| .. |
|
EFEMAlignRoutine.cs
|
c5ba2fb197
Transfer align angel from sequence to system configure and enable angle increasement by wafer.
|
hai 1 ano |
|
EfemEntity.cs
|
587ffe27b5
1、配置文件中增加了FA.Encoding
|
hai 1 ano |
|
EfemHomeRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
%!s(int64=2) %!d(string=hai) anos |
|
EfemPickRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
%!s(int64=2) %!d(string=hai) anos |
|
EfemPlaceRoutine.cs
|
96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
|
hai 1 ano |
|
EfemSwapRoutine.cs
|
e61f018b66
Manual Return wafer while running cycle.
|
hai 1 ano |
chenkui
587ffe27b5
1、配置文件中增加了FA.Encoding