| .. |
|
EFEM
|
4e5194bce2
add Analysis of EFEM Hardware Error Codes && Monitor of Current Application Resources
|
2 anni fa |
|
EPD
|
4ffafb6001
EFEM界面优化
|
2 anni fa |
|
EPDs
|
4ffafb6001
EFEM界面优化
|
2 anni fa |
|
IODevices
|
cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
|
2 anni fa |
|
PreAligner
|
a980a39acf
add read delay in IoCylinder && add unknown error codes with VPA driver && add VceEntity
|
2 anni fa |
|
TM
|
3f6c65223f
1.删除部分不需要插入数据库数据
|
2 anni fa |
|
VCE
|
1e8077cb6e
Add the driver of HongHuVR
|
2 anni fa |
|
AIRSYSChiller.cs
|
379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
|
2 anni fa |
|
AdTecRF.cs
|
3f6c65223f
1.删除部分不需要插入数据库数据
|
2 anni fa |
|
AdixenTurboPump.cs
|
171eef8acc
Add to chart@@to slot switch page function
|
2 anni fa |
|
CometRF.cs
|
4ffafb6001
EFEM界面优化
|
2 anni fa |
|
DataDefine.cs
|
f211c4242f
Efem module raw design.
|
2 anni fa |
|
DeviceManager.cs
|
124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
|
2 anni fa |
|
ESC5HighVoltage.cs
|
f3bd6b016b
添加部分efem功能
|
2 anni fa |
|
EdwardsPump.cs
|
be22c5112d
TM 添加两个pump 串口23/24/25/26
|
2 anni fa |
|
FinsPlc.cs
|
2b930e56b9
Log output for exception.
|
2 anni fa |
|
JetEPDBase.cs
|
4ffafb6001
EFEM界面优化
|
2 anni fa |
|
JetEfem.cs
|
5fc13b3f0c
New Efem design
|
2 anni fa |
|
JetKepler2200APM.cs
|
efafd434f0
save only the last 200 entries in simulator's logs && add some key in UI
|
2 anni fa |
|
JetKepler2300PM.cs
|
cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
|
2 anni fa |
|
JetPMBase.cs
|
cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
|
2 anni fa |
|
JetVenusPM.cs
|
b5616b7378
解决冲突，合并代码
|
2 anni fa |
|
JetVenusSEPM.cs
|
56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
|
2 anni fa |
|
JetVenusSEPMBase.cs
|
56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
|
2 anni fa |
|
PendulumValve.cs
|
379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
|
2 anni fa |
|
PlasmaController.cs
|
75710d35d8
RF Match.
|
2 anni fa |
|
SMCChiller.cs
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
|
2 anni fa |
|
SkyPump.cs
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
|
2 anni fa |
|
VirgoSignalTower.cs
|
bdec2c0d74
1.修改TM robot模拟器
|
2 anni fa |
zhouhr
4e5194bce2
add Analysis of EFEM Hardware Error Codes && Monitor of Current Application Resources