ManualTransfer.cs 17 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430
  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using Aitex.Core.Common;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Sorter.Common;
  8. using Aitex.Core.RT.Log;
  9. using Aitex.Core.Util;
  10. using Aitex.Core.RT.DataCenter;
  11. using Aitex.Core.RT.RecipeCenter;
  12. using Aitex.Core.RT.Fsm;
  13. using MECF.Framework.Common.Jobs;
  14. using MECF.Framework.Common.Routine;
  15. using MECF.Framework.Common.Equipment;
  16. using MECF.Framework.Common.SubstrateTrackings;
  17. using MECF.Framework.Common.Schedulers;
  18. using MECF.Framework.Common.DBCore;
  19. using Venus_Core;
  20. using Venus_RT.Modules.Schedulers;
  21. using Venus_RT.Scheduler;
  22. namespace Venus_RT.Modules
  23. {
  24. public class ManualTransfer : IRoutine
  25. {
  26. SchedulerTMRobot _tmRobot = (SchedulerTMRobot)Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot);
  27. SchedulerEfemRobot _efemRobot = (SchedulerEfemRobot)Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot);
  28. private Queue<MoveItem> _moveTaskQueue = new Queue<MoveItem>();
  29. private MoveItem _move_item = new MoveItem(ModuleName.System, 0, ModuleName.System, 0, Hand.None);
  30. private MoveItem _current_item = new MoveItem(ModuleName.System, 0, ModuleName.System, 0, Hand.None);
  31. private Guid _wafer_id;
  32. private R_TRIG _wafer_arrive_trig = new R_TRIG();
  33. private MovingStatus _moving_status = MovingStatus.Idle;
  34. private int _tmRobotSingleArmOption = 0;
  35. private int _efemRobotSingleArmOption = 0;
  36. public ManualTransfer()
  37. {
  38. _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");
  39. _efemRobotSingleArmOption = SC.GetValue<int>("EFEM.SingleArmOption");
  40. }
  41. public RState Start(params object[] objs)
  42. {
  43. // RESET
  44. _moveTaskQueue.Clear();
  45. _moving_status = MovingStatus.Idle;
  46. _wafer_arrive_trig.RST = true ;
  47. _move_item.SourceModule = (ModuleName)objs[0];
  48. _move_item.SourceSlot = (int)objs[1];
  49. _move_item.DestinationModule = (ModuleName)objs[2];
  50. _move_item.DestinationSlot = (int)objs[3];
  51. _wafer_id = WaferManager.Instance.GetWafer(_move_item.SourceModule, _move_item.SourceSlot).InnerId;
  52. if (!CheckSingleArmOption(_move_item.DestinationModule, _move_item.DestinationSlot))
  53. return RState.Failed;
  54. if (!CheckSingleArmOption(_move_item.SourceModule, _move_item.SourceSlot))
  55. return RState.Failed;
  56. if (IsCrossTransfer(_move_item))
  57. {
  58. var slot = SelectLLFreeSlot();
  59. if (slot.Module == ModuleName.System)
  60. return RState.Failed;
  61. // vac to atm
  62. if (ModuleHelper.IsPm(_move_item.SourceModule) || ModuleHelper.IsTMRobot(_move_item.SourceModule))
  63. {
  64. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, slot.Module, slot.Slot, Hand.Blade1));
  65. if(ModuleHelper.IsEFEMRobot(_move_item.DestinationModule))
  66. {
  67. _moveTaskQueue.Enqueue(new MoveItem(slot.Module, slot.Slot, _move_item.DestinationModule, _move_item.DestinationSlot, (Hand)_move_item.DestinationSlot));
  68. }
  69. else
  70. {
  71. Hand hand = SelectEfemRobotFreeHand();
  72. if(hand == Hand.None)
  73. {
  74. LOG.Write(eEvent.WARN_ROUTER, ModuleName.EfemRobot, "No free efem robot arm for wafer move.");
  75. return RState.Failed;
  76. }
  77. _moveTaskQueue.Enqueue(new MoveItem(slot.Module, slot.Slot, ModuleName.EfemRobot, (int)hand, hand));
  78. _moveTaskQueue.Enqueue(new MoveItem(ModuleName.EfemRobot, (int)hand, _move_item.DestinationModule, _move_item.DestinationSlot, hand));
  79. }
  80. }
  81. // atm to vac
  82. else
  83. {
  84. if (ModuleHelper.IsEFEMRobot(_move_item.SourceModule))
  85. {
  86. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, slot.Module, slot.Slot, (Hand)_move_item.SourceSlot));
  87. }
  88. else
  89. {
  90. Hand hand = SelectEfemRobotFreeHand();
  91. if (hand == Hand.None)
  92. {
  93. LOG.Write(eEvent.WARN_ROUTER, ModuleName.EfemRobot, "No free efem robot arm for wafer move.");
  94. return RState.Failed;
  95. }
  96. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, ModuleName.EfemRobot, (int)hand, hand));
  97. _moveTaskQueue.Enqueue(new MoveItem(ModuleName.EfemRobot, (int)hand, slot.Module, slot.Slot, hand));
  98. }
  99. _moveTaskQueue.Enqueue(new MoveItem(slot.Module, slot.Slot, _move_item.DestinationModule, _move_item.DestinationSlot, Hand.Blade1));
  100. }
  101. }
  102. else if(IsVacTransfer(_move_item))
  103. {
  104. _moveTaskQueue.Enqueue(_move_item);
  105. }
  106. else // atm transfer
  107. {
  108. if(ModuleHelper.IsEFEMRobot(_move_item.SourceModule))
  109. {
  110. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, _move_item.DestinationModule, _move_item.DestinationSlot, (Hand)_move_item.SourceSlot));
  111. }
  112. else if (ModuleHelper.IsEFEMRobot(_move_item.DestinationModule))
  113. {
  114. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, _move_item.DestinationModule, _move_item.DestinationSlot, (Hand)_move_item.DestinationSlot));
  115. }
  116. else
  117. {
  118. Hand hand = SelectEfemRobotFreeHand();
  119. if (hand == Hand.None)
  120. {
  121. LOG.Write(eEvent.WARN_ROUTER, ModuleName.EfemRobot, "No free efem robot arm for wafer move.");
  122. return RState.Failed;
  123. }
  124. _moveTaskQueue.Enqueue(new MoveItem(_move_item.SourceModule, _move_item.SourceSlot, ModuleName.EfemRobot, (int)hand, hand));
  125. _moveTaskQueue.Enqueue(new MoveItem(ModuleName.EfemRobot, (int)hand, _move_item.DestinationModule, _move_item.DestinationSlot, hand));
  126. }
  127. }
  128. _current_item = _moveTaskQueue.Dequeue();
  129. _moving_status = MovingStatus.Waiting;
  130. return RState.Running;
  131. }
  132. public RState Monitor()
  133. {
  134. return MoveWaferForward();
  135. }
  136. public void Abort()
  137. {
  138. }
  139. public void Clear()
  140. {
  141. _moveTaskQueue.Clear();
  142. Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot).ResetTask();
  143. Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot).ResetTask();
  144. }
  145. private RState MoveWaferForward()
  146. {
  147. switch(_moving_status)
  148. {
  149. case MovingStatus.Waiting:
  150. {
  151. if(IsCurrentModuleReady())
  152. {
  153. // Post current item
  154. if(IsVacTransfer(_current_item))
  155. {
  156. _tmRobot.PostMoveItems(new MoveItem[1] { _current_item });
  157. }
  158. else
  159. {
  160. _efemRobot.PostMoveItems(new MoveItem[1] { _current_item });
  161. }
  162. _moving_status = MovingStatus.Moving;
  163. }
  164. }
  165. break;
  166. case MovingStatus.Moving:
  167. {
  168. _wafer_arrive_trig.CLK = IsArriveCurrentTarget();
  169. if (_wafer_arrive_trig.Q)
  170. {
  171. _moving_status = MovingStatus.Idle;
  172. }
  173. }
  174. break;
  175. case MovingStatus.Idle:
  176. {
  177. if(IsCurrentModuleReady())
  178. {
  179. if(_moveTaskQueue.Count > 0)
  180. {
  181. _current_item = _moveTaskQueue.Dequeue();
  182. _moving_status = MovingStatus.Waiting;
  183. }
  184. }
  185. break;
  186. }
  187. }
  188. return TransferStatus();
  189. }
  190. private bool IsVacTransfer(MoveItem item)
  191. {
  192. return ModuleHelper.IsPm(item.SourceModule) ||
  193. ModuleHelper.IsTMRobot(item.SourceModule) ||
  194. ModuleHelper.IsPm(item.DestinationModule) ||
  195. ModuleHelper.IsTMRobot(item.DestinationModule);
  196. }
  197. private bool IsCrossTransfer(MoveItem item)
  198. {
  199. if (ModuleHelper.IsLoadLock(item.DestinationModule) || ModuleHelper.IsLoadLock(item.SourceModule))
  200. return false;
  201. if (((ModuleHelper.IsPm(item.SourceModule) || ModuleHelper.IsTMRobot(item.SourceModule)) &&
  202. !ModuleHelper.IsPm(item.DestinationModule) && !ModuleHelper.IsTMRobot(item.DestinationModule)) ||
  203. ((ModuleHelper.IsPm(item.DestinationModule) || ModuleHelper.IsTMRobot(item.DestinationModule)) &&
  204. !ModuleHelper.IsPm(item.SourceModule) && !ModuleHelper.IsTMRobot(item.SourceModule)))
  205. return true;
  206. return false;
  207. }
  208. private bool IsArriveCurrentTarget()
  209. {
  210. var wafer = WaferManager.Instance.GetWafer(_current_item.DestinationModule, _current_item.DestinationSlot);
  211. return !wafer.IsEmpty && wafer.InnerId == _wafer_id;
  212. }
  213. private bool IsCurrentModuleReady()
  214. {
  215. return (IsVacTransfer(_current_item) ? _tmRobot.IsAvailable : _efemRobot.IsAvailable) &&
  216. _isModuleReady(_current_item.SourceModule) &&
  217. _isModuleReady(_current_item.DestinationModule);
  218. }
  219. private bool IsTransferError()
  220. {
  221. return (IsVacTransfer(_current_item) ? _tmRobot.IsError : _efemRobot.IsError) ||
  222. _isModuleError(_current_item.SourceModule) ||
  223. _isModuleError(_current_item.DestinationModule);
  224. }
  225. private bool _isModuleReady(ModuleName module)
  226. {
  227. return Singleton<TransferModule>.Instance.GetScheduler(module).IsAvailable;
  228. }
  229. private bool _isModuleError(ModuleName module)
  230. {
  231. return Singleton<TransferModule>.Instance.GetScheduler(module).IsError;
  232. }
  233. private Hand SelectEfemRobotFreeHand()
  234. {
  235. if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0))
  236. return Hand.Blade1;
  237. else if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1))
  238. return Hand.Blade2;
  239. else
  240. return Hand.None;
  241. }
  242. private SlotItem SelectLLFreeSlot()
  243. {
  244. foreach(var ll in new ModuleName[2] { ModuleName.LLA, ModuleName.LLB})
  245. {
  246. if (ModuleHelper.IsInstalled(ll) && _isModuleReady(ll))
  247. {
  248. for (int i = 0; i < 4; i++)
  249. {
  250. if (WaferManager.Instance.CheckNoWafer(ll, i))
  251. return new SlotItem(ll, i);
  252. }
  253. }
  254. }
  255. LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, "Cannot move wafer as no valid Loadlock slot");
  256. return new SlotItem(ModuleName.System, -1);
  257. }
  258. private RState TransferStatus()
  259. {
  260. if (IsTransferError())
  261. return RState.Failed;
  262. if (IsCurrentModuleReady() && _moveTaskQueue.Count == 0 && _moving_status == MovingStatus.Idle)
  263. return RState.End;
  264. return RState.Running;
  265. }
  266. private bool CheckSingleArmOption(ModuleName robot, int slot)
  267. {
  268. if(ModuleHelper.IsTMRobot(robot))
  269. {
  270. if (_tmRobotSingleArmOption != 0 && _tmRobotSingleArmOption != slot + 1)
  271. {
  272. LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"Cannot move the wafer as TM Robot {(Hand)slot} is disabled.");
  273. return false;
  274. }
  275. }
  276. else if(ModuleHelper.IsEFEMRobot(robot))
  277. {
  278. if (_efemRobotSingleArmOption != 0 && _efemRobotSingleArmOption != slot + 1)
  279. {
