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ClientBase
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e00ff4f30d
1.高温Heater position1-position5加上动画
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1 éve%!(EXTRA string=óta) |
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Common
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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11 hónapja%!(EXTRA string=óta) |
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OpenControl
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e00ff4f30d
1.高温Heater position1-position5加上动画
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1 éve%!(EXTRA string=óta) |
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OpenSEMICore
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e00ff4f30d
1.高温Heater position1-position5加上动画
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1 éve%!(EXTRA string=óta) |
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RTCore
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d8b75084d0
添加RT UI 模块选择功能
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1 éve%!(EXTRA string=óta) |
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RTEquipmentLibrary
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1929a3510b
1.新版ui界面开发
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1 éve%!(EXTRA string=óta) |
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RTModuleLibrary
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 éve%!(EXTRA string=óta) |
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SequenceControl
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124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
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1 éve%!(EXTRA string=óta) |
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SimulatorCore
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d35b997884
1.优化RevtechMatch状态机
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1 éve%!(EXTRA string=óta) |
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Test
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da4e6f6a4e
Recipe功能完善
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2 éve%!(EXTRA string=óta) |
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UICore
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0a2d5ac547
Venus DE TM simulator add
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11 hónapja%!(EXTRA string=óta) |
zhouhr
8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI