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- using System;
- using System.Collections.Generic;
- using System.Diagnostics;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using Aitex.Core.Common;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using Aitex.Sorter.Common;
- using Aitex.Core.RT.RecipeCenter;
- using Venus_RT.Modules;
- using Venus_RT.Modules.PMs;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Schedulers;
- using MECF.Framework.Common.SubstrateTrackings;
- using Venus_RT.Devices;
- using Venus_Core;
- using MECF.Framework.Common.DataCenter;
- using System.IO;
- namespace Venus_RT.Scheduler
- {
- public class SchedulerPM : SchedulerModule
- {
- public override bool IsAvailable
- {
- get { return _entity.IsIdle && _entity.IsInclude && (_entity.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode) && CheckTaskDone(); }
- }
- public override bool IsOnline
- {
- get { return _entity != null && _entity.IsOnline; }
- }
- public override bool IsError
- {
- get { return _entity.IsError; }
- }
- public override bool IsIdle
- {
- get { return _entity.IsIdle; }
- }
- public override bool IsVac
- {
- get { return _entity.IsVac; }
- }
- public override bool IsAtm
- {
- get { return _entity.IsAtm; }
- }
- public override int TimeToReady
- {
- get { return _entity.TimeToReady; }
- }
-
- public TaskType Task => _task;
- private PMEntity _entity = null;
- private ModuleName _taskRobot;
- private EnumTransferType _taskTransferType;
- private Hand _taskBlade;
- private int _taskSlot;
- private int _entityTaskToken = (int)FSM_MSG.NONE;
- private DeviceTimer _timerProcess = new DeviceTimer();
- private JetPMBase _pm;
- private int _idleCleanOpt = 0;
- private int _idleCleanHourSetPoint;
- private int _idleCleanWaferSetPoint;
- private int _idleCleanWaferCount;
- private string _idleCleanRecipe;
- private DateTime _lastRunTime = new DateTime();
- private float _paramTemp;
- public float Temperature
- {
- get
- {
- //if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller"))
- //{
- // return _pm.CoolantOutletTempFB;
- //}
- //return _pm.SubstrateTempFB;
- return _pm.CoolantOutletTempFB;
- }
- }
- public SchedulerPM(ModuleName chamber) : base(chamber.ToString())
- {
- _entity = Singleton<RouteManager>.Instance.GetPM(chamber);
- _pm = DEVICE.GetDevice<JetPMBase>(Module.ToString());
- EventWaferArrived += WaferArrived;
- LoadIdleCleanOpt();
- }
- public void InitClean()
- {
- //DATA.Subscribe($"{Module}.IdlePurgeNextRunTime", () => IdlePurgeNextRunTime);
- //DATA.Subscribe($"{Module}.IdleCleanNextRunTime", () => IdleCleanNextRunTime);
- }
- public override bool IsReadyForPick(ModuleName robot, int slot, Hand blade)
- {
- return _entity.IsPrepareTransferReady(robot, EnumTransferType.Pick, slot, blade)
- && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
- }
- public override bool IsReadyForPlace(ModuleName robot, int slot, Hand blade)
- {
- return _entity.IsPrepareTransferReady(robot, EnumTransferType.Place, slot, blade)
- && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot);
- }
- public bool IsTemperatureReady(float temp)
- {
- return Math.Abs(Temperature - temp) < SC.GetValue<double>("System.MaxTemperatureToleranceTransferWafer");
- }
- public bool IsPrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
- {
- return _task == TaskType.PrepareTransfer && _taskRobot == robot && _taskSlot == slot &&
- _taskTransferType == type;
- }
- public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
- {
- _task = TaskType.PrepareTransfer;
- _taskRobot = robot;
- _taskSlot = slot;
- _taskTransferType = type;
- _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot);
- LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade)
- {
- _task = TaskType.PrepareTransfer;
- _taskRobot = robot;
- _taskSlot = slot;
- _taskBlade = blade;
- _taskTransferType = type;
- _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp);
- LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade, WaferSize size)
