JetPlasma/Kepler-Release: Kepler2200软件出货版本 @ 614fe9104b38a11b568ddab68733b645b7b234fd

chenkui 587ffe27b5 1、配置文件中增加了FA.Encoding		1 yıl önce
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EFEMAlignRoutine.cs	c5ba2fb197 Transfer align angel from sequence to system configure and enable angle increasement by wafer.	1 yıl önce
EfemEntity.cs	587ffe27b5 1、配置文件中增加了FA.Encoding	1 yıl önce
EfemHomeRoutine.cs	03063bae6a Enhance the routine framework.	1 yıl önce
EfemPickRoutine.cs	03063bae6a Enhance the routine framework.	1 yıl önce
EfemPlaceRoutine.cs	96661cadab 修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug	1 yıl önce
EfemSwapRoutine.cs	e61f018b66 Manual Return wafer while running cycle.	1 yıl önce