Browse Source

fix the WTWClean bug while PM Swap wafer.

sangwq 1 year ago
parent
commit
02efc78270
1 changed files with 1 additions and 1 deletions
  1. 1 1
      Venus/Venus_RT/Modules/AutoCycle.cs

+ 1 - 1
Venus/Venus_RT/Modules/AutoCycle.cs

@@ -1212,7 +1212,7 @@ namespace Venus_RT.Modules
                     if (wafer.ProcessJob.Sequence.Steps[wafer.NextSequenceStep].StepModules.Contains(mod.Key))
                     {
                         if ((WaferManager.Instance.CheckNoWafer(mod.Key, 0) && !_movingItems.Exists(item => item.DestinationModule == mod.Key)) ||
-                            (WaferManager.Instance.CheckHasWafer(mod.Key, 0) && _movingItems.Exists(item => item.SourceModule == mod.Key) && !_movingItems.Exists(item => item.DestinationModule == mod.Key)))
+                            (WaferManager.Instance.CheckHasWafer(mod.Key, 0) && _movingItems.Exists(item => item.SourceModule == mod.Key) && !_movingItems.Exists(item => item.DestinationModule == mod.Key) && !IsPMNeedWTWClean(mod.Key)))
                         {
                             inSlot.Module = mod.Key;
                             inSlot.Slot = 0;