| .. |
|
EFEM
|
ec2f97e62d
enhance log.
|
1 ano atrás |
|
LLs
|
c3bef13a6e
Enhance Auto pump/vent algorithm.
|
2 anos atrás |
|
LPs
|
03063bae6a
Enhance the routine framework.
|
2 anos atrás |
|
PMs
|
4338503e2a
1.添加霍庭格RF Device
|
1 ano atrás |
|
SMIF
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
1 ano atrás |
|
Schedulers
|
ec2f97e62d
enhance log.
|
1 ano atrás |
|
TM
|
4338503e2a
1.添加霍庭格RF Device
|
1 ano atrás |
|
VCE
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
1 ano atrás |
|
AutoCycle.cs
|
02efc78270
fix the WTWClean bug while PM Swap wafer.
|
1 ano atrás |
|
Autotransfer_LP_FA.cs
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
1 ano atrás |
|
EntityTaskBase.cs
|
5b037046f9
Add TM/LL modules.
|
2 anos atrás |
|
ManualTransfer.cs
|
501997ac38
TM/EFEM robot single arm option.
|
2 anos atrás |
|
ResourceMonitor.cs
|
0ed42d17d1
fix bugs for WaferOffset
|
2 anos atrás |
|
RouteManager.cs
|
dbb753dd44
Pause functionality.
|
1 ano atrás |
|
SEManualTransfer.cs
|
0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
|
1 ano atrás |
|
SETMCycle.cs
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
1 ano atrás |
|
TMCycle.cs
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
1 ano atrás |
lixiang
4338503e2a
1.添加霍庭格RF Device