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ClientBase
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e00ff4f30d
1.高温Heater position1-position5加上动画
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hai 1 ano |
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Common
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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hai 1 ano |
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OpenControl
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e00ff4f30d
1.高温Heater position1-position5加上动画
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hai 1 ano |
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OpenSEMICore
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e00ff4f30d
1.高温Heater position1-position5加上动画
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hai 1 ano |
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RTCore
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d8b75084d0
添加RT UI 模块选择功能
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hai 1 ano |
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RTEquipmentLibrary
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1929a3510b
1.新版ui界面开发
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hai 1 ano |
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RTModuleLibrary
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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hai 1 ano |
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SequenceControl
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124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
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hai 1 ano |
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SimulatorCore
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d35b997884
1.优化RevtechMatch状态机
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hai 1 ano |
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Test
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da4e6f6a4e
Recipe功能完善
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%!s(int64=2) %!d(string=hai) anos |
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UICore
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0a2d5ac547
Venus DE TM simulator add
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hai 1 ano |
zhouhr
0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM