| .. |
|
EFEM
|
b253c8fadd
1.添加旋转动画
|
2 years ago |
|
LLs
|
2694bdc96c
Enhance the Pre-rotation function
|
2 years ago |
|
LPs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
PMs
|
41d50f69e3
1.钟摆阀关闭，加入压力和位置自动设0功能
|
1 year ago |
|
Schedulers
|
9e1de0e343
1.run recipe 参数bool改recipetype
|
1 year ago |
|
TM
|
894ff76d5e
online/offline tobview状态颜色变化
|
2 years ago |
|
VCE
|
08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
|
2 years ago |
|
AutoCycle.cs
|
ec1db1df03
Enhance the Clean/Cycle routine algorithm.
|
1 year ago |
|
Autotransfer_LP_FA.cs
|
60e9a04892
Simulator LP3 Update
|
2 years ago |
|
EntityTaskBase.cs
|
5b037046f9
Add TM/LL modules.
|
2 years ago |
|
ManualTransfer.cs
|
501997ac38
TM/EFEM robot single arm option.
|
2 years ago |
|
ResourceMonitor.cs
|
0ed42d17d1
fix bugs for WaferOffset
|
2 years ago |
|
RouteManager.cs
|
f7228d247a
restore Venus TM Robot Simulator
|
2 years ago |
|
TMCycle.cs
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
lixiang
41d50f69e3
1.钟摆阀关闭，加入压力和位置自动设0功能