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VenusEntity
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 vuosi sitten |
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MFControlPressureRoutine.cs
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 vuosi sitten |
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MFHomeRoutine.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 vuosi sitten |
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MFLeakCheckRoutine.cs
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 vuosi sitten |
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MFPMExtendRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 vuosi sitten |
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MFPMPickRoutine.cs
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 vuosi sitten |
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MFPMPlaceRoutine.cs
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4338503e2a
1.添加霍庭格RF Device
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1 vuosi sitten |
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MFPMRetractRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 vuosi sitten |
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MFPMSwapRoutine.cs
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236244c8a0
redesign wtw clean function and fix auto vent bug.
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1 vuosi sitten |
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MFPickRoutine.cs
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236244c8a0
redesign wtw clean function and fix auto vent bug.
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1 vuosi sitten |
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MFPlaceRoutine.cs
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236244c8a0
redesign wtw clean function and fix auto vent bug.
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1 vuosi sitten |
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MFPumpRoutine.cs
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 vuosi sitten |
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MFPurgeRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 vuosi sitten |
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MFSwapRoutine.cs
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73f0d306a7
Enhance routing algorithm.
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1 vuosi sitten |
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MFVentRoutine.cs
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e511d1f387
1.添加PM控压功能
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1 vuosi sitten |
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TMEntity.cs
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 vuosi sitten |
zhouhr
984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure