Página inicial Explorar Ajuda
Registrar Entrar
JetPlasma
/
Kepler-Release
Observar 2
Favorito 0
Fork 0
Arquivos Issues 0 Pull Requests 0 Wiki
Tree: 614fe9104b
Branches Tags
Kepler-Release
/
Venus
/
Venus_RT
/
Modules
/
EFEM
chenkui 587ffe27b5 1、配置文件中增加了FA.Encoding 1 ano atrás
..
EFEMAlignRoutine.cs c5ba2fb197 Transfer align angel from sequence to system configure and enable angle increasement by wafer. 1 ano atrás
EfemEntity.cs 587ffe27b5 1、配置文件中增加了FA.Encoding 1 ano atrás
EfemHomeRoutine.cs 03063bae6a Enhance the routine framework. 1 ano atrás
EfemPickRoutine.cs 03063bae6a Enhance the routine framework. 1 ano atrás
EfemPlaceRoutine.cs 96661cadab 修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug 1 ano atrás
EfemSwapRoutine.cs e61f018b66 Manual Return wafer while running cycle. 1 ano atrás