| .. |
|
ClientBase
|
e00ff4f30d
1.高温Heater position1-position5加上动画
|
11 月之前 |
|
Common
|
8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
|
10 月之前 |
|
OpenControl
|
e00ff4f30d
1.高温Heater position1-position5加上动画
|
11 月之前 |
|
OpenSEMICore
|
e00ff4f30d
1.高温Heater position1-position5加上动画
|
11 月之前 |
|
RTCore
|
d8b75084d0
添加RT UI 模块选择功能
|
1 年之前 |
|
RTEquipmentLibrary
|
1929a3510b
1.新版ui界面开发
|
1 年之前 |
|
RTModuleLibrary
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
1 年之前 |
|
SequenceControl
|
124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
|
1 年之前 |
|
SimulatorCore
|
d35b997884
1.优化RevtechMatch状态机
|
1 年之前 |
|
Test
|
da4e6f6a4e
Recipe功能完善
|
2 年之前 |
|
UICore
|
0a2d5ac547
Venus DE TM simulator add
|
11 月之前 |
zhouhr
8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI