sangwq 5687e44ebc Enhance routing algorithm. 9 months ago
..
EventDefine.cs a5245356d0 source files 2 years ago
Fdc.cs d33079596b 1.优化新版跑片动画 11 months ago
GasBoxLeakCheckRoutine.cs d95b8c7876 cancel Open PVN22 in SE,DE && add VenusVentRoutine && fix the bug in GasBoxLeakCheck && Change Logic in pumpdown&Vent in SE,DE 11 months ago
GasFlowRoutine.cs c332b95d39 venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function 1 year ago
LLPickRoutine.cs ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug 11 months ago
LLPlaceRoutine.cs ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug 11 months ago
LoadLockLeakCheckRoutine.cs ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug 11 months ago
LoadLockPumpRoutine.cs ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug 11 months ago
LoadLockPurgeRoutine.cs ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug 11 months ago
LoadLockVentRoutine.cs ecd991d2f4 1.修复kepler 气缸开关信号只读on或者off bug 11 months ago
PMEntity.cs 5687e44ebc Enhance routing algorithm. 9 months ago
PMGasVerificationRoutine.cs e2836bfbda 1.Chamber DE process enhance 10 months ago
PMGaslinePurgeRoutine.cs 5ce110574e 1,添加cooling功能 9 months ago
PMHeatRoutine.cs c8af7de363 将kepler与Venus UI配置分开,添加Heat Routine 1 year ago
PMHomeRoutine.cs 5ce110574e 1,添加cooling功能 9 months ago
PMLeakCheckRoutine.cs ced69ea3b9 新版本Recioeview界面开发 9 months ago
PMPartialPressureRoutine.cs 945ce3c74c 1.Venus SE DE Add PressureControl 1 year ago
PMProcessRoutine.cs ced69ea3b9 新版本Recioeview界面开发 9 months ago
PMProcess_FA.cs 774c804aa9 fixed pm event occurs carrierid is null 1 year ago
PMPurgeRoutine.cs 9de8ce9b11 Venus SE UI &&Venus DE pump,purge,start turbo routine update 1 year ago
PMRoutineBase.cs 945ce3c74c 1.Venus SE DE Add PressureControl 1 year ago
PMVATPerformanceRoutine.cs 945ce3c74c 1.Venus SE DE Add PressureControl 1 year ago
Process.cs 3cad102221 更新 RT 2 years ago
ProcessDefine.cs 3fb3984bd3 1.添加 Heater 伺服到位信号,手臂进腔前check 10 months ago
PumpDownRoutine.cs ced69ea3b9 新版本Recioeview界面开发 9 months ago
RFPowerSwitchRoutine.cs 03063bae6a Enhance the routine framework. 1 year ago
StartDryPumpRoutine.cs 03063bae6a Enhance the routine framework. 1 year ago
StartTurboPumpRoutine.cs 9de8ce9b11 Venus SE UI &&Venus DE pump,purge,start turbo routine update 1 year ago
VentRoutine.cs a4f8a29122 1.Kepler2200 Gas 改造,六路变八路 10 months ago
VenusRecipeFileContext.cs 7d93bf0076 Job Clean function, not finished. 1 year ago
VenusSequenceFileContext.cs dd99f38e54 change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE 10 months ago
VenusVentRoutine.cs 0a2d5ac547 Venus DE TM simulator add 11 months ago
VirgoRecipeFileContext.cs 896c7407de 优化log功能 2 years ago
VirgoSequenceFileContext.cs 896c7407de 优化log功能 2 years ago