651. {
  652. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} External Input");
  653. }
  654. }
  655. private void AlarmWord2(bool[] word2, string name)
  656. {
  657. if (word2[0] == true)
  658. {
  659. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Closed Loop break");
  660. }
  661. if (word2[1] == true)
  662. {
  663. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Transfer Active");
  664. }
  665. if (word2[2] == true)
  666. {
  667. LOG.Write(eEvent.WARN_HighTemperatureHeater, Module, $"{name} Limit Active");
  668. }
  669. }
  670. public bool LiftIsOK()
  671. {
  672. if (IsDriverAlarm)
  673. {
  674. LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Driver Alarm");
  675. return false;
  676. }
  677. if (IsPosiModuleAlarm)
  678. {
  679. LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Position Module Alarm");
  680. return false;
  681. }
  682. if (IsORGFailAlarm)
  683. {
  684. LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo ORG Fail Alarm");
  685. return false;
  686. }
  687. return true;
  688. }
  689. private bool LiftHardwareIsOK()
  690. {
  691. if (IsDriverAlarm)
  692. {
  693. LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Driver Alarm");
  694. return false;
  695. }
  696. if (IsPosiModuleAlarm)
  697. {
  698. LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo Position Module Alarm");
  699. return false;
  700. }
  701. return true;
  702. }
  703. private bool LiftSoftwareIsOK()
  704. {
  705. if (IsORGFailAlarm)
  706. {
  707. LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Lift Servo ORG Fail Alarm");
  708. return false;
  709. }
  710. return true;
  711. }
  712. public async void ResetLift()
  713. {
  714. if (_doResetHeater.Value == true)
  715. {
  716. _doResetHeater.Value = false;
  717. await Task.Delay(200);
  718. }
  719. _doResetHeater.Value = true;
  720. await Task.Delay(1000);
  721. _doResetHeater.Value = true;
  722. if (_doResetLift.Value == true)
  723. {
  724. _doResetLift.Value = false;
  725. await Task.Delay(200);
  726. }
  727. _doResetLift.Value = true;
  728. await Task.Delay(1000);
  729. _doResetLift.Value = false;
  730. _clearAlarmCounter = 0;
  731. while (IsDriverAlarm || IsPosiModuleAlarm)
  732. {
  733. _clearAlarmCounter += 1;
  734. if (_clearAlarmCounter > 5)
  735. {
  736. LOG.Write(eEvent.ERR_HighTemperatureHeater, Module, $"{Name} Clear Alarm Failed");
  737. return;
  738. }
  739. else
  740. {
  741. LOG.Write(eEvent.INFO_PM, Module, $"{Name} Clearing Alarm,Please wait");
  742. }
  743. await Task.Delay(1000);
  744. }
  745. GotoPosition(HighTemperatureHeaterPosition.Origin);
  746. }
  747. public async void ResetHeater()
  748. {
  749. if (_diMhtrErrorHeatStop.Value)
  750. {
  751. if (_doMhtrErrorReset.Value == true)
  752. {
  753. _doMhtrErrorReset.Value = false;
  754. await Task.Delay(200);
  755. }
  756. _doMhtrErrorReset.Value = true;
  757. LOG.Write(eEvent.INFO_HighTemperatureHeater, Module, $"{Name} Reset Heater");
  758. }
  759. }
  760. //private string FloatToHex(float value)
  761. //{
  762. // byte[] bytes = BitConverter.GetBytes(value);
  763. // StringBuilder stringBuffer = new StringBuilder();
  764. // for (int i = 0; i < bytes.Length; i++)
  765. // {
  766. // string hex = Convert.ToString(bytes[i], 2);
  767. // stringBuffer.Insert(0, hex);
  768. // for (int j = hex.Length; j < 8; j++)
  769. // {
  770. // stringBuffer.Insert(0, "0");
  771. // }
  772. // }
  773. // return stringBuffer.ToString();
  774. //}
  775. public void Reset()
  776. {
  777. }
  778. }
  779. }