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PM
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464c53cd94
1.Datalog添加高温Haeter开关显示
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11 months ago |
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TM
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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11 months ago |
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ClusterGemModel.xml
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60e9a04892
Simulator LP3 Update
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1 year ago |
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DBModel.sql
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f814cf53a8
1.Add simulator read RF ConfigType function
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1 year ago |
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DESequenceFormat.xml
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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1 year ago |
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DataGroup.xml
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a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
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1 year ago |
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DeviceModel.xsd
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d8e5f1dc2c
2022 last update
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2 years ago |
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EquipmentVariables.xml
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7dc2089ceb
1、add PortWaferStart/PortWaferEnd event sequence name parameter;
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1 year ago |
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EventDefine.xml
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3f9c41937a
update for event module enhancement
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2 years ago |
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IoProviderConfig.xml
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0a2d5ac547
Venus DE TM simulator add
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1 year ago |
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LogDefine.json
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2de3872723
duplicated wafer function.
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1 year ago |
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RecipeFormat.xml
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9760d40cf7
port simulator
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2 years ago |
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SESequenceFormat.xml
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
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SVID.xls
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63d58afa42
1、SecsGem增加了UTF-8编码的支持；
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1 year ago |
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SequenceFormat.xml
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4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
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1 year ago |
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SignalTower.xml
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a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
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1 year ago |
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System.sccfg
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b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
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1 year ago |
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System_Kepler2200.sccfg
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464c53cd94
1.Datalog添加高温Haeter开关显示
|
11 months ago |
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System_Kepler2300.sccfg
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b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
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1 year ago |
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System_VenusDE.sccfg
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9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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1 year ago |
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System_VenusSE.sccfg
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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11 months ago |
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VenusPreProcess.py
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64c7ef574e
log
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2 years ago |
lixiang
464c53cd94
1.Datalog添加高温Haeter开关显示