Inicio Explorar Axuda
Rexistro Iniciar sesión
JetPlasma
/
Kepler-Release
Seguir 2
Destacar 0
Fork 0
Ficheiros Incidencias 0 Pull Requests 0 Wiki
Árbore: 4634f3f91a
Ramas Etiquetas
Kepler-Release
/
Venus
/
Venus_RT
/
Modules
/
EFEM
lixiang d4d56a3cf3 1.添加Recipe内部外部名称，chamberTYpe 比对 hai 1 ano
..
EFEMAlignRoutine.cs c5ba2fb197 Transfer align angel from sequence to system configure and enable angle increasement by wafer. hai 1 ano
EfemEntity.cs d4d56a3cf3 1.添加Recipe内部外部名称，chamberTYpe 比对 hai 1 ano
EfemHomeRoutine.cs 03063bae6a Enhance the routine framework. hai 1 ano
EfemPickRoutine.cs 03063bae6a Enhance the routine framework. hai 1 ano
EfemPlaceRoutine.cs 96661cadab 修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug hai 1 ano
EfemSwapRoutine.cs e61f018b66 Manual Return wafer while running cycle. hai 1 ano