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AdLinkEthercat
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 year ago |
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EFEM
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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1 year ago |
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EPD
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c3ef1d5a6e
Wafer loadlock delay function.
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1 year ago |
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EPDs
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4ffafb6001
EFEM界面优化
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1 year ago |
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IODevices
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 year ago |
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PreAligner
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
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SMIF
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8436daeb68
Eliminate SE generation warning.
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1 year ago |
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TM
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
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VCE
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
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AIRSYSChiller.cs
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
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AdTecRF.cs
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0f905564d0
加入登录界面和权限管理
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1 year ago |
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AdixenTurboPump.cs
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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CometRF.cs
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709c7a1c10
fixed the routing bug while B In B Out.
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1 year ago |
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DataDefine.cs
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 year ago |
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DeviceManager.cs
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9e14bbee6a
1.由于PM种类变多，且分配置，PM 加载device 功能重写
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1 year ago |
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ESC5HighVoltage.cs
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f3bd6b016b
添加部分efem功能
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1 year ago |
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EdwardsPump.cs
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be22c5112d
TM 添加两个pump 串口23/24/25/26
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1 year ago |
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FinsPlc.cs
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c457973fa2
1.添加Revtech Match
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1 year ago |
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JetEPDBase.cs
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4ffafb6001
EFEM界面优化
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1 year ago |
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JetEfem.cs
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5fc13b3f0c
New Efem design
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1 year ago |
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JetKepler2200APM.cs
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
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JetKepler2200BPM.cs
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
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JetKepler2300PM.cs
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
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JetPMBase.cs
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
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JetVenusDEPM.cs
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 year ago |
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JetVenusPM.cs
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af631c4aaa
1.添加RF Calibration功能
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1 year ago |
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JetVenusSEPM.cs
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 year ago |
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JetVenusSEPMBase.cs
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56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
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1 year ago |
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LzMatch_Ethercat.cs
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
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PendulumValve.cs
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 year ago |
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PlasmaController.cs
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75710d35d8
RF Match.
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2 years ago |
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RevtechMatch.cs
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2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
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SMCChiller.cs
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d15749f5b1
1.fix VenusSE show chiler temp bugs
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1 year ago |
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SkyPump.cs
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44fc6989ef
1、Remove FabConnect dll file;
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1 year ago |
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TruPlasmaRF.cs
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
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TruPlasmaRF_Ethercat.cs
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
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VirgoSignalTower.cs
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0f905564d0
加入登录界面和权限管理
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1 year ago |
lixiang
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度