  280. LOG.Write(eEvent.ERR_ROUTER, ModuleName.EfemRobot, $"Cannot move the wafer as EFEM Robot {(Hand)slot} is disabled.");
  281. return false;
  282. }
  283. }
  284. return true;
  285. }
  286. public int GetSingleArmOption(ModuleName robot)
  287. {
  288. return ModuleHelper.IsTMRobot(robot) ? _tmRobotSingleArmOption : _efemRobotSingleArmOption;
  289. }
  290. }
  291. public class ReturnAllWafer : IRoutine
  292. {
  293. private List<ModuleName> _moduleList = new List<ModuleName> { ModuleName.EfemRobot, ModuleName.Aligner1, ModuleName.Aligner, ModuleName.LLA, ModuleName.LLB, ModuleName.TMRobot, ModuleName.PMA, ModuleName.PMB, ModuleName.PMC, ModuleName.PMD };
  294. private ManualTransfer _manualTransfer;
  295. private Queue<MoveItem> _returnTaskQueue = new Queue<MoveItem>();
  296. private MoveItem _current_item;
  297. public ReturnAllWafer(ManualTransfer manualTransfer)
  298. {
  299. _manualTransfer = manualTransfer;
  300. }
  301. public RState Start(params object[] objs)
  302. {
  303. Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot).ResetTask();
  304. Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot).ResetTask();
  305. foreach(var mod in _moduleList)
  306. {
  307. if (ModuleHelper.IsInstalled(mod) && Singleton<TransferModule>.Instance.GetScheduler(mod).IsAvailable)
  308. {
  309. if (ModuleHelper.IsEFEMRobot(mod) || ModuleHelper.IsTMRobot(mod))
  310. {
  311. if (_manualTransfer.GetSingleArmOption(mod) != 2)
  312. PushWaferToReturnQueqe(mod, 0);
  313. if (_manualTransfer.GetSingleArmOption(mod) != 1)
  314. PushWaferToReturnQueqe(mod, 1);
  315. }
  316. else if (ModuleHelper.IsLoadLock(mod))
  317. {
  318. int nSlotNumber = SC.GetValue<int>($"{mod}.SlotNumber");
  319. for (int i = 0; i < nSlotNumber; i++)
  320. {
  321. PushWaferToReturnQueqe(mod, i);
  322. }
  323. }
  324. else
  325. {
  326. PushWaferToReturnQueqe(mod, 0);
  327. }
  328. }
  329. }
  330. if (_returnTaskQueue.Count == 0)
  331. return RState.Failed;
  332. _current_item = _returnTaskQueue.Dequeue();
  333. _manualTransfer.Start(_current_item.SourceModule, _current_item.SourceSlot, _current_item.DestinationModule, _current_item.DestinationSlot);
  334. return RState.Running;
  335. }
  336. public RState Monitor()
  337. {
  338. var ret = _manualTransfer.Monitor();
  339. if (ret == RState.End)
  340. {
  341. if (_returnTaskQueue.Count > 0)
  342. {
  343. _current_item = _returnTaskQueue.Dequeue();
  344. _manualTransfer.Start(_current_item.SourceModule, _current_item.SourceSlot, _current_item.DestinationModule, _current_item.DestinationSlot);
  345. }
  346. else
  347. return RState.End;
  348. }
  349. else if (ret == RState.Failed || ret == RState.Timeout)
  350. {
  351. LOG.Write(eEvent.ERR_ROUTINE_FAILED, ModuleName.System,"Manual Transfer", $"Return Wafer {_current_item.SourceModule}{_current_item.SourceSlot} failed");
  352. return RState.Failed;
  353. }
  354. return RState.Running;
  355. }
  356. public void Abort()
  357. {
  358. }
  359. public void Clear()
  360. {
  361. _returnTaskQueue.Clear();
  362. Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot).ResetTask();
  363. Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot).ResetTask();
  364. }
  365. private void PushWaferToReturnQueqe(ModuleName mod, int nSlot)
  366. {
  367. var wafer = WaferManager.Instance.GetWafer(mod, nSlot);
  368. if (!wafer.IsEmpty)
  369. {
  370. _returnTaskQueue.Enqueue(new MoveItem(mod, nSlot, (ModuleName)wafer.OriginStation, wafer.OriginSlot, Hand.Blade1));
  371. }
  372. }
  373. }
  374. }