| .. |
|
EFEM
|
8bb5f3f4f9
fixed loadport event notify;
|
il y a 1 an |
|
EPD
|
4ffafb6001
EFEM界面优化
|
il y a 1 an |
|
EPDs
|
4ffafb6001
EFEM界面优化
|
il y a 1 an |
|
IODevices
|
5c995238da
1.修复kepler流气模拟器bug
|
il y a 1 an |
|
PreAligner
|
31bbc4482b
update ui && rt && simu for Venus SE
|
il y a 1 an |
|
SMIF
|
c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
|
il y a 1 an |
|
TM
|
d308f9a645
Improved TM Transfer and Robot Arm, updated and uploaded SeTMViewModel.cs、VenusSeOperationOverView.cs、HongHuVR.cs、SETMEntity.cs、Generic、SERobot.cs、SEMFPMRetractRoutine.cs、SEMFPMExtendRoutine.cs.
|
il y a 1 an |
|
VCE
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
il y a 1 an |
|
AIRSYSChiller.cs
|
6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
|
il y a 1 an |
|
AdTecRF.cs
|
4338503e2a
1.添加霍庭格RF Device
|
il y a 1 an |
|
AdixenTurboPump.cs
|
171eef8acc
Add to chart@@to slot switch page function
|
il y a 1 an |
|
CometRF.cs
|
c0ff9f251e
1.添加kepler2200B
|
il y a 1 an |
|
DataDefine.cs
|
6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
|
il y a 1 an |
|
DeviceManager.cs
|
d18b2c8e6a
Add VenusDE PM UI, Viewmodel, Simulator
|
il y a 1 an |
|
ESC5HighVoltage.cs
|
f3bd6b016b
添加部分efem功能
|
il y a 1 an |
|
EdwardsPump.cs
|
be22c5112d
TM 添加两个pump 串口23/24/25/26
|
il y a 1 an |
|
FinsPlc.cs
|
c457973fa2
1.添加Revtech Match
|
il y a 1 an |
|
JetEPDBase.cs
|
4ffafb6001
EFEM界面优化
|
il y a 1 an |
|
JetEfem.cs
|
5fc13b3f0c
New Efem design
|
il y a 1 an |
|
JetKepler2200APM.cs
|
f8c50b602a
修复Tolerance对流气不开阀的bug
|
il y a 1 an |
|
JetKepler2200BPM.cs
|
f8c50b602a
修复Tolerance对流气不开阀的bug
|
il y a 1 an |
|
JetKepler2300PM.cs
|
4338503e2a
1.添加霍庭格RF Device
|
il y a 1 an |
|
JetPMBase.cs
|
44fc6989ef
1、Remove FabConnect dll file;
|
il y a 1 an |
|
JetVenusPM.cs
|
4338503e2a
1.添加霍庭格RF Device
|
il y a 1 an |
|
JetVenusSEPM.cs
|
0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
|
il y a 1 an |
|
JetVenusSEPMBase.cs
|
56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
|
il y a 1 an |
|
PendulumValve.cs
|
6910d4754e
代码合并
|
il y a 1 an |
|
PlasmaController.cs
|
75710d35d8
RF Match.
|
il y a 2 ans |
|
RevtechMatch.cs
|
5e8bf0ff14
1.重绘window窗体
|
il y a 1 an |
|
SMCChiller.cs
|
c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
|
il y a 1 an |
|
SkyPump.cs
|
44fc6989ef
1、Remove FabConnect dll file;
|
il y a 1 an |
|
TruPlasmaRF.cs
|
4338503e2a
1.添加霍庭格RF Device
|
il y a 1 an |
|
VirgoSignalTower.cs
|
bdec2c0d74
1.修改TM robot模拟器
|
il y a 1 an |
intern02
d308f9a645
Improved TM Transfer and Robot Arm, updated and uploaded SeTMViewModel.cs、VenusSeOperationOverView.cs、HongHuVR.cs、SETMEntity.cs、Generic、SERobot.cs、SEMFPMRetractRoutine.cs、SEMFPMExtendRoutine.cs.