SchedulerPM.cs 17 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Diagnostics;
  4. using System.Linq;
  5. using System.Text;
  6. using System.Threading.Tasks;
  7. using Aitex.Core.Common;
  8. using Aitex.Core.RT.DataCenter;
  9. using Aitex.Core.RT.Device;
  10. using Aitex.Core.RT.Event;
  11. using Aitex.Core.RT.Fsm;
  12. using Aitex.Core.RT.Log;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.Util;
  15. using Aitex.Sorter.Common;
  16. using Aitex.Core.RT.RecipeCenter;
  17. using Venus_RT.Modules;
  18. using Venus_RT.Modules.PMs;
  19. using MECF.Framework.Common.Equipment;
  20. using MECF.Framework.Common.Schedulers;
  21. using MECF.Framework.Common.SubstrateTrackings;
  22. using Venus_RT.Devices;
  23. using Venus_Core;
  24. using MECF.Framework.Common.DataCenter;
  25. using System.IO;
  26. namespace Venus_RT.Scheduler
  27. {
  28. public class SchedulerPM : SchedulerModule
  29. {
  30. public override bool IsAvailable
  31. {
  32. get { return _entity.IsIdle && _entity.IsInclude && (_entity.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode) && CheckTaskDone(); }
  33. }
  34. public override bool IsOnline
  35. {
  36. get { return _entity != null && _entity.IsOnline; }
  37. }
  38. public override bool IsError
  39. {
  40. get { return _entity.IsError; }
  41. }
  42. public override bool IsIdle
  43. {
  44. get { return _entity.IsIdle; }
  45. }
  46. public override bool IsVac
  47. {
  48. get { return _entity.IsVac; }
  49. }
  50. public override bool IsAtm
  51. {
  52. get { return _entity.IsAtm; }
  53. }
  54. public override int TimeToReady
  55. {
  56. get { return _entity.TimeToReady; }
  57. }
  58. public TaskType Task => _task;
  59. private PMEntity _entity = null;
  60. private ModuleName _taskRobot;
  61. private EnumTransferType _taskTransferType;
  62. private Hand _taskBlade;
  63. private int _taskSlot;
  64. private int _entityTaskToken = (int)FSM_MSG.NONE;
  65. private DeviceTimer _timerProcess = new DeviceTimer();
  66. private JetPMBase _pm;
  67. private int _idleCleanOpt = 0;
  68. private int _idleCleanHourSetPoint;
  69. private int _idleCleanWaferSetPoint;
  70. private int _idleCleanWaferCount;
  71. private string _idleCleanRecipe;
  72. private DateTime _lastRunTime = new DateTime();
  73. private float _paramTemp;
  74. public float Temperature
  75. {
  76. get
  77. {
  78. //if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller"))
  79. //{
  80. // return _pm.CoolantOutletTempFB;
  81. //}
  82. //return _pm.SubstrateTempFB;
  83. return _pm.CoolantOutletTempFB;
  84. }
  85. }
  86. public SchedulerPM(ModuleName chamber) : base(chamber.ToString())
  87. {
  88. _entity = Singleton<RouteManager>.Instance.GetPM(chamber);
  89. _pm = DEVICE.GetDevice<JetPMBase>(Module.ToString());
  90. EventWaferArrived += WaferArrived;
  91. LoadIdleCleanOpt();
  92. }
  93. public void InitClean()
  94. {
  95. //DATA.Subscribe($"{Module}.IdlePurgeNextRunTime", () => IdlePurgeNextRunTime);
  96. //DATA.Subscribe($"{Module}.IdleCleanNextRunTime", () => IdleCleanNextRunTime);
  97. }
  98. public override bool IsReadyForPick(ModuleName robot, int slot, Hand blade)
  99. {
  100. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Pick, slot, blade)
  101. && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
  102. }
  103. public override bool IsReadyForPlace(ModuleName robot, int slot, Hand blade)
  104. {
  105. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Place, slot, blade)
  106. && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot);
  107. }
  108. public bool IsTemperatureReady(float temp)
  109. {
  110. return Math.Abs(Temperature - temp) < SC.GetValue<double>("System.MaxTemperatureToleranceTransferWafer");
  111. }
  112. public bool IsPrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  113. {
  114. return _task == TaskType.PrepareTransfer && _taskRobot == robot && _taskSlot == slot &&
  115. _taskTransferType == type;
  116. }
  117. public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  118. {
  119. _task = TaskType.PrepareTransfer;
  120. _taskRobot = robot;
  121. _taskSlot = slot;
  122. _taskTransferType = type;
  123. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot);
  124. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  125. return _entityTaskToken != (int)FSM_MSG.NONE;
  126. }
  127. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade)
  128. {
  129. _task = TaskType.PrepareTransfer;
  130. _taskRobot = robot;
  131. _taskSlot = slot;
  132. _taskBlade = blade;
  133. _taskTransferType = type;
  134. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp);
  135. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  136. return _entityTaskToken != (int)FSM_MSG.NONE;
