| .. |
|
EFEM
|
b71003a42d
Fix the increasing aligner angle out of range bug.
|
1 anno fa |
|
LLs
|
c3bef13a6e
Enhance Auto pump/vent algorithm.
|
1 anno fa |
|
LPs
|
8bb5f3f4f9
fixed loadport event notify;
|
1 anno fa |
|
PMs
|
df4447c2d2
PMhomeRoutine add VenusDE chambertype
|
1 anno fa |
|
SMIF
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
1 anno fa |
|
Schedulers
|
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
|
1 anno fa |
|
TM
|
984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
|
1 anno fa |
|
VCE
|
984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
|
1 anno fa |
|
AutoCycle.cs
|
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
|
1 anno fa |
|
Autotransfer_LP_FA.cs
|
8bb5f3f4f9
fixed loadport event notify;
|
1 anno fa |
|
DVIDName.cs
|
44fc6989ef
1、Remove FabConnect dll file;
|
1 anno fa |
|
EntityTaskBase.cs
|
5b037046f9
Add TM/LL modules.
|
2 anni fa |
|
ManualTransfer.cs
|
501997ac38
TM/EFEM robot single arm option.
|
1 anno fa |
|
ResourceMonitor.cs
|
8436daeb68
Eliminate SE generation warning.
|
1 anno fa |
|
RouteManager.cs
|
12eb71a75f
Redesign the Clean recipe algorithm and fix the throughput calculation bug.
|
1 anno fa |
|
SEManualTransfer.cs
|
0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
|
1 anno fa |
|
SETMCycle.cs
|
9d9b666ea4
Venus SE Update
|
1 anno fa |
|
TMCycle.cs
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 anno fa |
zhouhr
984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure