.. |
EventDefine.cs
|
a5245356d0
source files
|
2 years ago |
Fdc.cs
|
d33079596b
1.优化新版跑片动画
|
11 months ago |
GasBoxLeakCheckRoutine.cs
|
d95b8c7876
cancel Open PVN22 in SE,DE && add VenusVentRoutine && fix the bug in GasBoxLeakCheck && Change Logic in pumpdown&Vent in SE,DE
|
11 months ago |
GasFlowRoutine.cs
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 year ago |
LLPickRoutine.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
11 months ago |
LLPlaceRoutine.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
11 months ago |
LoadLockLeakCheckRoutine.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
11 months ago |
LoadLockPumpRoutine.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
11 months ago |
LoadLockPurgeRoutine.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
11 months ago |
LoadLockVentRoutine.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
11 months ago |
PMEntity.cs
|
5687e44ebc
Enhance routing algorithm.
|
9 months ago |
PMGasVerificationRoutine.cs
|
e2836bfbda
1.Chamber DE process enhance
|
10 months ago |
PMGaslinePurgeRoutine.cs
|
5ce110574e
1,添加cooling功能
|
9 months ago |
PMHeatRoutine.cs
|
c8af7de363
将kepler与Venus UI配置分开,添加Heat Routine
|
1 year ago |
PMHomeRoutine.cs
|
5ce110574e
1,添加cooling功能
|
9 months ago |
PMLeakCheckRoutine.cs
|
ced69ea3b9
新版本Recioeview界面开发
|
9 months ago |
PMPartialPressureRoutine.cs
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 year ago |
PMProcessRoutine.cs
|
ced69ea3b9
新版本Recioeview界面开发
|
9 months ago |
PMProcess_FA.cs
|
774c804aa9
fixed pm event occurs carrierid is null
|
1 year ago |
PMPurgeRoutine.cs
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
1 year ago |
PMRoutineBase.cs
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 year ago |
PMVATPerformanceRoutine.cs
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 year ago |
Process.cs
|
3cad102221
更新 RT
|
2 years ago |
ProcessDefine.cs
|
3fb3984bd3
1.添加 Heater 伺服到位信号,手臂进腔前check
|
10 months ago |
PumpDownRoutine.cs
|
ced69ea3b9
新版本Recioeview界面开发
|
9 months ago |
RFPowerSwitchRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
1 year ago |
StartDryPumpRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
1 year ago |
StartTurboPumpRoutine.cs
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
1 year ago |
VentRoutine.cs
|
a4f8a29122
1.Kepler2200 Gas 改造,六路变八路
|
10 months ago |
VenusRecipeFileContext.cs
|
7d93bf0076
Job Clean function, not finished.
|
1 year ago |
VenusSequenceFileContext.cs
|
dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
|
10 months ago |
VenusVentRoutine.cs
|
0a2d5ac547
Venus DE TM simulator add
|
11 months ago |
VirgoRecipeFileContext.cs
|
896c7407de
优化log功能
|
2 years ago |
VirgoSequenceFileContext.cs
|
896c7407de
优化log功能
|
2 years ago |