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Attributes
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87f1121180
1.Recipe UI 界面Name优化
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1 year ago |
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Properties
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8582fd7e94
Venus初始版本提交
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2 years ago |
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Chamber.cs
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6bbe2e529b
1.删除或注释 Venus ChamberType
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1 year ago |
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ChamberInfo.cs
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65d80057c2
ui优化
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9 months ago |
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ConfigType.cs
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6bbe2e529b
1.删除或注释 Venus ChamberType
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1 year ago |
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ConvertPressureUnit.cs
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9163903164
Kepler2200优化
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11 months ago |
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CoolingInfo.cs
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5ce110574e
1，添加cooling功能
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10 months ago |
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DataName.cs
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a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
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1 year ago |
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DeviceName.cs
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a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
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1 year ago |
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EventDefine.cs
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a1cec725e5
修复TM Vent 配置文件报错bug
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9 months ago |
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FADefine.cs
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3cad102221
更新 RT
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2 years ago |
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GlobalEvents.cs
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65d80057c2
ui优化
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9 months ago |
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HighTemperatureHeaterPosition.cs
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 year ago |
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InvokeName.cs
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3cad102221
更新 RT
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2 years ago |
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Kepler2300Device.cs
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a5813eb09d
1.修改chamber wafer样式
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1 year ago |
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MFCCalibrationData.cs
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3a078d515d
1.修复ui灯闪烁错误bug
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1 year ago |
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ModuleName.cs
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3cad102221
更新 RT
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2 years ago |
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NiceRobotAction.cs
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8d613c7d1f
奈思UI 新版动画
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11 months ago |
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PMLeakCheckResult.cs
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 year ago |
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PartialPressureResult.cs
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796541e5a6
现场测试修改MFC Calibration/LeakCheck/VATPerformance功能
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2 years ago |
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PressureType.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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ProcessUnitDefine.cs
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33d0cd73dd
1.修复Pump Counter 显示错误bug
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8 months ago |
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Recipe.cs
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1c2b8b53bb
1.添加用户权限功能
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8 months ago |
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RecipeResult.cs
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2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
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10 months ago |
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RobotArmPan.cs
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b2e38c8ff3
Add unuploaded files
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1 year ago |
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RtState.cs
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7a07ffa5ca
1. add SignalTower for Venus System by VenusSignalTower.xml
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10 months ago |
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SCValue.cs
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3cad102221
更新 RT
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2 years ago |
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SerializeHelper.cs
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17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe
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8 months ago |
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SignalTowerItem.cs
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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StepItem.cs
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edb5ad6960
1.添加数据分析 Recipe step功能
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1 year ago |
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SubItem.cs
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bb33e89998
1，优化UI界面
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2 years ago |
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TM.cs
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dfc9174ac8
VenusSE TM PM Simulator Update
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1 year ago |
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UserRole.cs
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1c2b8b53bb
1.添加用户权限功能
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8 months ago |
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VATPerformanceResult.cs
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796541e5a6
现场测试修改MFC Calibration/LeakCheck/VATPerformance功能
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2 years ago |
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ValveType.cs
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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10 months ago |
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VenusDevice.cs
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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10 months ago |
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VenusMenu.cs
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0f905564d0
加入登录界面和权限管理
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1 year ago |
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Venus_Core.csproj
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1c2b8b53bb
1.添加用户权限功能
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8 months ago |
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VirgoDevice.cs
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9760d40cf7
port simulator
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2 years ago |
lixiang
17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe