 lixiang
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
 sangwq
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9189e1b51f
new routing algorithm update.
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1 year ago |
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sangwq
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c3ef1d5a6e
Wafer loadlock delay function.
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1 year ago |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
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lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
|
sangwq
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ec2f97e62d
enhance log.
|
1 year ago |
|
sangwq
|
e61f018b66
Manual Return wafer while running cycle.
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1 year ago |
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sangwq
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c3bef13a6e
Enhance Auto pump/vent algorithm.
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1 year ago |
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sangwq
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d1ac5fa823
fixed the clean recipe path bug.
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1 year ago |
|
lixiang
|
9e1de0e343
1.run recipe 参数bool改recipetype
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1 year ago |
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sangwq
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b4c441532d
Clean Recipe functions, include IdleClean/PreJobClean/WTWJobClean/PostJobClean.
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1 year ago |
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sangwq
|
7d93bf0076
Job Clean function, not finished.
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1 year ago |
|
sangwq
|
0a0308458e
Enable drag wafer while module offline.
|
1 year ago |
|
sangwq
|
9144014f90
enhance the routing algorithm and module online/offline control logic.
|
1 year ago |
|
sangwq
|
d49b8f65dd
fix the RouteManager instance initialize bug.
|
1 year ago |
|
sangwq
|
69eff33372
Force System Restart after change IsATM mode configuration item and add abort process.
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1 year ago |
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sangwq
|
c223835b1e
enhance AutoCycle module.
|
1 year ago |
|
sangwq
|
2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
|
1 year ago |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
1 year ago |
|
sangwq
|
b741650da1
TM Cycle ready.
|
1 year ago |
|
sangwq
|
dff905345f
增加PMB的兼容
|
1 year ago |
|
sangwq
|
44ec74603f
TM Transfer
|
2 years ago |
|
sangwq
|
5b037046f9
Add TM/LL modules.
|
2 years ago |
