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UILayout.xml
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b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
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2 years ago |
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_ioDefineKepler2200A.xml
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5f00a42d13
kepler2200A 添加 IOHighTemperatureHeater驱动，并添加模拟器与UI界面功能
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2 years ago |
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_ioDefineKepler2300.xml
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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2 years ago |
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_ioDefineVenus.xml
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8f80478982
1.添加IoSwitch
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2 years ago |
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_ioDefineVenusSE.xml
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dfc9174ac8
VenusSE TM PM Simulator Update
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2 years ago |
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_ioDefineVenusSE_MF.xml
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afc3b9494f
VenusSE TM pressurecontrol update
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2 years ago |
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_ioDefineVenus_MF.xml
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28b8f5e03a
根据最新的TM sequence修改代码，修改DO-04功能为Vent Valve TM
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2 years ago |
hecl
afc3b9494f
VenusSE TM pressurecontrol update