- {
- _task = TaskType.PrepareTransfer;
- _taskRobot = robot;
- _taskSlot = slot;
- _taskBlade = blade;
- _taskTransferType = type;
- _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp, size);
- LogTaskStart(_task, $"{robot} {type} slot {slot + 1}, {size}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- public override bool PostTransfer(ModuleName robot, EnumTransferType type, int slot)
- {
- StopWaitTransfer(robot);
- _task = TaskType.PostTransfer;
- _taskRobot = robot;
- _taskSlot = slot;
- _taskTransferType = type;
- _entityTaskToken = _entity.InvokePostTransfer(robot, type, slot);
- LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- public override bool PostTransfer(ModuleName robot)
- {
- StopWaitTransfer(robot);
- _task = TaskType.PostTransfer;
- _taskRobot = robot;
- _taskSlot = _inTransferSlot;
- _taskTransferType = _inTransferType;
- _entityTaskToken = _entity.InvokePostTransfer(robot, _inTransferType, _inTransferSlot);
- LogTaskStart(_task, $"{robot} {_inTransferType} slot {_inTransferSlot + 1}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- public override bool Process(string recipeName, bool isCleanRecipe, RecipeType recipeType, WaferInfo wafer)
- {
- bool withWafer;
- if (recipeType == RecipeType.Clean)
- {
- withWafer = false;
- }
- else
- {
- withWafer = true;
- }
- _task = TaskType.Process;
- LogTaskStart(_task, $"recipe: {recipeName}, clean: {isCleanRecipe}, with wafer: {withWafer}");
- if (RouteManager.IsATMMode)
- {
- int time = SC.GetValue<int>("System.ATMCyclePMDelayTime");
- _timerProcess.Start(time * 1000);
- LOG.Write(eEvent.EV_SCHEDULER, Module, $"System run in ATM mode, process skipped, delay {time} seconds");
- WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.InProcess);
- return true;
- }
- else
- {
- if(isCleanRecipe)
- {
- _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
- }
- else
- {
- _entityTaskToken = _entity.InvokeProcess(recipeName, wafer.WaferOrigin, RecipeType.Process);
- }
-
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- }
- public override bool Preheating(float temperature)
- {
- _task = TaskType.Heating;
- _paramTemp = temperature;
- _entityTaskToken = _entity.InvokePreHeat(temperature);
- LogTaskStart(_task, $"preheat to {temperature}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- public bool CheckTaskDone()
- {
- bool ret = false;
- switch (_task)
- {
- case TaskType.None:
- ret = true;
- break;
- case TaskType.PrepareTransfer:
- ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsPrepareTransferReady(_taskRobot, _taskTransferType == EnumTransferType.Swap ? EnumTransferType.Pick : _taskTransferType, _taskSlot, _taskBlade);
- break;
- case TaskType.PostTransfer:
- ret = _entity.CheckAcked(_entityTaskToken);
- break;
- case TaskType.Heating:
- ret = _entity.CheckAcked(_entityTaskToken) && IsTemperatureReady(_paramTemp);
- break;
- case TaskType.Process:
- case TaskType.IdlePurgeProcess:
- case TaskType.IdleCleanProcess:
- case TaskType.PreJobProcess:
- case TaskType.CompleteJobProcess:
- if (RouteManager.IsATMMode)
- {
- ret = _timerProcess.IsTimeout() && _entity.IsIdle;
- if (ret)
- WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
- }
- else
- {
- ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsIdle;
- }
- break;
- }
- if (ret && _task != TaskType.None)
- {
- LogTaskDone(_task, "");
- _task = TaskType.None;
- }
- return ret;
- }
- public bool Monitor()
- {
- return true;
- }
- public void SetPMAuto()
- {
- _entity.SetAuto();
- }
- public bool IdlePurgeProcess(string recipeName)
- {
- _task = TaskType.IdlePurgeProcess;
- _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
- LogTaskStart(_task, $"recipe: {recipeName}, clean: {false}, with wafer: {false}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- public bool IdleCleanProcess(string recipeName)
- {
- _task = TaskType.IdleCleanProcess;
- _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
- LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- public void PreJobClean()