  137. }
  138. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade, WaferSize size)
  139. {
  140. _task = TaskType.PrepareTransfer;
  141. _taskRobot = robot;
  142. _taskSlot = slot;
  143. _taskBlade = blade;
  144. _taskTransferType = type;
  145. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp, size);
  146. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}, {size}");
  147. return _entityTaskToken != (int)FSM_MSG.NONE;
  148. }
  149. public override bool PostTransfer(ModuleName robot, EnumTransferType type, int slot)
  150. {
  151. StopWaitTransfer(robot);
  152. _task = TaskType.PostTransfer;
  153. _taskRobot = robot;
  154. _taskSlot = slot;
  155. _taskTransferType = type;
  156. _entityTaskToken = _entity.InvokePostTransfer(robot, type, slot);
  157. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  158. return _entityTaskToken != (int)FSM_MSG.NONE;
  159. }
  160. public override bool PostTransfer(ModuleName robot)
  161. {
  162. StopWaitTransfer(robot);
  163. _task = TaskType.PostTransfer;
  164. _taskRobot = robot;
  165. _taskSlot = _inTransferSlot;
  166. _taskTransferType = _inTransferType;
  167. _entityTaskToken = _entity.InvokePostTransfer(robot, _inTransferType, _inTransferSlot);
  168. LogTaskStart(_task, $"{robot} {_inTransferType} slot {_inTransferSlot + 1}");
  169. return _entityTaskToken != (int)FSM_MSG.NONE;
  170. }
  171. public override bool Process(string recipeName, bool isCleanRecipe, RecipeType recipeType, WaferInfo wafer)
  172. {
  173. bool withWafer;
  174. if (recipeType == RecipeType.Clean)
  175. {
  176. withWafer = false;
  177. }
  178. else
  179. {
  180. withWafer = true;
  181. }
  182. _task = TaskType.Process;
  183. LogTaskStart(_task, $"recipe: {recipeName}, clean: {isCleanRecipe}, with wafer: {withWafer}");
  184. if (RouteManager.IsATMMode)
  185. {
  186. int time = SC.GetValue<int>("System.ATMCyclePMDelayTime");
  187. _timerProcess.Start(time * 1000);
  188. LOG.Write(eEvent.EV_SCHEDULER, Module, $"System run in ATM mode, process skipped, delay {time} seconds");
  189. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.InProcess);
  190. return true;
  191. }
  192. else
  193. {
  194. if(isCleanRecipe)
  195. {
  196. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  197. }
  198. else
  199. {
  200. _entityTaskToken = _entity.InvokeProcess(recipeName, wafer.WaferOrigin, RecipeType.Process);
  201. }
  202. return _entityTaskToken != (int)FSM_MSG.NONE;
  203. }
  204. }
  205. public override bool Preheating(float temperature)
  206. {
  207. _task = TaskType.Heating;
  208. _paramTemp = temperature;
  209. _entityTaskToken = _entity.InvokePreHeat(temperature);
  210. LogTaskStart(_task, $"preheat to {temperature}");
  211. return _entityTaskToken != (int)FSM_MSG.NONE;
  212. }
  213. public bool CheckTaskDone()
  214. {
  215. bool ret = false;
  216. switch (_task)
  217. {
  218. case TaskType.None:
  219. ret = true;
  220. break;
  221. case TaskType.PrepareTransfer:
  222. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsPrepareTransferReady(_taskRobot, _taskTransferType == EnumTransferType.Swap ? EnumTransferType.Pick : _taskTransferType, _taskSlot, _taskBlade);
  223. break;
  224. case TaskType.PostTransfer:
  225. ret = _entity.CheckAcked(_entityTaskToken);
  226. break;
  227. case TaskType.Heating:
  228. ret = _entity.CheckAcked(_entityTaskToken) && IsTemperatureReady(_paramTemp);
  229. break;
  230. case TaskType.Process:
  231. case TaskType.IdlePurgeProcess:
  232. case TaskType.IdleCleanProcess:
  233. case TaskType.PreJobProcess:
  234. case TaskType.CompleteJobProcess:
  235. if (RouteManager.IsATMMode)
  236. {
  237. ret = _timerProcess.IsTimeout() && _entity.IsIdle;
  238. if (ret)
  239. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
  240. }
  241. else
  242. {
  243. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsIdle;
  244. }
  245. break;
  246. }
  247. if (ret && _task != TaskType.None)
  248. {
  249. LogTaskDone(_task, "");
  250. _task = TaskType.None;
  251. }
  252. return ret;
  253. }
  254. public bool Monitor()
  255. {
  256. return true;
  257. }
  258. public void SetPMAuto()
  259. {
  260. _entity.SetAuto();
  261. }
  262. public bool IdlePurgeProcess(string recipeName)
  263. {
  264. _task = TaskType.IdlePurgeProcess;
  265. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  266. LogTaskStart(_task, $"recipe: {recipeName}, clean: {false}, with wafer: {false}");
  267. return _entityTaskToken != (int)FSM_MSG.NONE;
  268. }
  269. public bool IdleCleanProcess(string recipeName)
  270. {
  271. _task = TaskType.IdleCleanProcess;
