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EFEM
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8020492bf4
fix action list buffer not reset while swap wafer.
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il y a 1 an |
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LLs
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d49b8f65dd
fix the RouteManager instance initialize bug.
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il y a 1 an |
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LPs
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aaff066e93
EFEM Align UI RT 更新
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il y a 1 an |
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PMs
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379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
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il y a 1 an |
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Schedulers
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501997ac38
TM/EFEM robot single arm option.
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il y a 1 an |
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TM
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379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
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il y a 1 an |
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VCE
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a980a39acf
add read delay in IoCylinder && add unknown error codes with VPA driver && add VceEntity
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il y a 1 an |
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AutoCycle.cs
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501997ac38
TM/EFEM robot single arm option.
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il y a 1 an |
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Autotransfer_LP_FA.cs
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60e9a04892
Simulator LP3 Update
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il y a 1 an |
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EntityTaskBase.cs
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5b037046f9
Add TM/LL modules.
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il y a 2 ans |
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ManualTransfer.cs
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501997ac38
TM/EFEM robot single arm option.
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il y a 1 an |
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RouteManager.cs
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a88d0012df
fix some AutoCycle/manualMove/ReturnWafer/Abort bugs.
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il y a 1 an |
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TMCycle.cs
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9ba5d70aff
fix abort manual transfer bug.
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il y a 1 an |
sangwq
501997ac38
TM/EFEM robot single arm option.