- {
- }
- public bool PreJobProcess(string recipeName)
- {
- _task = TaskType.PreJobProcess;
- _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
- LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- public bool CompleteJobProcess(string recipeName)
- {
- _task = TaskType.CompleteJobProcess;
- _entityTaskToken = _entity.InvokeClean(recipeName, "", RecipeType.Clean);
- LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- private void WaferArrived(object sender, EventArgs e)
- {
- if(WaferManager.Instance.CheckHasWafer(Module, 0))
- {
- WaferInfo wafer = WaferManager.Instance.GetWafer(Module, 0);
- string recipeName = wafer.ProcessJob.Sequence.GetRecipe(Module);
- if (recipeName.Length > 0)
- {
- Process(recipeName, false, RecipeType.Process, wafer);
- }
- else
- {
- LOG.Write(eEvent.WARN_SCHEDULER, Module, "Cannot run process as get recipe failed.");
- }
- }
- else
- {
- LOG.Write(eEvent.WARN_SCHEDULER, Module, "Cannot run process as PM is empty");
- }
- }
- public override void ResetTask()
- {
- _entity.ResetRecipeTime();
- base.ResetTask();
- }
- #region clean task
- private void LoadIdleCleanOpt()
- {
- // Load Idle Clean Config
- _idleCleanOpt = SC.GetValue<int>($"{Module}.IdleClean.Option");
- _idleCleanHourSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanTime");
- _idleCleanWaferSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanWaferCount");
- _idleCleanWaferCount = SC.GetValue<int>($"{Module}.IdleClean.WaferCountSinceLastClean");
- _idleCleanRecipe = SC.GetStringValue($"{Module}.IdleClean.IdleCleanRecipe");
- string lastRun = SC.GetStringValue($"{Module}.IdleClean.LastRunTime");
- if (lastRun.Length > 10)
- {
- try
- {
- _lastRunTime = DateTime.Parse(lastRun);
- }
- catch
- {
- lastRun = string.Empty;
- }
- }
- if (lastRun.Length <= 10)
- {
- _lastRunTime = DateTime.Now;
- SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
- }
- // validate the idle clean recipe name
- string path = Path.Combine("Recipes", Module.ToString(), "Clean", $"{_idleCleanRecipe}.rcp");
- string recipeContent = RecipeFileManager.Instance.LoadRecipeByPath(path);
-
- Recipe recipe = Recipe.Load(recipeContent);
- if (recipe == null)
- {
- _idleCleanRecipe = string.Empty;
- }
- }
- public void WaferProcessDone()
- {
- _lastRunTime = DateTime.Now;
- SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
- _idleCleanWaferCount++;
- SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
- }
-
- private void ResetIdleCleanCounter()
- {
- _lastRunTime = DateTime.Now;
- SC.SetItemValueFromString($"{Module}.IdleClean.LastRunTime", _lastRunTime.ToString());
- _idleCleanWaferCount = 0;
- SC.SetItemValue($"{Module}.IdleClean.IdleCleanWaferCount", _idleCleanWaferCount);
- }
- public bool RunIdleCleanTask()
- {
- if(_idleCleanOpt == 1)
- {
- TimeSpan span = DateTime.Now - _lastRunTime;
- if(span.TotalHours >= _idleCleanHourSetPoint)
- {
- Process(_idleCleanRecipe, true, RecipeType.Clean, null);
- ResetIdleCleanCounter();
- return true;
- }
- }
- else if(_idleCleanOpt == 2)
- {
- if(_idleCleanWaferCount >= _idleCleanWaferSetPoint)
- {
- Process(_idleCleanRecipe, true, RecipeType.Clean, null);
- ResetIdleCleanCounter();
- return true;
- }
- }
- return false;
- }
- public bool RunJobCleanTask(string jobCleanRecipe)
- {
- // validate the job clean recipe name
- //string recipeContent = RecipeFileManager.Instance.LoadRecipe(Module.ToString(), jobCleanRecipe, false);
- string path = Path.Combine( "Recipes", Module.ToString(),"Clean" , $"{jobCleanRecipe}.rcp");
- string recipeContent = RecipeFileManager.Instance.LoadRecipeByPath(path);
- if (recipeContent.Length == 0)
- {
- return false;
- }
- Recipe recipe = Recipe.Load(recipeContent);
- if (recipe == null)
- {
- LOG.Write(eEvent.WARN_ROUTER, Module, $"Loading clean recipe: {path} failed");
- return false;
- }
- return Process(jobCleanRecipe, true, RecipeType.Clean, null);
- }
- #endregion
- }
- }
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