RtState.cs 4.6 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230
  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. namespace Venus_Core
  7. {
  8. public enum RtState
  9. {
  10. Init,
  11. Initializing,
  12. Idle,
  13. Manual,
  14. Transfer,
  15. AutoIdle,
  16. AutoRunning,
  17. AutoRunningPaused,
  18. ReturningCassette,
  19. Cycle,
  20. PrepareCycle,
  21. PostCycle,
  22. SetSpeed,
  23. Error,
  24. Reset,
  25. Processing,
  26. PostProcess,
  27. PauseProcess,
  28. //Maintenance,
  29. //WaferMapping,
  30. //Cycling,
  31. TMCycle,
  32. SETMCycle,
  33. SERunning,
  34. ReturnWafer,
  35. SETransfer,
  36. SEReturnWafer
  37. }
  38. public enum PMState
  39. {
  40. Init,
  41. Idle,
  42. Homing,
  43. GasFlowing,
  44. RfPowering,
  45. Heating,
  46. LaunchingPump,
  47. LaunchingTurboPump,
  48. Pumping,
  49. Venting,
  50. Purging,
  51. GasLinePurge,
  52. PumpingLoadLock,
  53. VentingLoadLock,
  54. PurgingLoadLock,
  55. LoadLockLeakCheck,
  56. MoveLift,
  57. Purge,
  58. // transfer
  59. LLPlacing,
  60. LLPicking,
  61. Transfer,
  62. Error,
  63. PrepareTransfer,
  64. PostTransfer,
  65. TransferHandoff,
  66. //Process,
  67. LeakCheck,
  68. GasBoxLeakCheck,
  69. LiftpinMoving,
  70. LiftpinWaiting,
  71. GuidePinMoving,
  72. Clean,
  73. LoadProcessRecipe,
  74. PreProcess,
  75. Processing,
  76. PostProcess,
  77. OpeningLid,
  78. ClosingLid,
  79. MFCVerification,
  80. AllMFCVerification,
  81. // exchange wafer with TM
  82. PreparePick,
  83. PreparePlace,
  84. ReadyForPick,
  85. ReadyForPlace,
  86. DropDownWafer,
  87. LiftUpWafer,
  88. DropDownReady,
  89. LiftUpReady,
  90. FinishPick,
  91. FinishPlace,
  92. PartialPressureTesting,
  93. VATPerformanceTesting
  94. }
  95. public enum TMState
  96. {
  97. Unknown,
  98. Init,
  99. Initializing,
  100. InitializingRB,
  101. Idle,
  102. Error,
  103. Pumping,
  104. Venting,
  105. Purging,
  106. Leakchecking,
  107. Picking,
  108. Placing,
  109. Swaping,
  110. PMPicking,
  111. PMPlacing,
  112. PMSwaping,
  113. Aligning,
  114. Mapping,
  115. Extending,
  116. Retracting,
  117. Swapping,
  118. Gotoing,
  119. ControllingPressure,
  120. SetSpeeding,
  121. QuerySpeeding,
  122. SaveSpeeding
  123. }
  124. public enum LLState
  125. {
  126. //Unknown,
  127. //Init,
  128. //Initializing,
  129. //Idle,
  130. //Error,
  131. //Pumping,
  132. //Venting,
  133. //Purging,
  134. //Leakchecking,
  135. //Picking,
  136. //Placing,
  137. //Swaping,
  138. //PMPicking,
  139. //PMPlacing,
  140. //PMSwaping,
  141. //Aligning,
  142. //Mapping,
  143. //Extending,
  144. //Retracting,
  145. //Swapping,
  146. //Gotoing,
  147. Unknown,
  148. Init,
  149. Initializing,
  150. Idle,
  151. Error,
  152. Pumping,
  153. Venting,
  154. Purging,
  155. Cooling,
  156. LeakCheck,
  157. Prepare_For_TM,
  158. Prepare_For_EFEM,
  159. Ready_For_TM,
  160. Ready_For_EFEM,
  161. WaitCooling,
  162. AutoCooling,
  163. }
  164. public enum EFEMSTATE
  165. {
  166. Unknown, // 0
  167. Initializing, // 1
  168. Idle, // 2
  169. Error, // 3
  170. Picking, // 4
  171. Placing, // 5
  172. Aligning, // 6
  173. Mapping, // 7
  174. Init, // 8
  175. Orgshing, // 9
  176. Lifting, // 10
  177. InitingAL, // 11
  178. InitingRB, // 12
  179. Extending, // 13
  180. Retracting, // 14
  181. //SettingLamp, // 15
  182. Swapping,
  183. Gotoing,
  184. Gripping,
  185. Ungripping,
  186. Fliping,
  187. }
  188. public enum VceSTATE
  189. {
  190. Init,//初始化
  191. Idle,//空闲
  192. Error,//错误
  193. ClearError,
  194. Homing,//home操作 对应HM
  195. DoorOpenning,//开门操作 对应DC
  196. DoorClosing,//关门操作 对应DO
  197. Loading,//取cassette操作 包括开门关门 对应LOAD,
  198. UnLoading,
  199. Mapping,//扫片
  200. ReadingMap, //对应MP 包括三种格式 hex binary 智能(只有智能模式可以判断复杂情况)
  201. Goting,//指定槽到达窗口 对应 GC
  202. GotingLP,
  203. CheckStatus,
  204. Resetting,//重置
  205. LoadingWithSMIF,//有SMIF的load
  206. UnLoadingWithSMIF,//有SMIF的load
  207. LoadPreparing,//准备
  208. SafeLoading,
  209. SafeUnloading,
  210. Pumping,
  211. Venting,
  212. LeakChecking,
  213. Unknown
  214. }
  215. }