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EFEM
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4f7a01400f
fix the sync issue for efem socket.
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il y a 1 an |
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LLs
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6d393bb86d
new routing algorithm with prediction.
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il y a 1 an |
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LPs
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4f7a01400f
fix the sync issue for efem socket.
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il y a 1 an |
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PMs
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b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
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il y a 1 an |
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SMIF
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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il y a 1 an |
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Schedulers
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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il y a 1 an |
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TM
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5836f3ed1c
fix bugs in ShareDrive && add Online in SETM
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il y a 1 an |
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VCE
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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il y a 1 an |
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AutoCycle.cs
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2f30fa17c4
1、修复了Wafer_Left_Position上报数据；
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il y a 1 an |
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Autotransfer_LP_FA.cs
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774c804aa9
fixed pm event occurs carrierid is null
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il y a 1 an |
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DVIDName.cs
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44fc6989ef
1、Remove FabConnect dll file;
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il y a 1 an |
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EntityErrorRaiseTrigger.cs
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d35b997884
1.优化RevtechMatch状态机
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il y a 1 an |
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EntityTaskBase.cs
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5b037046f9
Add TM/LL modules.
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il y a 2 ans |
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ManualTransfer.cs
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1b2d4bb89d
fix the manual move wafer bug while single arm option bigger than 2.
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il y a 1 an |
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ResourceMonitor.cs
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8436daeb68
Eliminate SE generation warning.
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il y a 1 an |
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RouteManager.cs
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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il y a 1 an |
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SEManualTransfer.cs
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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il y a 1 an |
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SETMCycle.cs
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b3a13fc6c7
1.IoMagnet device Logical supplement
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il y a 1 an |
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SystemDispatcher.cs
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1b2d4bb89d
fix the manual move wafer bug while single arm option bigger than 2.
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il y a 1 an |
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TMCycle.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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il y a 1 an |
zhouhr
5836f3ed1c
fix bugs in ShareDrive && add Online in SETM