  272. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  273. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  274. return _entityTaskToken != (int)FSM_MSG.NONE;
  275. }
  276. public void PreJobClean()
  277. {
  278. }
  279. public bool PreJobProcess(string recipeName)
  280. {
  281. _task = TaskType.PreJobProcess;
  282. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  283. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  284. return _entityTaskToken != (int)FSM_MSG.NONE;
  285. }
  286. public bool CompleteJobProcess(string recipeName)
  287. {
  288. _task = TaskType.CompleteJobProcess;
  289. _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
  290. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  291. return _entityTaskToken != (int)FSM_MSG.NONE;
  292. }
  293. private void WaferArrived(object sender, EventArgs e)
  294. {
  295. if(WaferManager.Instance.CheckHasWafer(Module, 0))
  296. {
  297. WaferInfo wafer = WaferManager.Instance.GetWafer(Module, 0);
  298. string recipeName = wafer.ProcessJob.Sequence.GetRecipe(Module);
  299. if (recipeName.Length > 0)
  300. {
  301. Process(recipeName, false, RecipeType.Process, wafer);
  302. }
  303. else
  304. {
  305. LOG.Write(eEvent.WARN_SCHEDULER, Module, "Cannot run process as get recipe failed.");
  306. }
  307. }
  308. else
  309. {
  310. LOG.Write(eEvent.WARN_SCHEDULER, Module, "Cannot run process as PM is empty");
  311. }
  312. }
  313. public override void ResetTask()
  314. {
  315. _entity.ResetRecipeTime();
  316. base.ResetTask();
  317. }
  318. #region clean task
  319. private void LoadIdleCleanOpt()
  320. {
  321. // Load Idle Clean Config
  322. _idleCleanOpt = SC.GetValue<int>($"{Module}.IdleClean.Option");
  323. _idleCleanHourSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanTime");
  324. _idleCleanWaferSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanWaferCount");
  325. _idleCleanWaferCount = SC.GetValue<int>($"{Module}.IdleClean.WaferCountSinceLastClean");
  326. _idleCleanRecipe = SC.GetStringValue($"{Module}.IdleClean.IdleCleanRecipe");
  327. string lastRun = SC.GetStringValue($"{Module}.IdleClean.LastRunTime");
  328. if (lastRun.Length > 10)
  329. {
  330. try
  331. {
  332. _lastRunTime = DateTime.Parse(lastRun);
  333. }
  334. catch
  335. {
  336. lastRun = string.Empty;
  337. }
  338. }
  339. if (lastRun.Length <= 10)
  340. {
  341. _lastRunTime = DateTime.Now;
  342. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  343. }
  344. // validate the idle clean recipe name
  345. string path = Path.Combine("Recipes", Module.ToString(), "Clean", $"{_idleCleanRecipe}.rcp");
  346. string recipeContent = RecipeFileManager.Instance.LoadRecipeByPath(path);
  347. Recipe recipe = Recipe.Load(recipeContent);
  348. if (recipe == null)
  349. {
  350. _idleCleanRecipe = string.Empty;
  351. }
  352. }
  353. public void WaferProcessDone()
  354. {
  355. _lastRunTime = DateTime.Now;
  356. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  357. _idleCleanWaferCount++;
  358. SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
  359. }
  360. private void ResetIdleCleanCounter()
  361. {
  362. _lastRunTime = DateTime.Now;
  363. SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
  364. _idleCleanWaferCount = 0;
  365. SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
  366. }
  367. public bool RunIdleCleanTask()
  368. {
  369. if(_idleCleanOpt == 1)
  370. {
  371. TimeSpan span = DateTime.Now - _lastRunTime;
  372. if(span.TotalHours >= _idleCleanHourSetPoint)
  373. {
  374. Process(_idleCleanRecipe, true, RecipeType.Clean, null);
  375. ResetIdleCleanCounter();
  376. return true;
  377. }
  378. }
  379. else if(_idleCleanOpt == 2)
  380. {
  381. if(_idleCleanWaferCount >= _idleCleanWaferSetPoint)
  382. {
  383. Process(_idleCleanRecipe, true, RecipeType.Clean, null);
  384. ResetIdleCleanCounter();
  385. return true;
  386. }
  387. }
  388. return false;
  389. }
  390. public bool RunJobCleanTask(string jobCleanRecipe)
  391. {
  392. // validate the job clean recipe name
  393. //string recipeContent = RecipeFileManager.Instance.LoadRecipe(Module.ToString(), jobCleanRecipe, false);
  394. string path = Path.Combine( "Recipes", Module.ToString(),"Clean" , $"{jobCleanRecipe}.rcp");
  395. string recipeContent = RecipeFileManager.Instance.LoadRecipeByPath(path);
  396. if (recipeContent.Length == 0)
  397. {
  398. return false;
  399. }
  400. Recipe recipe = Recipe.Load(recipeContent);
  401. if (recipe == null)
  402. {
  403. LOG.Write(eEvent.WARN_ROUTER, Module, $"Loading clean recipe: {path} failed");
  404. return false;
  405. }
  406. return Process(jobCleanRecipe, true, RecipeType.Clean, null);
  407. }
  408. #endregion
  409. }
  410. }