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PM
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9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
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1 year ago |
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TM
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1b165a2e61
Venus DE update && Venus SE simulator update
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1 year ago |
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ClusterGemModel.xml
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60e9a04892
Simulator LP3 Update
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1 year ago |
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DBModel.sql
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df4447c2d2
PMhomeRoutine add VenusDE chambertype
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1 year ago |
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DeviceModel.xsd
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d8e5f1dc2c
2022 last update
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2 years ago |
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EquipmentVariables.xml
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44fc6989ef
1、Remove FabConnect dll file;
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1 year ago |
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EventDefine.xml
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3f9c41937a
update for event module enhancement
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2 years ago |
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IoProviderConfig.xml
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
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LogDefine.json
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
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RecipeFormat.xml
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9760d40cf7
port simulator
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2 years ago |
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SESequenceFormat.xml
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
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SequenceFormat.xml
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4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
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1 year ago |
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SignalTower.xml
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3a078d515d
1.修复ui灯闪烁错误bug
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1 year ago |
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System.sccfg
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 year ago |
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System_Kepler2200.sccfg
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
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VenusPreProcess.py
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64c7ef574e
log
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2 years ago |
hecl
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update